Abstract: A substrate etching method performed by using a plasma processing apparatus includes: providing a substrate including a silicon-containing film to a substrate support; periodically supplying, to the substrate support, bias RF power of 20 kW to 50 kW at a duty ratio of 5% to 50%; and etching the silicon-containing film by plasma generated from a processing gas containing a fluorocarbon gas and an oxygen-containing gas

Abstract: A toroidal continuously variable transmission including at least one containment body covering a target disc that is at least one of an input disc and an output disc. The containment body includes a ring that covers an outer peripheral surface of the target disc so as to be spaced apart from the outer peripheral surface of the target disc in a radial direction. A maximum dimension of the ring in an axial direction is larger than a maximum dimension of the outer peripheral surface of the target disc in the axial direction.

Abstract: An etching method includes (a) providing a substrate on a substrate support in a chamber, the substrate including a first region having a multilayer film in which a silicon oxide film and a silicon nitride film are alternately stacked, a second region having a single-layer silicon oxide film, and a mask; (b) etching the substrate with a first plasma generated from a first process gas; and (c) etching the substrate with a second plasma generated from a second process gas different from the first process gas. The first process gas contains a Cv1Fw1 (v1 is an integer of 2 or more, and w1 is an integer of 1 or more) gas containing an unsaturated bond. The second process gas contains a Cx1Hy1Fz1 (x1 is an integer of 2 or more, and y1 and z1 are integers of 1 or more) gas containing an unsaturated bond.

Abstract: A toroidal continuously variable transmission including a power roller; a support supporting the power roller rotatably; a thrust bearing receiving a load of the power roller in a direction along a rotating axis; and an oil passage supplying lubricating oil to the thrust bearing. A surface of the power roller opposing the support includes a first bearing grooved and the support opposing the power roller includes a second bearing groove. A virtual axis of a discharge port in the oil passage reaches a bearing groove that is one of the first bearing groove and the second bearing groove. Viewed from a direction perpendicular to the rotation axis, a portion of a retainer located at a radially inner side of a retaining hole of the retainer and a portion located at a radially inner side of the bearing groove are located at sides opposite to each other across the virtual axis.

Abstract: A substrate processing method performed in a chamber of a substrate processing apparatus is provided. The chamber includes a substrate support, an upper electrode, and a gas supply port. The substrate processing method includes (a) providing the substrate on the substrate support; (b) supplying a first processing gas into the chamber; (c) continuously supplying an RF signal into the chamber while continuously supplying a negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber; and (d) supplying a pulsed RF signal while continuously supplying the negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber. The process further includes repeating alternately repeating the steps (c) and (d), and a time for performing the step (c) once is 30 second or shorter.

Abstract: A toroidal continuously variable transmission includes a rotating shaft, a pair of discs, at least one power roller, and at least one bearing arranged between the rotating shaft and a casing. At least one of the pair of discs includes: a disc main body including a concave surface opposed to the power roller; and a cylindrical portion projecting from the disc main body along the rotation axis toward an opposite side of the power roller. The cylindrical portion is inserted between the bearing and the rotating shaft.

Abstract: A toroidal continuously variable transmission includes: first and second pistons attached to a shaft portion of a trunnion so as to be externally fitted to the shaft portion, the first and second pistons being arranged so as to be lined up in a direction along a tilt axis; and a cylinder forming a first pressure chamber which makes the first piston move toward a first side in the direction along the tilt axis and a second pressure chamber which makes the second piston move toward a second side in the direction along the tilt axis. The cylinder includes a first lubricating oil passage, and the shaft portion of the trunnion includes a second lubricating oil passage. A third lubricating oil passage through which the first lubricating oil passage communicates with the second lubricating oil passage is formed between the first piston and the second piston.

