Patents by Inventor Ken Miyagi

Ken Miyagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150118397
    Abstract: A method of forming a structure containing a phase-separated structure, the method including applying a block copolymer solution to a substrate to form a layer containing a block copolymer and having a film thickness of less than 100 nm; and phase-separating the layer containing the block copolymer, a solvent of the block copolymer solution comprising a poor solvent exhibiting a poor solubility for a homopolymer A of one of the blocks of the block copolymer.
    Type: Application
    Filed: October 22, 2014
    Publication date: April 30, 2015
    Inventors: Tsuyoshi Kurosawa, Daiju Shiono, Ken Miyagi, Tasuku Matsumiya, Hitoshi Yamano, Taku Hirayama, Katsumi Ohmori
  • Patent number: 8999631
    Abstract: An undercoat agent usable in phase separation of a layer formed on a substrate, the layer containing a block copolymer having a plurality of polymers bonded, the undercoat agent including a resin component, and 20 mol % to 80 mol % of all the structural units of the resin component being a structural unit derived from an aromatic ring-containing monomer; and a method of forming a pattern of a layer containing a block copolymer, the method including: step (1) coating the undercoat agent on a substrate (1), thereby forming a layer (2) composed of the undercoat agent, step (2) forming a layer (3) containing a block copolymer having a plurality of polymers bonded on the surface of the layer (2) composed of the undercoat agent, and subjecting the layer (3) containing the block copolymer to phase separation, and step (3) selectively removing a phase (3a) of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer (3) containing the block copolymer.
    Type: Grant
    Filed: September 12, 2011
    Date of Patent: April 7, 2015
    Assignees: Tokyo Ohka Kogyo Co., Ltd., Riken
    Inventors: Takahiro Senzaki, Takahiro Dazai, Ken Miyagi, Shigenori Fujikawa, Harumi Hayakawa, Mari Koizumi
  • Publication number: 20150093507
    Abstract: A method of producing a structure containing a phase-separated structure, the method including: a step of forming a layer of a neutralization film; a step of form a layer containing a mixture of a plurality of block copolymers having different periods; and a step of phase-separating the layer containing the plurality of block copolymers.
    Type: Application
    Filed: September 23, 2014
    Publication date: April 2, 2015
    Inventors: Tsuyoshi Kurosawa, Daiju Shiono, Ken Miyagi, Tasuku Matsumiya, Kenichiro Miyashita, Katsumi Ohmori
  • Patent number: 8961802
    Abstract: A method of forming a fine pattern, including: a phase separation step in which a layer containing a block copolymer having a plurality of blocks bonded is formed on a substrate, and then the layer is heated for phase separation of the layer; a decomposition step in which at least a portion of a phase of at least one block of the plurality of blocks constituting the block copolymer is decomposed; a selective removal step in which the layer is immersed in a developing solution to selectively remove a phase containing decomposed blocks to form a nano structure; and an etching step in which the substrate is subjected to etching by using the nano structure as a mask; and a main component of the developing solution is an organic solvent having an SP value of 7.5 to 11.5 (cal/cm3)1/2, and having vapor pressure of less than 2.1 kPa at 25° C., or is benzene that may be substituted by an alkyl group, an alkoxy group, or a halogen atom, and the developing solution further contains metal alkoxide.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: February 24, 2015
    Assignees: Tokyo Ohka Kogyo Co., Ltd., Riken
    Inventors: Shigenori Fujikawa, Harumi Hayakawa, Takahiro Senzaki, Ken Miyagi
  • Patent number: 8956810
    Abstract: An undercoat agent usable in phase separation of a layer formed on a substrate, the layer containing a block copolymer having a plurality of polymers bonded, the undercoat agent including a resin component, and 20 mol % to 80 mol % of all the structural units of the resin component being a structural unit derived from an aromatic ring-containing monomer; and a method of forming a pattern of a layer containing a block copolymer, the method including: step (1) coating the undercoat agent on a substrate (1), thereby forming a layer (2) composed of the undercoat agent, step (2) forming a layer (3) containing a block copolymer having a plurality of polymers bonded on the surface of the layer (2) composed of the undercoat agent, and subjecting the layer (3) containing the block copolymer to phase separation, and step (3) selectively removing a phase (3a) of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer (3) containing the block copolymer.
