Abstract: A position detection apparatus includes an illumination optical system for illuminating a first diffraction grating having periods in each of a first direction and a second direction different from the first direction, and a second diffraction grating having a period different from the period in the second direction of the first diffraction grating in the second direction, at an oblique incidence, and a detection optical system for detecting diffracted light from the first diffraction grating and the second diffraction grating, wherein a relative position of the first diffraction grating and the second diffraction grating is detected based on the detected diffracted light, and wherein the illumination optical system includes a plurality of light intensity distributions in the first direction except for on an optical axis of the detection optical system, in a pupil plane thereof.

Abstract: An measuring apparatus includes: a storage unit configured to store a relationship, regarding an irradiation condition predetermined based on a correlation between a characteristic of each of beams of reflected light obtained from a plurality of patterns different from one another in a thickness of a residual layer in a recessed portion and the thickness of the residual layer of each of the plurality of patterns, between the characteristic of the reflected light from each pattern and the thickness of the residual layer of the pattern; and a processing unit configured to, based on a characteristic of reflected light from a pattern formed on a substrate irradiated with light under the irradiation condition and the relationship stored in the storage unit, obtain a thickness of a residual layer in a recessed portion of the pattern formed on the substrate.

Abstract: An imprint apparatus that includes a holding unit, and performs an imprint process, including molding of an imprint material on a substrate held by the holding unit using a mold, curing of the molded imprint material, and releasing of the cured imprint material from the mold, to form a pattern on the substrate. The apparatus includes a first cure device configured to perform a first cure process for the imprint material molded by the mold prior to the releasing; and a second cure device configured to perform a second cure process for the imprint material on the substrate conveyed out from the holding unit after the releasing.

Abstract: A position detection apparatus includes an illumination optical system for illuminating a first diffraction grating having periods in each of a first direction and a second direction different from the first direction, and a second diffraction grating having a period different from the period in the second direction of the first diffraction grating in the second direction, at an oblique incidence, and a detection optical system for detecting diffracted light from the first diffraction grating and the second diffraction grating, wherein a relative position of the first diffraction grating and the second diffraction grating is detected based on the detected diffracted light, and wherein the illumination optical system includes a plurality of light intensity distributions in the first direction except for on an optical axis of the detection optical system, in a pupil plane thereof.

Abstract: An imprint apparatus, which is configured to transfer a pattern to an imprint material supplied on a substrate by using a mold having the pattern formed thereon, includes a light-receiving element, a detection system configured to illuminate a mark formed on the substrate and a mark formed on the mold, and guide light reflected from the mark formed on the substrate and the mark formed on the mold to the light-receiving element, and a relay optical system. The relay optical system is configured to form images of the light reflected from the mark formed on the substrate and the mark formed on the mold between the relay optical system and the detection system. The detection system is configured to guide the light image-formed by the relay optical system to the light-receiving element.

Abstract: A projection exposure apparatus includes an aperture stop that includes a light attenuation part that is located between a light shielding part and an opening part, and has a transmittance larger than that of the light shielding part and smaller than that of the opening part. A width of the light attenuation part is set within a range from a wavefront splitting period of the wavefront splitting device or a value of Z×tan(arcsin(?))/2 to a length that is five times as long as the wavefront splitting period of the wavefront splitting device, where ? is a numerical aperture on an exit side of the wavefront splitting device, and Z is a distance between the focal plane of the wavefront splitting device on the exit side and the aperture stop.

Abstract: An imprint apparatus that includes a holding unit, and performs an imprint process, including molding of an imprint material on a substrate held by the holding unit using a mold, curing of the molded imprint material, and releasing of the cured imprint material from the mold, to form a pattern on the substrate. The apparatus includes a first cure device configured to perform a first cure process for the imprint material molded by the mold prior to the releasing; and a second cure device configured to perform a second cure process for the imprint material on the substrate conveyed out from the holding unit after the releasing.

Abstract: The present invention provides an illumination optical system which illuminates an illumination target surface with a light beam from a light source, the system including a plurality of adjustment units each having one of a reflectance distribution and a transmittance distribution to adjust an incident angle distribution of the light beam which impinges on the illumination target surface, the plurality of adjustment units including an adjustment unit which adjusts differences between light amounts, in a first direction, of incident angle distributions of light beams at a plurality of points on the illumination target surface, and light amounts, in a second direction, thereof, and an adjustment unit which adjusts at least one of light amount differences, in the first direction, of the incident angle distributions of the light beams at the plurality of points on the illumination target surface, and light amount differences, in the second direction, thereof.

Abstract: A projection exposure apparatus includes an aperture stop that includes a light attenuation part that is located between a light shielding part and an opening part, and has a transmittance larger than that of the light shielding part and smaller than that of the opening part. A width of the light attenuation part is set within a range from a wavefront splitting period of the wavefront splitting device or a value of Z×tan(arcsin(?))/2 to a length that is five times as long as the wavefront splitting period of the wavefront splitting device, where a is a numerical aperture on an exit side of the wavefront splitting device, and Z is a distance between the focal plane of the wavefront splitting device on the exit side and the aperture stop.

Abstract: A method is provided for adjusting a first light intensity distribution formed on a pupil plane of an illumination apparatus. The method includes measuring a first light intensity distribution; obtaining a first light intensity radial distribution and a second light intensity radial distribution; obtaining a first cumulative light quantity distribution in a radial direction and a second cumulative light quantity distribution in the radial direction; obtaining a difference at each of at least three points between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction; and adjusting the first light intensity distribution based on the difference between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction.

Abstract: A method is provided for adjusting a first light intensity distribution formed on a pupil plane of an illumination apparatus. The method includes measuring a first light intensity distribution; obtaining a first light intensity radial distribution and a second light intensity radial distribution; obtaining a first cumulative light quantity distribution in a radial direction and a second cumulative light quantity distribution in the radial direction; obtaining a difference at each of at least three points between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction; and adjusting the first light intensity distribution based on the difference between the first cumulative light quantity distribution in the radial direction and the second cumulative light quantity distribution in the radial direction.