Abstract: An electro-optical device includes a substrate, a scanning line provided between a first TFT and a second TFT, common wiring, a pixel electrode, a third relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the first TFT and the pixel electrode, a capacitance element provided between the substrate and the scanning line and overlapping the second TFT in plan view, and a second relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the capacitance element and the common wiring. A contact hole electrically coupling the pixel electrode and the third relay electrode overlaps a contact hole electrically coupling the capacitance element and the second relay electrode in plan view.

Abstract: A liquid crystal apparatus includes a substrate, a pixel electrode, common wiring, a TFT provided between the substrate and the common wiring, a scanning line provided between the substrate and the TFT along a first direction, a capacitance element provided between the substrate and the scanning line and overlapping the scanning line in plan view, and a second relay electrode electrically coupled to the common wiring and overlapping the scanning line in plan view. The second relay electrode and a first capacitance electrode serving as one electrode of the capacitance element are electrically coupled to each other through a contact hole overlapping the scanning line and the first capacitance electrode in plan view. The scanning line has a cutout portion provided between the second relay electrode and the first capacitance electrode and surrounding at least three directions of the circumference of the contact hole.

Abstract: A liquid crystal apparatus includes a substrate, a pixel electrode, common wiring provided between the substrate and the pixel electrode, a TFT, a scanning line, a capacitance element provided between the substrate and the scanning line and overlapping the scanning line in plan view, and a second relay electrode electrically coupled to the common wiring and overlapping the scanning line in plan view. A first capacitance electrode serving as one electrode of the capacitance element includes a projecting portion protruding from the scanning line in plan view. The second relay electrode includes a projecting portion overlapping the projecting portion in plan view. The second relay electrode and the first capacitance electrode of the capacitance element are electrically coupled to each other through a contact hole provided between the projecting portion and the projecting portion.

Abstract: An electro-optical device includes a substrate, a scanning line provided between a first TFT and a second TFT, common wiring, a pixel electrode, a third relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the first TFT and the pixel electrode, a capacitance element provided between the substrate and the scanning line and overlapping the second TFT in plan view, and a second relay electrode including a projecting portion overlapping the scanning line in plan view and protruding from the scanning line and electrically coupling the capacitance element and the common wiring. A contact hole electrically coupling the pixel electrode and the third relay electrode overlaps a contact hole electrically coupling the capacitance element and the second relay electrode in plan view.

Abstract: A liquid crystal apparatus includes a substrate, a pixel electrode, common wiring, a TFT provided between the substrate and the common wiring, a scanning line provided between the substrate and the TFT along a first direction, a capacitance element provided between the substrate and the scanning line and overlapping the scanning line in plan view, and a second relay electrode electrically coupled to the common wiring and overlapping the scanning line in plan view. The second relay electrode and a first capacitance electrode serving as one electrode of the capacitance element are electrically coupled to each other through a contact hole overlapping the scanning line and the first capacitance electrode in plan view. The scanning line has a cutout portion provided between the second relay electrode and the first capacitance electrode and surrounding at least three directions of the circumference of the contact hole.

Abstract: An electro-optical device including a capacitance element, a first insulating film serving as an insulating film, and a scanning line serving as a light shielding film, is provided. The first insulating film covers the capacitance element and includes a concave portion serving as a recessed portion that reflects a shape of the capacitance element. The scanning line is provided along the concave portion. The concave portion includes a bottom surface having a curved surface shape. An electronic apparatus including the electro-optical device and a control unit configured to control an operation of the electro-optical device is also provided.

Abstract: A method of manufacturing an electro-optical device includes the steps of: forming a recessed portion at an insulating member; forming a first capacitance electrode, a capacitance insulation film, and a second capacitance electrode along the recessed portion; concurrently patterning the first capacitance electrode, the capacitance insulation film, and the second capacitance electrode; removing a portion of the second capacitance electrode; forming an interlayer insulating film; and etching, until a portion of the first capacitance electrode is exposed in plan view, a region where the portion of the second capacitance electrode is removed, to form a contact hole penetrating through the interlayer insulating film and the capacitance insulation film.

Abstract: Provided is an electro-optical device including: a substrate having a recessed portion that extends in a first direction; a laminated film having a first conductive film, a dielectric film, and a second conductive film; a first insulating film; a light shielding film; a second insulating film; and a semiconductor film including a source region, a channel region, and a drain region that are disposed in this order in the first direction, wherein the laminated film, the first insulating film, the light shielding film, the second insulating film, and the semiconductor film are disposed in this order from the substrate side, and the semiconductor film overlaps with the recessed portion and is disposed along the recessed portion as viewed in plan view.

Abstract: An electro-optical device includes a substrate having light-transmissivity, a capacitance element having light-transmissivity and including a first electrode, a dielectric layer, and a second electrode, a first insulating film having light-transmissivity, a light-shielding film, a second insulating film having light-transmissivity, and a transistor. The first electrode, the dielectric layer, the second electrode, the first insulating film, the light-shielding film, the second insulating film, and the transistor are layered in this order from the substrate side, and an interfacial reflection at the first insulating film side of the light-shielding film is greater than an interfacial reflection at the dielectric layer side of the first electrode with respect to light entering from the substrate.

