Abstract: An exposure apparatus includes a substrate stage movable while holding a substrate, a substrate alignment system which detects an alignment mark (1) on the substrate held by the substrate stage and detects a reference mark (PFM) provided on the substrate stage, and a mask alignment system which detects, via a projection optical system, a reference mark (MFM) provided on the substrate stage. The reference mark (PFM) on the substrate stage is detected without a liquid by using the substrate alignment system, and the reference mark (MFM) on the substrate stage is detected using the mask alignment system via the projection optical system and the liquid. Then, a positional relationship between a detection reference position of the substrate alignment system and a projection position of an image of a pattern is obtained, thereby accurately performing alignment processing in the liquid immersion exposure.

Abstract: Frame synchronization is quickly established to acquire an RF channel in a short time. Numerically controlled oscillators 1-1 to 1-3, complex calculation circuits 2-1 to 2-3, band limit filters 3-1 to 3-3, a selector 7, a phase error detection circuit 9, a loop filter 10, and an AFC circuit 11 compose a carrier regeneration loop for removing the frequency error of the carrier included in an in-phase component I and a quadrant component Q of the baseband signal input to the complex calculation circuits 2-1 to 2-3. A timing generator 6 detects which of frame synchronization pattern detection circuits 5-1 to 5-3 has detected a frame synchronization pattern, provides the selector 7 with a selection signal corresponding to the decision result, and sends a switch signal to the AFC circuit 11. Thereafter, the carrier for removing the frequency error included in the baseband signal is regenerated to acquire an RF channel in a short time.

Abstract: In exposing substrate by projecting an image of a pattern onto substrate via projection optical system and liquid, side surface and underside surface of substrate are applied with liquid-repellent treatment. By such a configuration, an exposure method by which when exposing edge areas of the substrate, the exposure can be performed in a condition that a liquid immersion region is formed well and that flowing out of the liquid to the outside of the substrate stage are prevented is provided.

Abstract: A demodulator having an improved reliability of the decoding of a TMCC signal is used for digital broadcasting receivers for receiving digital broadcasting by layered transmission system. A pseudo-pattern generator (8) generates fixed pseudo-data which involves no error with respect to a main signal after a TMCC signal and maintains the convolution relationship, and inserts the pseudo-data between the TMCC signal and the main signal through a selector (6B) and a selector (6), thereby conducting Viterbi decoding.

Abstract: An AM neighboring interference removing method and circuit is provided which can select only a desired AM modulation wave even if an interference AM modulation wave is partially superposed upon the desired AM modulation wave. An AM modulation wave desired to be received is multiplied at multipliers by local oscillation signals having frequencies 3fc/2 and fc/2 where fc is the carrier frequency of a neighboring interference AM modulation wave. High frequency components contained in the outputs of the multipliers are removed by low-pass filters. Of the outputs of the low-pass filters, the carrier frequency of the neighboring interference wave is fc/2 and the AM carrier frequencies of the AM stereo modulation wave are (fc/2+f?) and (fc/2?f?), where f? is a difference frequency between the AM carrier frequency of the AM stereo modulation wave and the carrier frequency of the neighboring interference wave.

Abstract: There is provided an exposure apparatus capable of forming a desirable device pattern by removing unnecessary liquid when performing exposure by projecting a pattern onto the substrate via a projection optical system and the liquid. The exposure device projects an image of the pattern onto the substrate P via the projection optical system and the liquid so as to expose the substrate P. The exposure device includes a liquid removing mechanism 40 which removes the liquid remaining on a part 7 arranged in the vicinity of the image plane of the projection optical system.

Abstract: A BS digital broadcasting receiver which eliminates the uncertainty of an ODU's phase noise-dependent switching point when switching a receiving system. The receiver is provided with a demodulator circuit (6A) having a carrier regenerating circuit (19A) based on demodulation data in a BPSK modulation section, and with a demodulator circuit (6B) having a carrier regenerating circuit (19B) based on demodulation data in each time-division modulation section, wherein, when a lock for carriers regenerated by the carrier regenerating circuit (19A) is maintained and carriers regenerated by the carrier regenerating circuit (19B) is locked, demodulation data, in the BPSK demodulation section and a QPSK demodulation section, output from the demodulator circuit (6A) and 8-PSK-modulated demodulation data output from the demodulator circuit (6B) are selected by a selector (7) for outputting.

Abstract: When reception of multiplexed PSK modulated waves BPSK and 8PSK starts, a selector (16C) of a demodulation circuit (IC) read higher-order three bits ??(3) of the phase error data corresponding to outputs I? and Q? of a remapper (7) for performing absolute phasing from a phase error table for BPSK out of tables provided for respective types of modulation methods. A reception signal phase rotation angle detection circuit (8C) detects the phase rotation angle corresponding to a bit “1” of a frame sync signal of a received symbol stream from ??(3) and the MSB of the output I? of the remapper (7) and outputs the phase rotation angle to the remapper (7) to allow the remapper (7) to perform absolute phasing.

Abstract: A carrier reproducing circuit capable of judging the polarity of alienation frequency.

Abstract: A control system adjusts the exposure of a wafer according to the transfer error of a pattern line width caused when a certain integrated exposure over the whole shot areas is made a desired value when a pattern is transferred to a wafer and according to information corresponding to the desired value of the integrated exposure stored in a storage device, then performing scanning exposure. As a result, influences such as of fog exposure due to flare are mitigated, and the uniformity of line width distribution with high precision is ensure over the shot regions on the wafer, achieving pattern transfer to each shot region.