    Type: Grant
    Filed: September 12, 2011
    Date of Patent: February 17, 2015
    Assignees: Tokyo Ohka Kogyo Co., Ltd., Riken
    Inventors: Takahiro Senzaki, Takahiro Dazai, Ken Miyagi, Shigenori Fujikawa, Harumi Hayakawa, Mari Koizumi
  • Publication number: 20150044371
    Abstract: A method of producing a structure containing a phase-separated structure, including applying a neutralization film to a substrate to form a layer of a neutralization film; applying a block copolymer having a plurality of polymers bonded thereto, and a weight average molecular weight of 150,000 or more to the layer of the neutralization film, so as to form a layer containing the block copolymer and having a coating film thickness of 23 nm or less; and phase-separating the layer containing the block copolymer.
    Type: Application
    Filed: August 6, 2014
    Publication date: February 12, 2015
    Inventors: Tsuyoshi Kurosawa, Daiju Shiono, Ken Miyagi, Tasuku Matsumiya, Kenichiro Miyashita, Katsumi Ohmori
  • Publication number: 20150034595
    Abstract: A method of forming a structure containing a phase-separated structure, the method including: a step of forming a layer containing a block copolymer having a plurality of blocks bonded and a purity of 98% or more, and a step of phase-separating the layer containing the block copolymer.
    Type: Application
    Filed: July 29, 2014
    Publication date: February 5, 2015
    Inventors: Takehiro Seshimo, Takahiro Dazai, Takaya Maehashi, Ken Miyagi, Yoshiyuki Utsumi
  • Publication number: 20150034593
    Abstract: A method of producing a structure containing a phase-separated structure, including: forming a layer including a neutralization film on a substrate; forming a layer containing a block copolymer on the layer including the neutralization film, the PA block and PB block being mutually bonded in the block copolymer, and the PB block including a structural unit other than a structural unit constituting the PA block; and subjecting the layer containing the block copolymer to an annealing treatment, such that, in the case where a surface free energy of the PA block, a surface free energy of the PB block and a surface free energy of the neutralization film are represented by a coordinate point A of the PA block, a coordinate point B of the PB block and a coordinate point N of the neutralization film, respectively in the plane of coordinates, the coordinate point N of the neutralization film is within the predetermined range.
    Type: Application
    Filed: July 30, 2014
    Publication date: February 5, 2015
    Inventors: Tasuku Matsumiya, Takehiro Seshimo, Ken Miyagi, Takaya Maehashi, Takahiro Dazai, Yoshiyuki Utsumi
  • Publication number: 20140238954
    Abstract: A method of producing a structure containing a phase-separated structure, including forming, on a substrate, a layer containing a block copolymer having a block of a polyhedral oligomeric silsesquioxane structure-containing structural unit; forming a top coat film by applying, to the layer containing the block copolymer, a top coat material which undergoes a change in polarity upon heating, and controls a surface energy of the layer containing the block copolymer; and subjecting the layer containing the block copolymer on which the top coat film is formed to phase separation by thermal annealing.
    Type: Application
    Filed: February 20, 2014
    Publication date: August 28, 2014
    Applicants: Tokyo Institute of Technology, Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Tasuku Matsumiya, Takehiro Seshimo, Katsumi Ohmori, Ken Miyagi, Daiju Shiono, Kenichiro Miyashita, Tsuyoshi Kurosawa, Teruaki Hayakawa
  • Publication number: 20140127626
    Abstract: A negative tone-development resist composition for forming a guide pattern, including a base component (A) and an acid generator component (B), the base component (A) including a resin component (A1) having a structural unit (a1) derived from an acrylate ester containing an acid dissociable group, and at least one of the following structural units (a2): a structural unit derived from an acrylic acid ester containing a lactone-containing cyclic group, a structural unit derived from an acrylic acid ester containing an ether-containing cyclic group and a structural unit derived from an acrylic acid ester containing a carbonate-containing cyclic group, and a constituent unit (a1) derived from an acrylic acid ester containing an acid-labile group, the acid generator component (B) including an acid generator (B1) including at least one compound represented by general formula (b1) or (b2) shown below
    Type: Application
    Filed: October 5, 2011
    Publication date: May 8, 2014
    Applicants: RIKEN, TOKYO OHKA KOGYO CO., LTD.
