Abstract: This invention provides a carrier member made of a UV resistant fiber-reinforced composite material where a UV resistant coating material is applied on the surface of the fiber-reinforced composite material and a process for producing thereof. A preferable fiber-reinforced composite material is a fiber-reinforced plastic or carbon fiber-reinforced carbon composite material. A UV resistant coating material is one or more selected from the group consisting of ceramics, cermets, metals and alloys. The carrier member is produced by coating the surface of the fiber-reinforced composite material with a UV resistant coating material by spraying. This carrier member is advantageous in that it can exhibit properties inherent to a fiber-reinforced composite material such as a light weight, higher rigidity and higher heat resistance and that it little contaminates a precision instrument material when being used in cleansing with UV.

Abstract: This invention provides a chemical mechanical polishing slurry for polishing a metal film formed on an insulating film with a concave on a substrate wherein the slurry contains a thickener without an ionic group with an opposite sign to a charge on a polishing material surface to 0.001 wt % or more and less than 0.05 wt % to the total amount of the slurry and has a slurry viscosity of 1 mPa·s to 5 mPa·s both inclusive. The polishing slurry may be used in CMP to form a reliable damascene electric connection with excellent electric properties at a higher polishing rate, i.e., a higher throughput while preventing dishing or erosion.

Abstract: A robot hand member mounted on an arm unit of an industrial robot and a method of producing the same, wherein there are successively executed a step of laminating prepreg sheets each containing a reinforcing fiber on the outer peripheral surface of a core member having a predetermined shape in cross section, a step of heating the laminated prepreg sheets to a predetermined temperature to thermally set, to form a fiber reinforced plastic, and a step of removing the core member from the fiber reinforced plastic to obtain a hollow structure.

Abstract: By using a polishing slurry which comprises, at least, a polishing grain, an oxidizing agent and a higher-mono-primary amine, it is possible to suppress dishing and erosion liable to be produced in chemical mechanical polishing (CMP) for a copper-based metal film when forming a buried interconnection of a copper-based metal on a barrier metal film of a tantalum-based metal.

Abstract: By using a polishing slurry which comprises, at least, a polishing grain, an oxidizing agent and a higher-mono-primary amine, it is possible to suppress dishing and erosion liable to be produced in chemical mechanical polishing (CMP) for a copper-based metal film when forming a buried interconnection of a copper-based metal on a barrier metal film of a tantalum-based metal.

Abstract: By using a polishing slurry which contains, at least, a polishing grain, an oxidizing agent and a basic amino acid compound, it is possible to suppress dishing and erosion liable to be produced in chemical mechanical polishing (CMP) for a copper-based metal film when forming a buried interconnection of a copper-based metal on a barrier metal film of a tantalum-based metal.

Abstract: This invention provides a chemical mechanical polishing slurry for polishing a metal film formed on an insulating film with a concave on a substrate wherein the slurry contains a thickener without an ionic group with an opposite sign to a charge on a polishing material surface to 0.001 wt % or more and less than 0.05 wt% to the total amount of the slurry and has a slurry viscosity of 1 mPa·s to 5 mPa·s both inclusive. The polishing slurry may be used in CMP to form a reliable damascene electric connection with excellent electric properties at a higher polishing rate, i.e., a higher throughput while preventing dishing or erosion.

Abstract: This invention provides a chemical mechanical polishing slurry for polishing a copper-based metal film formed on an insulating film comprising a concave on a substrate, comprising a polishing material, an oxidizing agent and water as well as a benzotriazole compound and a triazole compound. The polishing slurry may be used in CMP to form a reliable damascene electric connection with excellent electric properties at a higher polishing rate, i.e., a higher throughput while preventing dishing.

Abstract: The present invention relates to a slurry used for chemical mechanical polishing of a substrate having a copper-containing film at the surface, which slurry contains an abrasive, an oxidizing agent, and an adhesion-inhibitor preventing adhesion of a polishing product to a polishing pad. With the polishing slurry of the present invention, even when the copper-containing metal film to be polished has a large thickness or a large area and therefore the amount of the copper-containing metal to be polished is large, adhesion of polishing product to a polishing pad is suppressed and CMP can be completed satisfactorily in a single polishing operation without discontinuation.

Abstract: In chemical mechanical polishing of a substrate comprising a tantalum-containing metal film, a slurry for chemical mechanical polishing comprising a silica polishing grain and an inorganic salt in an amount of 0.01 wt % to 10 wt % both inclusive may be used to prevent dishing and erosion, as well as to achieve an improved polishing rate for tantalum without any damage to tantalum.

Abstract: In chemical mechanical polishing of a copper metal film, contamination of a polishing pad may be prevented by using a slurry for chemical mechanical polishing consisting of &thgr;-alumina which mainly comprises secondary particles made of aggregated primary particles as polishing grains.