Abstract: In an electro-optical device, a first light shielding wall and a second light shielding wall pass through sides of a semiconductor layer of a transistor respectively, and reach a scan line on a lower layer side. In a second interlayer insulating layer, a first contact hole and a second contact hole that reach a first source drain region and a second source drain region of the semiconductor layer respectively are provided. Respective widths of the first source drain region and the second source drain region are equal to or less than respective widths of the first contact hole and the second contact hole. Accordingly, the first light shielding wall and the second light shielding wall extend to sides of the first contact hole and the second contact hole respectively.

Abstract: A first substrate of an electro-optical device includes: a substrate body provided with a groove; an insulating film layered on the substrate body in a region including the groove; and a layered film layered on the insulating film. The layered film is provided along a side surface and a bottom surface of the groove with the insulating film disposed therebetween.

Abstract: An electro-optical device includes: a substrate extending along a first direction and having a recessed portion including a bottom surface and a side surface, a laminated film disposed along the bottom surface and the side surface of the recessed portion, and having a first conductive layer, a dielectric layer, and a second conductive layer, a first insulating film covering the laminated film, a portion of the first insulating film being disposed inside the recessed portion, a light shielding film, a second insulating film, and a semiconductor layer disposed along the first direction. The laminated film is arranged along the bottom surface and the side surface of the recessed portion, the first insulating film is disposed so as to include the recessed portion, and a length of side surface in a depth direction is larger than a length of the bottom surface in a width direction.

Abstract: At a motherboard for an image device, which is used for manufacturing an image device such as a liquid crystal device, an organic electroluminescence device, a mirror device, and an image-capturing device, a mark for alignment is provided on an outer side of a pixel area in which a plurality of pixels are arranged. In the photo-lithography process, a light exposure mask is arranged by using the mark as a reference position. For the mark, a recessed portion provided in a motherboard main body is filled with a filling film. The recessed portion includes a first groove extending along a first direction and a second groove extending along a second direction intersecting with the first direction, the second groove not intersecting with the first groove in plan view.

Abstract: In an electro-optical device, a light shielding layer is provided at a first substrate between a second capacitance electrode and a second interlayer insulating layer, in a layer between the second capacitance electrode of a capacitance element and the pixel electrode. The light shielding layer includes a first portion stacked on the second capacitance electrode, and a second portion that protrudes from an end portion of the first portion, through a side of the first capacitance electrode of the capacitance element, toward both sides in a width direction of a semiconductor layer.

Abstract: In a substrate body of an electro-optical device, a first groove, and a second groove extending in a direction intersecting the first groove are formed. A capacitance element is constituted by a layered film that includes a first conductive film, a dielectric film, and a second conductive film sequentially layered in a region including the first groove and the second groove. When the first groove and the second groove intersect, the intersection becomes wide during etching. However, when the first groove and the second groove do not intersect, such as when the first groove and the second groove are spaced apart, a wide portion is less likely to be generated. Accordingly, the first insulating film easily fills the grooves.

Abstract: An electro-optical device includes: a substrate extending along a first direction and having a recessed portion including a bottom surface and a side surface, a laminated film disposed along the bottom surface and the side surface of the recessed portion, and having a first conductive layer, a dielectric layer, and a second conductive layer, a first insulating film covering the laminated film, a portion of the first insulating film being disposed inside the recessed portion, a light shielding film, a second insulating film, and a semiconductor layer disposed along the first direction. The laminated film is arranged along the bottom surface and the side surface of the recessed portion, the first insulating film is disposed so as to include the recessed portion, and a length of side surface in a depth direction is larger than a length of the bottom surface in a width direction.

Abstract: In a substrate body of an electro-optical device, a first groove, and a second groove extending in a direction intersecting the first groove are formed. A capacitance element is constituted by a layered film that includes a first conductive film, a dielectric film, and a second conductive film sequentially layered in a region including the first groove and the second groove. When the first groove and the second groove intersect, the intersection becomes wide during etching. However, when the first groove and the second groove do not intersect, such as when the first groove and the second groove are spaced apart, a wide portion is less likely to be generated. Accordingly, the first insulating film easily fills the grooves.

Abstract: Provided is an electro-optical device including: a substrate having a recessed portion that extends in a first direction; a laminated film having a first conductive film, a dielectric film, and a second conductive film; a first insulating film; a light shielding film; a second insulating film; and a semiconductor film including a source region, a channel region, and a drain region that are disposed in this order in the first direction, wherein the laminated film, the first insulating film, the light shielding film, the second insulating film, and the semiconductor film are disposed in this order from the substrate side, and the semiconductor film overlaps with the recessed portion and is disposed along the recessed portion as viewed in plan view.

Abstract: A first substrate of an electro-optical device includes: a substrate body provided with a groove; an insulating film layered on the substrate body in a region including the groove; and a layered film layered on the insulating film. The layered film is provided along a side surface and a bottom surface of the groove with the insulating film disposed therebetween.

Abstract: An electro-optical device includes a substrate having light-transmissivity, a capacitance element having light-transmissivity and including a first electrode, a dielectric layer, and a second electrode, a first insulating film having light-transmissivity, a light-shielding film, a second insulating film having light-transmissivity, and a transistor. The first electrode, the dielectric layer, the second electrode, the first insulating film, the light-shielding film, the second insulating film, and the transistor are layered in this order from the substrate side, and an interfacial reflection at the first insulating film side of the light-shielding film is greater than an interfacial reflection at the dielectric layer side of the first electrode with respect to light entering from the substrate.