Patents by Inventor Kenji Aikawa

Kenji Aikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11365830
    Abstract: A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: June 21, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Publication number: 20220186845
    Abstract: A first flow path member has a first sealing surface for supporting one end surface, in a central axis direction, of an annular seal member, and a second flow path member has a second seal surface including a flat surface for supporting a surface of a plate-like member, and a third seal surface for supporting an outer peripheral surface of the annular seal member, wherein: in the annular seal member, an other end surface of the annular seal member is pressed against the back surface of the plate-like member, the one end surface of the annular seal member is pressed against the first seal surface of the first flow path member, and the outer peripheral surface of the annular seal member is pressed against the third seal surface of the second flow path member; and the plate-like member is pressed by the other end surface of the annular seal member.
    Type: Application
    Filed: January 21, 2020
    Publication date: June 16, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshiyuki INADA, Kazunari WATANABE, Kenji AIKAWA, Kohei SHIGYOU, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Patent number: 11346505
    Abstract: A fluid supply system includes: fluid lines, fluid controllers and joints, in which each of the fluid lines linearly extends in an extension direction that substantially perpendicularly intersects an alignment direction of the fluid lines, each of the fluid controllers is disposed in an aligned manner in the alignment direction with connection surfaces directed to the same direction, a diameter of the pipings is equal to or less than a surface width of the connection surfaces in the alignment direction, and diameters of the joints are equal to or greater than the surface width, and the pipings that are adjacent to each other in the alignment direction are positioned with the joints displaced from each other in the extension direction.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: May 31, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Haruhiko Kuriki, Hajime Nakagawa, Kenji Aikawa
  • Patent number: 11340636
    Abstract: To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly.
    Type: Grant
    Filed: October 5, 2018
    Date of Patent: May 24, 2022
    Assignee: Fujikin Incorporated
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Publication number: 20220155156
    Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.
    Type: Application
    Filed: February 1, 2022
    Publication date: May 19, 2022
    Inventors: Naoya KIDA, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Publication number: 20220157579
    Abstract: Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.
    Type: Application
    Filed: February 4, 2022
    Publication date: May 19, 2022
    Inventors: Naoya Kida, Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi
  • Publication number: 20220151031
    Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to a first end part of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to a second end part of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.
    Type: Application
    Filed: January 24, 2022
    Publication date: May 12, 2022
    Inventors: Naoya KIDA, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Patent number: 11320056
    Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: May 3, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Patent number: 11255458
    Abstract: A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 22, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi, Tomohiro Nakata, Tsutomu Shinohara
  • Patent number: 11243549
    Abstract: The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: February 8, 2022
    Assignee: Fujikin Inc.
    Inventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
  • Publication number: 20220025986
    Abstract: A fluid control device includes; upstream side and downstream side joint blocks defining a fluid flow path, and having engaging portions at a bottom surface side; a support member having a guide portion to which the engaging portions of the upstream side and downstream side joint blocks can be engaged; and a fluid device supported by the support member via the upstream side and the downstream side joint blocks; wherein the upstream side and the downstream side joint blocks are fixed to the guide portion by utilizing a reaction force against a bending force generated by the tightening force of fastening bolts to the upstream side and the downstream side joint blocks and the fluid device connected together, and the length of the engaging portions in the longitudinal direction of the joint blocks is formed shorter than the length of the joint blocks.
    Type: Application
    Filed: December 12, 2019
    Publication date: January 27, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Akihiro HARADA, Kenji AIKAWA
  • Patent number: 11231026
    Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: January 25, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Publication number: 20210396326
    Abstract: A fluid control device comprises includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.
    Type: Application
    Filed: October 18, 2019
    Publication date: December 23, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Tomohiro NAKATA, Toshiyuki INADA, Akihiro HARADA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Publication number: 20210388949
    Abstract: A fluid supply system includes: fluid lines, fluid controllers and joints, in which each of the fluid lines linearly extends in an extension direction that substantially perpendicularly intersects an alignment direction of the fluid lines, each of the fluid controllers is disposed in an aligned manner in the alignment direction with connection surfaces directed to the same direction, a diameter of the pipings is equal to or less than a surface width of the connection surfaces in the alignment direction, and diameters of the joints are equal to or greater than the surface width, and the pipings that are adjacent to each other in the alignment direction are positioned with the joints displaced from each other in the extension direction.
    Type: Application
    Filed: October 3, 2019
    Publication date: December 16, 2021
    Inventors: Haruhiko Kuriki, Hajime Nakagawa, Kenji Aikawa
  • Publication number: 20210388914
    Abstract: A valve device has a structure more suitable for miniaturization and integration and is used for a semiconductor manufacturing process or the like. A valve device includes: a valve body which is accommodated in an accommodation recess and has a first port and a second port in a bottom surface; and a bonnet nut which has a screw portion formed on an outer periphery thereof and is screwed with the inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has first and second annular protrusions for sealing which are formed around the first port and the second port and protrude from a bottom surface. The first and the second annular protrusions are formed so as to share a part thereof.
    Type: Application
    Filed: October 21, 2019
    Publication date: December 16, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Takahiro MATSUDA, Akihiro HARADA, Kazunari WATANABE, Tomohiro NAKATA, Tsutomu SHINOHARA
  • Publication number: 20210388919
    Abstract: A valve device includes: a valve body which is accommodated in an accommodation recess having a circular cross-sectional shape, and has a first port and a second port in a bottom surface; and a bonnet nut which has an outer screw portion screwed with an inner screw portion formed on an inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has an outer peripheral surface portion fitted to an inner peripheral surface portion of the accommodation recess of the flow path block. A convex portion for defining an orientation of the valve body about an axis with respect to the flow path block is formed on the outer peripheral surface portion.
    Type: Application
    Filed: October 21, 2019
    Publication date: December 16, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Takahiro MATSUDA, Kenji AIKAWA, Akihiro HARADA, Kazunari WATANABE, Tomohiro NAKATA, Tsutomu SHINOHARA
  • Patent number: 11162597
    Abstract: A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.
    Type: Grant
    Filed: October 24, 2018
    Date of Patent: November 2, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
  • Patent number: 11156305
    Abstract: A screw hole of an upstream side joining block is formed only on an upstream side of a flow path port thereof in a longitudinal direction, a screw hole of a downstream side joining block is formed only on a downstream side of a flow path port thereof in the longitudinal direction and, between a guide part and an engaging part, an alignment mechanism aligns the positions of the upstream side and the downstream side joining blocks in a horizontal direction orthogonal to the longitudinal direction of the guide part to a center position of the guide part by using a portion of a reaction force that resists a bending force produced by the tightening force of a tightening bolt on a body and the upstream side and the downstream side joining blocks connected to each other.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: October 26, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenji Aikawa, Tsutomu Shinohara, Hajime Nakagawa, Takahiro Matsuda, Akihiro Harada
  • Publication number: 20210199205
    Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.
    Type: Application
    Filed: October 22, 2018
    Publication date: July 1, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kazunari WATANABE, Kohei SHIGYOU, Kenji AIKAWA, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
  • Publication number: 20210132638
    Abstract: A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.
    Type: Application
    Filed: September 30, 2020
    Publication date: May 6, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenji AIKAWA, Takahiro MATSUDA, Toshiyuki INADA, Kazunari WATANABE, Yuta MOTEGI, Tomohiro NAKATA, Tsutomu SHINOHARA