    Inventors: Takahiro Senzaki, Takahiro Dazai, Ken Miyagi, Shigenori Fujikawa, Mari Koizumi, Harumi Hayakawa
  • Publication number: 20140113236
    Abstract: A solvent developing negative-tone resist composition containing a base component (A) which exhibits increased polarity and reduced solubility in an organic solvent under action of an acid and an acid generator component (B) which generates an acid upon exposure, the component (A) including a resin component (A1) containing: a structural unit (a2) derived from an acrylate ester containing a 4- to 12-membered lactone-containing cyclic group, a 3- to 7-membered ether-containing cyclic group or a 5- to 7-membered carbonate-containing cyclic group; and a structural unit (a1) derived from an acrylate ester containing an acid decomposable group which exhibited increased polarity by the action of acid, and the acid generator component (B) including an acid generator (B1) containing a compound which generates a sulfonic acid upon exposure.
    Type: Application
    Filed: June 8, 2012
    Publication date: April 24, 2014
    Applicants: Riken, Tokyo Ohka Kogyo Co., Ltd
    Inventors: Takahiro Senzaki, Ken Miyagi, Shigenori Fujikawa, Mari Koizumi, Harumi Hayakawa
  • Publication number: 20140054265
    Abstract: A method of forming a fine pattern, including: a phase separation step in which a layer containing a block copolymer having a plurality of blocks bonded is formed on a substrate, and then the layer is heated for phase separation of the layer; a decomposition step in which at least a portion of a phase of at least one block of the plurality of blocks constituting the block copolymer is decomposed; a selective removal step in which the layer is immersed in a developing solution to selectively remove a phase containing decomposed blocks to form a nano structure; and an etching step in which the substrate is subjected to etching by using the nano structure as a mask; and a main component of the developing solution is an organic solvent having an SP value of 7.5 to 11.5 (cal/cm3)1/2, and having vapor pressure of less than 2.1 kPa at 25° C., or is benzene that may be substituted by an alkyl group, an alkoxy group, or a halogen atom, and the developing solution further contains metal alkoxide.
    Type: Application
    Filed: June 26, 2013
    Publication date: February 27, 2014
    Applicants: Tokyo Ohka Kogyo Co., Ltd., Riken
    Inventors: Shigenori Fujikawa, Harumi Hayakawa, Takahiro Senzaki, Ken Miyagi
  • Publication number: 20140030652
    Abstract: An undercoat agent usable in phase separation of a layer formed on a substrate, the layer containing a block copolymer having a plurality of polymers bonded, the undercoat agent including a resin component, and 20 mol % to 80 mol % of all the structural units of the resin component being a structural unit derived from an aromatic ring-containing monomer; and a method of forming a pattern of a layer containing a block copolymer, the method including: step (1) coating the undercoat agent on a substrate (1), thereby forming a layer (2) composed of the undercoat agent, step (2) forming a layer (3) containing a block copolymer having a plurality of polymers bonded on the surface of the layer (2) composed of the undercoat agent, and subjecting the layer (3) containing the block copolymer to phase separation, and step (3) selectively removing a phase (3a) of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer (3) containing the block copolymer.
    Type: Application
    Filed: September 12, 2011
    Publication date: January 30, 2014
    Applicants: Riken, Tokyo Ohka Kogyo Co.,Ltd.
    Inventors: Takahiro Senzaki, Takahiro Dazai, Ken Miyagi, Shigenori Fujikawa, Harumi Hayakawa, Mari Koizumi
  • Publication number: 20130313223
    Abstract: A method for producing a substrate having a surface nanostructure, including a forming, on a substrate, a layer containing a block copolymer having a plurality of blocks bonded together, and subsequently heating this layer to cause phase separation of the layer; a decomposing at least a portion of the phase including at least one block of the plurality of blocks that constitute the block copolymer of this layer; and immersing the layer in a developing solution and selectively removing the phase containing the decomposed block(s), the developing solution containing, as the main component, an organic solvent having an SP value of 7.5 to 11.5 (cal/cm3)1/2 and a vapor pressure at 25° C. that is less than 2.1 kPa, or benzene which may be substituted with an alkyl group, an alkoxy group or a halogen atom.
    Type: Application
    Filed: February 15, 2012
    Publication date: November 28, 2013
    Applicants: TOKYO OHKA KOGYO CO., LTD., RIKEN
    Inventors: Shigenori Fujikawa, Harumi Hayakawa, Takahiro Senzaki, Ken Miyagi
  • Publication number: 20130252179
    Abstract: A undercoat agent used for performing phase separation of a layer formed on a substrate and containing a block copolymer having a plurality of blocks bonded, wherein the undercoat agent contains a resin component, the resin component is formed from a structural unit having an aromatic ring and a structural unit not having an aromatic ring, and the resin component has a group that can interact with the substrate, and also has a 3 to 7-membered, ether-containing cyclic group.
