Abstract: A relatively small phased array antenna is formed at a low cost even if the number of radiating elements increases in order to improve the gain. The phased array antenna has a multilayered structure in which a number of radiating elements (15), a phase shift unit (16) for changing the phase of an RF signal transmitted/received at each radiating element, and a distribution/synthesis unit (14) are formed on different layers. Signal lines (X1-Xm) and scanning lines (Y1-Yn) are wired on a phase control layer (35) to connect phase shift units to each other in a matrix. The signal lines and the scanning lines are matrix-driven by selection units (12X, 12Y) so that desired phase shift amounts are set to phase shift units located at the intersections of the signal and scanning lines. In addition, circuit portions repeatedly arranged in a single phase shift unit are formed into single chips mounted on another substrate.

Abstract: An electrostatic actuator has: an upper structure that is connected, via an arm, to a supporting base provided on a substrate and is supported in a space existing over the substrate; a lower structure that is provided in a substrate position in such a way as to oppose the upper structure; an inclination structure that is provided with respect to either one of the upper structure and the lower structure so as to make small the distance between the upper structure and the lower structure; and one or more electrodes that are provided with respect to the other structure in corresponding relationship to the inclination structure.

Abstract: A relatively small and inexpensive phased array antenna provided even if the number of radiators is increased to enhance the gain. The phased array antenna has a multilayer structure including layers where a large number of radiators (15), phase-shifting units (17) each for shifting the phase of a high-frequency signal transmitted/received by the corresponding radiator, and a distributing/synthesizing unit (14) are provided respectively. The phase-shifting circuits (17A to 17D) constituting the phase-shifting units (17) are driven by the respective driver units (12). A switch (17S) used for the phase-shifting unit is provided together with the other wiring pattern on the layer where the phase-shifting units (17) are provided.

Abstract: A microswitch is realized that can be driven by low voltage, and at the same time, that has increased impedance between switch terminals when the switch is OFF. The relation between upper electrode (4), lower electrode (6), contact electrode (7), and signal lines (8) is arranged such that the minimum distance between contact electrode 7 and signal lines 8 is greater than the minimum distance between upper electrode 4 and lower electrode 6 when the microswitch is in the OFF state.

Abstract: A phased-array antenna apparatus used in a microwave or milliwave band and having a high gain includes a multilayer structure. The multilayer structure is constituted by M radiating elements, M phase shifters, phase shifting control circuits, and a feeding unit. The phase shifters are respectively coupled to the radiating elements to shift the phase of a feeding signal supplied to each of the radiating elements in units of N (M and N are integers equal to or larger than two) bits. The phase shifting control circuits control phase shifting of the phase shifters. The feeding unit is arranged to be coupled to each of the radiating elements.

Abstract: In an ink jet head including a substrate having a opening for a pressure chamber, a section of the opening is gradually increased from a front surface of the substrate to an intermediate level of the substrate and is gradually decreased from the intermediate level of the substrate to a back surface of the substrate. The opening at the front surface of the substrate serves as a nozzle.

Abstract: With respect to a plurality of evaluation items for evaluating assemblability of an evaluation-target product, assemblability evaluation information as to the evaluation-target product is entered and an assemblability evaluation is performed based on the entered assemblability evaluation information. Simultaneously with the assemblability evaluation, a reverse-assemblability evaluation is performed based on reverse-assemblability evaluation information which is among the entered assemblability evaluation information and which is usable for evaluation items for performing the reverse-assemblability evaluation.

Abstract: In a method for manufacturing a LIGA process mask, a plating-resistant layer is caused to intervene between a plating seed layer and a resist layer and patterning is performed of the resist layer.

Abstract: A microswitch is realized that can be driven by low voltage, and at the same time, that has increased impedance between switch terminals when the switch is OFF. The relation between upper electrode (4), lower electrode (6), contact electrode (7), and signal lines (8) is arranged such that the minimum distance between contact electrode 7 and signal lines 8 is greater than the minimum distance between upper electrode 4 and lower electrode 6 when the microswitch is in the OFF state.

Abstract: Nozzles for jetting ink droplets and ink chambers connected to the respective nozzles are formed in a substrate. Ink filling the ink chambers is pressurized. Ink pools are also formed adjacent to the ink chambers through partition walls, for supplying ink to the ink chambers. The partition wall makes a predetermined angle with respect to a surface of the substrate. The ink pools are formed adjacent to the ink chambers through thin partition walls. Further, the nozzles are arranged in a line and row matrix and the line of nozzles or the side of ink pools makes a constant angle with respect to a printing direction.