Abstract: A control system adjusts the exposure of a wafer according to the transfer error of a pattern line width caused when a certain integrated exposure over the whole shot areas is made a desired value when a pattern is transferred to a wafer and according to information corresponding to the desired value of the integrated exposure stored in a storage device, then performing scanning exposure. As a result, influences such as of fog exposure due to flare are mitigated, and the uniformity of line width distribution with high precision is ensure over the shot regions on the wafer, achieving pattern transfer to each shot region.

Abstract: A digital demodulator which will need no absolute phasing circuit is provided.

Abstract: A dummy error addition circuit for adding a dummy error to an orthogonal modulation symbol data, wherein a value based on a specified bit error rate is loaded to count clock signals at a counter (11), a carrier of the counter (11) stores outputs from a PN data generator (21) in a shift register (22), outputs from a PN comparison circuit (3) when stored data agree with count values of the counter (11) are recognized as error pulses, a bit selector (40) randomly selects, on receiving error pulses and based on outputs from a PN data generator (41), bits to which to add errors in an orthogonal modulation data, e.g. a PSK modulation symbol data, at interval based on a bit error rate, and bits selected from the orthogonal modulation data are inverted in a bit inversion circuit (5) for outputting to thereby add errors.

Abstract: To provide a de-interleave circuit used for a BS digital broadcasting receiver. The de-interleave circuit is provided with less memory. An address data generator (3) supplies address data (A) to a de-interleave memory (4) in a de-interleave order. Each main signal is read from an address location in the de-interleave memory (4) specified by address data (A), and a following main signal is interleaved and written in that address location of the memory. As a result, the de-interleave memory (4) only requires space for one superframe.

Abstract: A digital broadcasting receiver is provided which can reproduce a carrier quickly and capture a desired signal at high speed. A carrier reproduction phase error detection circuit (6) detects a phase error voltage in accordance with a demodulation output obtained by demodulating a demodulated wave of a modulated wave during a predetermined section in a header section. A peak number calculation circuit (92) calculates an error frequency between a desired reception frequency and a reproduction carrier frequency in accordance with the phase error voltage. A differential coefficient calculation circuit (94) calculates the polarity of the error frequency. A step frequency control circuit (96) converts the calculated error frequency having the calculated polarity into a step frequency width for automatic frequency control. The reproduction carrier frequency is scanned at the converted step frequency width until a frame sync is established after the frame sync is detected.

Abstract: A clock regeneration circuit for regenerating a clock signal for demodulating data from an AM data multiplex modulated signal where digitally modulated signals are multiplexed in the same frequency band as those of an amplitude-modulated signal at the same time. The carrier for an amplitude-modulated signal is extracted from an AM data multiplex modulated signal where digitally modulated signals are multiplexed in the same frequency band as those of the amplitude-modulated signal at the same time through a band-pass filter, and the oscillation frequency of a voltage-controlled oscillator is controlled by the output of a phase comparator through a loop filter. The oscillation output of the voltage-controlled oscillator is supplied to a direct digital synthesizer and the phase of the carrier extracted through the band-pass filter is compared with the phase of the output of the direct digital synthesizer using the phase comparator.

Abstract: A digital broadcast receiver capable of adequately receiving a higher-level layer service along with a lower-level layer service even if the reception CNR degrades. A demodulation decoding section (2) of the receiver judges on the basis of transport and multiplexing configuration control information whether the TS packet allocated to each slot is adapted to a higher-level layer service or a lower-level layer service and informs a code writing section (3) of the result. The code writing section (3) writes, in each TS packet, a layer identification code for judging whether the TS packet is adapted to a higher-level layer service or a lower-layer service and synthesizes a resultant TS packet. A stream separating section (4) reads the layer identification code along with the PID in the packet header included in the TS packet and finds and extracts a desired TS packet.

Abstract: To provide a receiver not requiring any large circuit. A carrier-wave-phase-error table 15-1A for BPSK modulation in which a range equal to or more than 0 of I-axis is defined is prepared for a carrier-wave regenerating circuit 10A of a demodulating circuit 1A for orthogonally detecting a received signal in which digital signals according to BPSK, QPSK, and 8PSK modulations are time-multiplexed and outputting I and Q symbol-stream data It and Qt for each symbol.

Abstract: A BS digital broadcast receiver having no 8PSK-demapper and a less number of delay circuits for Trellis encoding. A QPSK baseband signal based upon a reception signal point position of an absolute-phased baseband demodulation signal is Viterbi-decoded by a Viterbi-decoder 6. An output of the Viterbi-decoder is convolution-reencoded by a convolution encoder 7. Upper four bits of phase error data are searched from a phase error table 31 for carrier reproduction in accordance with a phase difference between 0 degree and a phase of a phase error detection reception signal point position. The upper four bits are delayed by delay circuits 81 to 84 by a total sum of a time taken to Viterbi-decode and a time taken to convolution-encode. The delayed outputs are demapped by a demapped value conversion circuit 9. A code TCD2 determined from the demapped output and convolution encode output is output as an MSB of a Trellis 8PSK decode output from an MSB code judging/error detecting circuit 10.

Abstract: An image reading device is provided with a guide member having a light-blocking portion with its upper surface positioned above an extended surface of a reading surface of an optical reader. The device is also provided with a slant surface between the reading surface of the optical reader and the light-blocking portion. The device is further provided with upper guide surfaces facing the light-blocking portion and the slant surface respectively, at a predetermined distance.