    Type: Application
    Filed: March 5, 2013
    Publication date: September 26, 2013
    Applicant: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Takahiro Senzaki, Ken Miyagi, Kenichiro Miyashita
  • Publication number: 20130240481
    Abstract: The present invention relates to a composition including: a component (A) being a block copolymer including a block PA bonded to one, or two or more blocks incompatible with the block PA and whose etching selectivity to the block PA is greater than one; and a component (B) being at least one polymer selected from the group consisting of a random copolymer and a homopolymer, wherein the polymer of the component (B) is compatible with at least one block other than the block PA within the blocks constituting the block copolymer of the component (A), and is incompatible with the block PA.
    Type: Application
    Filed: March 7, 2013
    Publication date: September 19, 2013
    Applicant: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Takahiro Senzaki, Ken Miyagi, Kenichiro Miyashita
  • Publication number: 20130243958
    Abstract: An undercoat agent which is used for phase separating a layer including a block copolymer having a plurality of blocks bonded formed on a substrate, wherein the undercoat agent contains a resin component, the resin component includes a structural unit having an aromatic ring and a structural unit having no aromatic ring, and the resin component includes a group which can interact with the substrate and does not include a 3 to 7-membered, ether-containing cyclic group; and a method of forming a pattern of a layer containing a block copolymer, including: a step (1) in which the undercoat agent is applied to a substrate to form a layer containing the undercoat agent; a step (2) in which a layer containing a block copolymer having a plurality of blocks bonded is formed on a surface of the layer containing the undercoat agent, followed by a phase separation of the layer containing the block copolymer; and a step (3) in which a phase containing at least one block of the plurality of blocks constituting the block co
    Type: Application
    Filed: March 8, 2013
    Publication date: September 19, 2013
    Applicant: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Takahiro Senzaki, Ken Miyagi, Tsuyoshi Kurosawa, Daiju Shiono, Tasuku Matsumiya, Kenichiro Miyashita, Katsumi Ohmori
  • Patent number: 8293392
    Abstract: A battery holder having plates disposed between parallel oriented batteries, and holds batteries in specified positions. The battery holder is provided with L-shaped holders each having the form of a first plate and a second plate connected at a right angle corner and having an L-shaped lateral cross-section, and flat-plate holders that connect with the L-shaped holders and have an overall planar form. The L-shaped holder has connecting holes on the outside of the corner between the first plate and second plate. Further, the outer edge of the first plate opposite the corner is provided with first connecting tabs that can connect with connecting holes of another L-shaped holder. The flat-plate holder is provided with second connecting tabs on at least one side edge that connect with connecting holes of an L-shaped holder.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: October 23, 2012
    Assignee: Sanyo Energy (USA) Corporation
    Inventors: JunYoung Park, Ken Miyagi
  • Patent number: 8163836
    Abstract: An adhesive composition which is reduced in gas generation upon heating (has low hygroscopicity), has high alkali resistance, has heat resistance of 200° C. or higher, and can be easily removed with a stripping liquid; and an adhesive film made with the adhesive composition. The adhesive composition is prepared using, at least as a major ingredient, an acrylic polymer produced from (a) styrene, (b) a (meth)acrylic ester monomer containing a cyclic skeleton, and (c) an alkyl (meth)acrylate monomer. The adhesive film has an adhesive composition layer formed from this adhesive composition.
    Type: Grant
    Filed: October 23, 2006
    Date of Patent: April 24, 2012
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Koichi Misumi, Ken Miyagi, Atsushi Miyanari, Yoshihiro Inao
  • Publication number: 20120048738
    Abstract: A method of producing a substrate provided with a metal nanostructure on the surface thereof, including: forming a layer containing a block copolymer having a plurality of polymers bonded on a surface of a substrate, and subjecting the layer to phase separation, selectively removing a phase of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer to expose part of the surface of the substrate, and allowing a metal ion to come into contact with the exposed surface of the substrate to effect an electrochemical reaction between the surface of the substrate and the metal ion, thereby depositing a metal on the surface of the substrate; and a substrate provided with a metal nanostructure on the surface thereof produced by the same method.
    Type: Application
    Filed: August 25, 2011
    Publication date: March 1, 2012
    Applicants: Tokyo Ohka Kogyo Co., Ltd., Riken
    Inventors: Shigenori Fujikawa, Mari Koizumi, Takahiro Senzaki, Takahiro Dazai, Ken Miyagi