Abstract: In an electro-optical device, a first light shielding wall and a second light shielding wall pass through sides of a semiconductor layer of a transistor respectively, and reach a scan line on a lower layer side. In a second interlayer insulating layer, a first contact hole and a second contact hole that reach a first source drain region and a second source drain region of the semiconductor layer respectively are provided. Respective widths of the first source drain region and the second source drain region are equal to or less than respective widths of the first contact hole and the second contact hole. Accordingly, the first light shielding wall and the second light shielding wall extend to sides of the first contact hole and the second contact hole respectively.

Abstract: In an electro-optical device, a light shielding layer is provided at a first substrate between a second capacitance electrode and a second interlayer insulating layer, in a layer between the second capacitance electrode of a capacitance element and the pixel electrode. The light shielding layer includes a first portion stacked on the second capacitance electrode, and a second portion that protrudes from an end portion of the first portion, through a side of the first capacitance electrode of the capacitance element, toward both sides in a width direction of a semiconductor layer.

Abstract: An electro-optical device includes a mirror being positioned above a surface of a substrate and modulating light, and a torsion hinge being positioned between the mirror and the substrate and pivotably supporting the mirror. The electro-optical device includes beam portions being disposed between the mirror and the substrate at positions that do not overlap the mirror in plan view, and being supported by the substrate while being spaced away from the mirror and the substrate. Spring tips that regulate a pivot range of the mirror protrude from the beam portions toward positions that overlap the mirror in plan view.

Abstract: An electro-optical device includes a mirror being positioned above a surface of a substrate and modulating light, and a torsion hinge being positioned between the mirror and the substrate and pivotably supporting the mirror. The electro-optical device includes beam portions being disposed between the mirror and the substrate at positions that do not overlap the mirror in plan view, and being supported by the substrate while being spaced away from the mirror and the substrate. Spring tips that regulate a pivot range of the mirror protrude from the beam portions toward positions that overlap the mirror in plan view.