Abstract: Provided is a toroidal continuously variable transmission that can achieve suitable oil feed both for lubrication at contact interfaces between a power roller and discs and for cooling of the power roller; and a drive mechanism-integrated electricity generation apparatus for an aircraft, the electricity generation apparatus including the toroidal continuously variable transmission. The toroidal continuously variable transmission includes at least one lubrication outlet that discharges an oil toward at least one contact interface between an input or output disc and the power roller; and at least one cooling outlet that discharges the oil toward the power roller. The cooling outlet and the lubrication outlet are arranged such that a distance between the cooling outlet and a point at which the oil discharged from the cooling outlet contacts the power roller is smaller than a distance between the lubrication outlet and the contact interface.

Abstract: Provided is a pressing device for a toroidal continuously variable transmission that is capable of sufficiently supplying lubrication oil to all rollers inside a pocket, and is capable of suppressing the occurrence of fretting wear on the rolling surfaces of the rollers, a first cam surface and a second cam surface. An oil passage 28 is provided for supplying lubrication oil to the inside of each pocket 25 in the inside portion in the radial direction of a retainer 14 that holds a plurality of more than one roller 13 arranged in a row in the radial direction. The center axis O29 of a discharge port 29 that is provided on an end portion on the downstream side of the oil passage 28 and that opens to the inside surface in the radial direction of the pocket 25 is inclined toward the front side in the rotational direction of the retainer 14 with respect to the center axis of the pocket 25.

Abstract: A toroidal continuously variable transmission includes: input and output discs; a power roller sandwiched between the input disc and the output disc so as to be tiltable; a trunnion supporting the power roller and configured to be tiltable about a tilt axis of the power roller and reciprocatable in a direction along the tilt axis; a piston attached to a shaft portion of the trunnion so as to be externally fitted to the shaft portion; and a cylinder forming a pressure chamber which makes the piston reciprocate in the direction along the tilt axis. An inside gap is formed between an outer peripheral surface of the shaft portion of the trunnion and an inner peripheral surface of the piston.

Abstract: A toroidal continuously variable transmission includes: first and second pistons attached to a shaft portion of a trunnion so as to be externally fitted to the shaft portion, the first and second pistons being arranged so as to be lined up in a direction along a tilt axis; and a cylinder forming a first pressure chamber which makes the first piston move toward a first side in the direction along the tilt axis and a second pressure chamber which makes the second piston move toward a second side in the direction along the tilt axis. The cylinder includes a first lubricating oil passage, and the shaft portion of the trunnion includes a second lubricating oil passage. A third lubricating oil passage through which the first lubricating oil passage communicates with the second lubricating oil passage is formed between the first piston and the second piston.

Abstract: A substrate processing method performed in a chamber of a substrate processing apparatus is provided. The chamber includes a substrate support, an upper electrode, and a gas supply port. The substrate processing method includes (a) providing the substrate on the substrate support; (b) supplying a first processing gas into the chamber; (c) continuously supplying an RF signal into the chamber while continuously supplying a negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber; and (d) supplying a pulsed RF signal while continuously supplying the negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber. The process further includes repeating alternately repeating the steps (c) and (d), and a time for performing the step (c) once is 30 second or shorter.

Abstract: Provided is a pressing device for toroidal continuously variable transmission capable of reducing hysteresis that occurs between torque and pressing force. An intermediate sliding member 27 is provided in at least one location of a portion between an end surface on the outside in the radial direction of the retainer 13 of the roller 14 arranged on the outermost side in the radial direction and an inside surface of the pocket 25 on the outside in the radial direction, and a portion between an end surface on the outside in the radial direction of the retainer 13 of one roller 14 of adjoining rollers 14 in the radial direction and an end surface on the inside in the radial direction of the retainer 13 of another roller 14. As a result, the contact area of a sliding contact portion 32 is made smaller than in a case where an intermediate sliding member 27 is not provided.

Abstract: A toroidal continuously variable transmission includes a preload spring disposed between a rotary assembly including a first disc and a pressing device, and a driving force transmission shaft, and a thrust bearing disposed between a first member and the preload spring, the first member being one of the rotary assembly and the driving force transmission shaft. In a direction of an axis line, a gap is formed between a second member and the thrust bearing, the second member being the other of the rotary assembly and the driving force transmission shaft. A dimension of the gap in the direction of the axis line is less than a deformation amount of the preload spring in the direction of the axis line, at an elastic limit.

