Patents by Inventor Kentaro Wada

Kentaro Wada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate support with clamping electrical connector
    Patent number: 7354288
    Abstract: A substrate support comprises a ceramic disc with an electrode that is chargeable through an electrode terminal. An electrical connector connects an external power source to the electrode terminal. The electrical connector has a pair of opposing pincer arms, a groove sized to fit around the electrode terminal, and a pair of through holes to receive a tightening assembly capable of tightening the opposing pincer arms about the electrode terminal.
    Type: Grant
    Filed: June 3, 2005
    Date of Patent: April 8, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Kazutoshi Maehara, Visweswaren Sivaramakrishnan, Kentaro Wada, Mark A. Fodor, Andrzei Kaszuba
  • Substrate support with clamping electrical connector
    Publication number: 20060272774
    Abstract: A substrate support comprises a ceramic disc with an electrode that is chargeable through an electrode terminal. An electrical connector connects an external power source to the electrode terminal. The electrical connector has a pair of opposing pincer arms, a groove sized to fit around the electrode terminal, and a pair of through holes to receive a tightening assembly capable of tightening the opposing pincer arms about the electrode terminal.
    Type: Application
    Filed: June 3, 2005
    Publication date: December 7, 2006
    Inventors: Kazutoshi Maehara, Visweswaren Sivaramakrishnan, Kentaro Wada, Mark Fodor, Andrzei Kaszuba