Abstract: In an ink jet head including a substrate having a opening for a pressure chamber, a section of the opening is gradually increased from a front surface of the substrate to an intermediate level of the substrate and is gradually decreased from the intermediate level of the substrate to a back surface of the substrate. The opening at the front surface of the substrate serves as a nozzle.

Abstract: A microactuator with a platform mounted to a movable part of the microactuator, where at least a part of the platform includes at least a dielectric material so that the platform has a smaller dielectric constant than metals. More particularly, the microactuator includes a semiconductor substrate, a stator fixed to the semiconductor substrate where the stator has a stator electrode, a movable part floated from the stator and the semiconductor substrate where the movable part has a movable electode, a plurality of contacts which are in contact with parts of the platform and the movable electrode, and a platform on the contacts so that the platform is fixed to the movabled electrode through the contacts. At least a part of the platform includes a dielectric material to reduce an interaction of the platform with the electrodes when the electrodes are interacting with each other to move the movable part.

Abstract: A phased-array antenna apparatus used in a microwave or milliwave band and having a high gain includes a multilayer structure. The multilayer structure is constituted by M radiating elements, M phase shifters, phase shifting control circuits, and a feeding unit. The phase shifters are respectively coupled to the radiating elements to shift the phase of a feeding signal supplied to each of the radiating elements in units of N (M and N are integers equal to or larger than two) bits. The phase shifting control circuits control phase shifting of the phase shifters. The feeding unit is arranged to be coupled to each of the radiating elements.

Abstract: The present invention provides semiconductor substrate for a microactuator having at least a movable part and a stator, wherein the semiconductor substrate has a plurality of semiconductor tapered projections being unitary formed with the semiconductor substrate and being in contact with only part of the stator, and at least a recessed portion defined in plane shape by the semiconductor tapered projections so that the recessed portion extends under entire bottom surfaces of the movable part and under partial bottom surfaces of the stator.

Abstract: A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.

Abstract: A microactuator includes a pair of stationary elements, a movable element, and a plurality of springs. The stationary elements are fixed to a substrate. The movable element is movably arranged on the substrate and opposes to the stationary elements. The movable element moves parallel to the surface of the substrate by applying a voltage across one of the stationary elements and the movable element. The springs support the movable element to float the movable element above the surface of the substrate. The springs and the movable element are surrounded by at least the stationary elements and externally guarded. A method of manufacturing this microactuator is also disclosed.

Abstract: A vacuum microdevice includes a first electrode, an insulating film, and a second electrode. The first electrode projects in a current radiation region on a substrate and has a sharp tip. The insulating film is formed on the surface of the first electrode except the tip of the first electrode. The second electrode is formed on the insulating film and has an electrode thickness which increases away from the tip of the first electrode.

Abstract: A vacuum microdevice includes a first electrode, an insulating film, and a second electrode. The first electrode projects in a current radiation region on a substrate and has a sharp tip. The insulating film is formed on the surface of the first electrode except the tip of the first electrode. The second electrode is formed on the insulating film and has an electrode thickness which increases away from the tip of the first electrode.

Abstract: A vacuum microdevice having a field-emission cold cathode includes a first electrode having a projection portion formed on its surface, the projection having a sharp tip, an insulating film formed in the region of the first electrode, excluding the sharp tip of the projection portion, a second electrode formed in a region on the insulating film, excluding the sharp tip of the projection portion, to planarize the surface of the second electrode, and a structural substrate bonded to the lower surface of the first electrode and having a recess portion in the bonding surface with the lower surface of the first electrode, the recess portion having a size large enough to cover a recess reflecting the sharp tip of the projection portion formed on the lower surface of the first electrode. The interior of the recess portion formed in the structural substrate communicates with the atmosphere outside the device.

Abstract: In a micromotion mechanical structure, such as a vibration-type sensor or a step motor, comprising at least one fixed electrode and at least one movable electrode which is moved by electrostatic power applied to the fixed electrode, at least one of the electrodes is formed essentially by a single crystal semiconductor material. The single crystal semiconductor material has various merits of uniform mechanical properties, small internal stress, etc. for use in such electrodes. Such structure has been realized by attaching patterned electrode made of the material to another substrate and then removing or thinning the original substrate carrying the patterned electrodes.