Abstract: A method for forming a proteoliposome comprises incorporating into a liposome a membrane protein combined with a carrier. Further, a method for preparing a giant proteoliposome, comprises freezing and thawing an alkali metal salt solution containing a membrane protein and a lipid, and subsequently dialyzing against a second salt solution or a buffer solution having a lower osmotic pressure than that of said alkali metal salt solution. Further, a method for forming a proteoliposome, comprises by freezing and thawing an alkali metal salt solution containing a membrane protein combined with a carrier and a lipid.

Abstract: A method of forming a lipid planar membrane of a bilayer membrane composed of lipid and protein comprises the step of immersing a substrate, which has a long-chain hydrocarbon group at least on the surface of one side thereof, in a suspension of liposome or proteoliposome, respectively. The long-chain hydrocarbon group is introduced into the substrate by bonding a long-chain alkylsilane coupling agent or a long-chain alkyltitanate coupling agent.

Abstract: A method for forming a proteoliposome comprises incorporating into a liposome a membrane protein combined with a carrier. Further, a method for preparing a giant proteoliposome, comprises freezing and thawing an alkali metal salt solution containing a membrane protein and a lipid, and subsequently dialyzing against a second salt solution or a buffer solution having a lower osmotic pressure than that of said alkali metal salt solution. Further, a method for forming a proteoliposome, comprises freezing and thawing an alkali metal salt solution containing a membrane protein combined with a carrier and a lipid.

Abstract: An active matrix cell includes a first conductor group formed on a transparent substrate, two-layered regions consisting of a semiconductor film and a first insulating film, a second insulating film and a second conductor group. The first conductor group forms the source and drain of a thin film transistor, pixel electrode, data line. One of the two-layered regions serves as an active region of the thin film transistor and the other of the two-layered regions serves as the intersection between the data and scanning lines. The second insulating film is buried in the gap between the two-layered regions and the first conductor group, and has substantially a same thickness as the two-layered regions. The second conductor group forms the scanning line and the part of the data line. A method of manufacturing the active matrix cell is also disclosed.

Abstract: An apparatus for measuring the thickness of a plate-shaped article with a substantially rectangular lateral face, comprises a measuring optical system including a light-emitting unit for emitting a measuring light beam along an optical axis in a predetermined plane, and a light-receiving unit provided on said optical axis and adapted to generate an output signal corresponding to the amount of detected measuring light, support system for supporting the article in such a manner that the article is substantially parallel to the predetermined plane and the measuring light enters obliquely the lateral face of the article, relative movement unit for moving, in a direction crossing said predetermined plane, either of said article and the measuring light relative to the other, and determination unit for determining the thickness of the article, based on the output signal of the measuring optical system and the amount of movement by the relative movement unit.

Abstract: An apparatus for controlling idling revolution speed of an internal combustion engine in which air at an upstream side of a throttle valve of an intake tube of the internal combustion engine is injected nearby a fuel injection valve from an injection port provided in an intake manifold of the internal combustion engine through a bypass passage and a flow rate control device. The flow rate control device is provided with a valve housing and a valve seat retaining member having a cylindrical wall disposed within the valve housing and a valve body which is moved forwardly and backwardly by a stepping motor is seated on a valve seat. A flow space is formed between the valve seat and an outlet port provided in the valve housing for communicating thereof with the injection port.

Abstract: In an active matrix structure for liquid crystal display elements which includes pixel electrodes arranged in a matrix form on a glass base plate, thin film transistors having their drains connected to the pixel electrodes, respectively, data lines each connected to sources of the thin film transistors of one column and gate lines connected to gates of the thin film transistors of one row, there are provided in the same plane a light blocking layer disposed opposite each of the thin film transistors across an insulating layer, a storage capacitance electrode disposed partly opposite each of the pixel electrodes across the insulating layer and storage capacitance lines for interconnecting the capacitance electrodes. The light blocking layers, the storage capacitance electrodes and the storage capacitance lines are formed of the same material and at the same time.

Abstract: The thin film transistor comprises source and drain regions, a channel forming region formed between the source and drain regions, a first (main) gate for turning on or off the transistor, and in particular at least one second (sub-) gate for reducing turn-off leakage current. When the n-channel transistor is turned off, for example, a negative voltage is applied to the main gate to form a p-channel layer in the channel forming region under the main gate and a positive voltage is applied to the subgate to form an n-channel layer in the channel forming region under the subgate, for instance, so that a pn junction can be formed between under the main gate and the subgate to reduce the turn-off leakage current. The above-mentioned disclosure can be clearly applied to p-channel transistors. Further, the above four-terminal transistor can be simply modified to a three-terminal transistor by connecting the main gate to the subgate via a diode or a capacitor or by directly connecting the drain region to the subgate.