Abstract: A toroidal continuously variable transmission includes: input and output discs; a power roller sandwiched between the input disc and the output disc so as to be tiltable; a trunnion supporting the power roller and configured to be tiltable about a tilt axis of the power roller and reciprocatable in a direction along the tilt axis; a piston attached to a shaft portion of the trunnion so as to be externally fitted to the shaft portion; and a cylinder forming a pressure chamber which makes the piston reciprocate in the direction along the tilt axis. An inside gap is formed between an outer peripheral surface of the shaft portion of the trunnion and an inner peripheral surface of the piston.

Abstract: In a transmission device, a power roller transmits a rotational driving force from an input disc to an output disc in a transmission ratio (transmission gear ratio) corresponding to a tilt motion angle. The power roller allows the transmission ratio to be changed in such a manner that the position of the trunnion on which the power roller is tiltably supported is changed by a trunnion drive mechanism. Hydraulic oil is supplied from a hydraulic pump to the trunnion drive mechanism via a direction selector valve. The direction selector valve selects a flow direction of the hydraulic oil to supply the hydraulic oil to a speed reduction chamber or a speed increase chamber of the trunnion drive mechanism, and discharge the hydraulic oil from the other. In a case where a discharge condition is met, the controller controls a movement of the discharge valve to discharge the hydraulic oil from the speed increase chamber.

Abstract: Provided is a pressing device for a toroidal continuously variable transmission that is capable of sufficiently supplying lubrication oil to all rollers inside a pocket, and is capable of suppressing the occurrence of fretting wear on the rolling surfaces of the rollers, a first cam surface and a second cam surface. An oil passage 28 is provided for supplying lubrication oil to the inside of each pocket 25 in the inside portion in the radial direction of a retainer 14 that holds a plurality of more than one roller 13 arranged in a row in the radial direction. The center axis O29 of a discharge port 29 that is provided on an end portion on the downstream side of the oil passage 28 and that opens to the inside surface in the radial direction of the pocket 25 is inclined toward the front side in the rotational direction of the retainer 14 with respect to the center axis of the pocket 25.

Abstract: Provided is a pressing device for toroidal continuously variable transmission capable of reducing hysteresis that occurs between torque and pressing force. An intermediate sliding member 27 is provided in at least one location of a portion between an end surface on the outside in the radial direction of the retainer 13 of the roller 14 arranged on the outermost side in the radial direction and an inside surface of the pocket 25 on the outside in the radial direction, and a portion between an end surface on the outside in the radial direction of the retainer 13 of one roller 14 of adjoining rollers 14 in the radial direction and an end surface on the inside in the radial direction of the retainer 13 of another roller 14. As a result, the contact area of a sliding contact portion 32 is made smaller than in a case where an intermediate sliding member 27 is not provided.

Abstract: A method is disclosed for monitoring and controlling a process of plasma-assisted surface modification of a layer formed on a substrate. The method includes flowing a surface modification gas into a plasma processing chamber of a plasma processing system, igniting a plasma in the plasma processing chamber to initiate a surface modification process for a layer formed on a substrate, and acquiring optical emission spectra from an optical emission spectroscopy system attached to the plasma processing chamber, during the surface modification process for the layer. For one embodiment, the method includes altering at least one parameter of the surface modification process based on the acquired optical emission spectra. For one embodiment, the acquired optical emission spectra can include an intensity of a spectral line, a slope of a spectral line, or both to enable endpoint control of the surface modification process. Additional methods and related systems are also disclosed.

Abstract: A toroidal continuously variable transmission includes a preload spring disposed between a rotary assembly including a first disc and a pressing device, and a driving force transmission shaft, and a thrust bearing disposed between a first member and the preload spring, the first member being one of the rotary assembly and the driving force transmission shaft. In a direction of an axis line, a gap is formed between a second member and the thrust bearing, the second member being the other of the rotary assembly and the driving force transmission shaft. A dimension of the gap in the direction of the axis line is less than a deformation amount of the preload spring in the direction of the axis line, at an elastic limit.