Abstract: A fiber-reinforced composite cylindrical form formed by winding up unidirectional prepreg sheets around a mandrel according to such four patterns as to set the fiber winding angles of the resulting layers thereof at 0.degree., 90.degree., 40.degree. to 50.degree., and -40.degree. to -50.degree. with the longer direction thereof, and then heat-curing said layers of said prepreg sheets.

Abstract: A method for producing a lightweight, highly rigid, highly strong and less thermally expansible, carbon fiber-reinforced plastic molding, which comprises using a rigid female mold and elastic male mold(s) in combination and applying an external pressure to at least the male mold(s).

Abstract: An internal combustion engine which devises the opened direction and position of the gas outlet end of a sub-suction path provided separately from a main suction path so as to inject a gas in the circumferential direction of a combustion chamber during the suction stroke, in which the outlet end of the sub-suction path opens within such a range that, in a plane normal to the axis of the cylinder, the line extending in an opened direction of the sub-suction path is at an angle of .+-.20 to 110 degrees with respect to the line joining the center of the suction port and the axis of the cylinder; the distance between the outlet end of the sub-suction path and the face of a suction valve at its closed position is not more than the internal diameter of the main suction path; or the outlet end of the sub-suction path is positioned within a sphere with its center being a spark point of an ignition plug and with the same diameter as the internal diameter of the cylinder and within a range of .+-.

Abstract: A suction system for an internal combustion engine having a sub-suction path for generating a swirl of suction gases in a combustion chamber. The sub-suction path is in addition to the main suction path to be opened or closed by a suction valve. More specifically, in a multicylinder internal combustion engine, path portions for constructing the sub-suction path are formed in a cylinder head, a suction manifold and a carburetor such that the sub-suction path is automatically constituted when the carburetor is connected to the cylinder head through the suction manifold, without further connections being necessary.

Abstract: An internal combustion engine, which is equipped with a sub-suction path for generating a swirl of the suction gas in the combustion chamber in addition to a main suction path to be opened or closed by a suction valve. The sub-suction path is equipped at its inlet side paths with two fuel supply device-line and atmosphere-line paths, the former of which is opened into the draft passage of a fuel supply device and between the air metering portion of said fuel supply device and a throttle valve downstream of the air metering portion and the latter of which is vented to the atmosphere while bypassing said air metering portion and said throttle valve. With the aforementioned atmosphere-line path, moreover, there is connected a vacuum-operated valve which is made operable in accordance with the vacuum prevailing downstream of said throttle valve.

Abstract: A suction system for an internal combustion engine which is equipped with a sub-suction path provided separately from a main suction path for generating a swirl of the gases in a combustion chamber during the suction stroke. The amount of the air to be supplied via the sub-suction path to the combustion chamber is less than 40% preferably from 10 to 40%, more preferably from 20 to 30% of the total amount of the air to be supplied to the combustion chamber. Alternatively the effective area of the sub-suction path at its outlet end is 0.2 to 3.0% of that of the main suction path.

Abstract: Internal combustion engine constituted such that two inlets are provided to a sub-suction path which is provided separately from the main suction path and serves to inject gas such as air or air-fuel mixture at high velocity in the peripheral direction of a combustion chamber at the suction stroke; one of said inlets is located upstream of the throttle valve, the other located in the air path of the carburetor at a position where the throttle valve can be shut in time of idling, wherein the effective opening area of the throttle valve can be enlarged through appropriate number and form of the inlets to be shut by the throttle valve and the downstream side inlet of the two inlets is set to be within the range of an angle, i.e., the downstream side inlet is located within the range of 60.degree.-120.degree.

Abstract: An internal combustion engine which devises the opened direction and position of the gas outlet end of a sub-suction path provided separately from a main suction path so as to inject a gas in the circumferential direction of a combustion chamber during the suction stroke, in which the outlet end of the sub-suction path opens within such a range that, in a plane normal to the axis of the cylinder, the line extending in an opened direction of the sub-suction path is at an angle of .+-.20 to 110 degrees with respect to the line joining the center of the suction port and the axis of the cylinder; the distance between the outlet end of the sub-suction path and the face of a suction valve at its closed position is not more than the internal diameter of the main suction path; or the outlet end of the sub-suction path is positioned within a sphere with its center being a spark point of an ignition plug and with the same diameter as the internal diameter of the cylinder and within a range of .+-.

Abstract: An internal combustion engine is described in which the shape and construction of the gas outlet end portion of a sub-suction path is made operative to inject a gas such as air, an air-fuel mixture or exhaust gas circumferentially into the combustion chamber during the suction stroke. The gas outlet end portion has a reduced diameter and an injection nozzle which has a length greater than its internal diameter. Moreover, the gas outlet end portion is constructed of a pipe member which is rotatably and adjustably fitted into the insertion hole of a cylinder head and which is so shaped that the open direction of the outlet end thereof can be changed when it is rotationally adjusted.