Abstract: An ion permeable membrane, comprising two or more groups of substances having different sensitive wavelength regions in a lipid membrane, is provided.

Abstract: A camera having zoom lenses of a photographing optical system, zoom lenses of a viewfinder optical system, and a driving motor for driving both zoom lenses. A transmitting mechanism for transmitting the force of the driving motor to the zoom lenses of the viewfinder optical system having a gear train connected to the driving motor and a rotation cam which is provided coaxially with the last gear of the gear train to drive the zoom lenses of the viewfinder lens. A key projects from the end of the periphery of a rotation shaft included in the cam. The last gear is mounted around an end of the rotation shaft of the cam and has a key groove engaging the key. A play is provided between the key groove and the key.

Abstract: An apparatus for detecting foreign particles on a surface of a reticle or pellicle comprises an optical system through which a light beam forms a light spot on the surface. The surface and the light spot are shifted relatively so that the light spot scans the surface. Light detectors receive light scattered by a foreign particle and directed in different directions, respectively, and generated photoelectric outputs by which the presence of the foreign particle is discriminated. Beam diameter and scanning speed are varied to provide the most effective operation for particles of different sizes.

Abstract: The present invention provides a projection exposure apparatus comprising: a reticle stage; an illumination optical system for illuminating a reticle on the reticle stage; a stage on which a substrate is supported; and a projection optical system having a predetermined numerical aperture to project a pattern formed on the reticle and illuminated by the illumination optical system onto the substrate, and in which a longitudinal spherial aberration thereof regarding the focusing of the pattern formed on the reticle onto the substrate are excessively corrected.

Abstract: An active matrix cell includes a first conductor group formed on a transparent substrate, two-layered regions consisting of a semiconductor film and a first insulating film, a second insulating film and a second conductor group. The first conductor group forms the source and drain of a thin film transistor, pixel electrode, data line. One of the two-layered regions serves as an active region of the thin film transistor and the other of the two-layered regions serves as the intersection between the data and scanning lines. The second insulating film is buried in the gap between the two-layered regions and the first conductor group, and has substantially a same thickness as the two-layered regions. The second conductor group forms the scanning line and the part of the data line. A method of manufacturing the active matrix cell is also disclosed.

Abstract: An apparatus for detecting foreign particles on a transparent pellicle comprises a first illuminating device having a first optical axis crossing a surface of the pellicle at a predetermined angle for supplying a light beam onto said transparent pellicle along said first optical axis and a second illuminating device having a second optical axis crossing the surface of said pellicle at an angle different from said predetermined angle for supplying a light beam to said transparent pellicle along said second optical axis. The apparatus further includes a detector for comparing quantity of light of a light beam scattered by a foreign particle and directed to a predetermined direction from said first illuminating device with quantity of light of a light beam scattered by the foreign particle and directed to a predetermined direction from said second illuminating device and for determining a surface of the transparent pellicle on which said foreign particle exists.

Abstract: Pattern detection and measurement comprises: first irradiation means for irradiating a workpiece with a first energy beam; detection means for receiving a second energy beam emitted from a portion of the workpiece irradiated by the first energy beam, thereby detecting a pattern in the irradiated portion; second irradiation means for irradiating the workpiece with a third energy beam; discrimination means for receiving a fourth energy beam emitted from a portion of the workpiece irradiated by the third energy beam, thereby discriminating whether the portion irradiated by the third energy beam is sensitive to the first energy beam; and control means for controlling, in response to the output of the discrimination means, the first energy beam in irradiating the sensitive portion, thereby preventing the damage of the sensitive portion by the first energy beam.

Abstract: A pattern position detecting apparatus using a laser beam which is used for the recognition of an edge position, line width, etc., of a circuit pattern on a semiconductor wafer used in the fabrication of semiconductor devices. The apparatus includes an optical system for condensing a short-wave energy beam into a tiny spot and projecting it onto a sample, means for moving the sample and the spot relative to each other, first detecting means for receiving at least one of a reflection from a pattern and a scattering from a pattern edge, second detecting means for detecting a luminescence emitted from a pattern portion hit by the spot, and means for determining the position of the pattern in accordance with the detection information from the first and second detecting means and the scanning information of the spot.

Abstract: Apparatus for detecting the edge of a pattern on an object surface is disclosed. The apparatus includes a light source for emitting a collimated light beam, a condensing optical system for forming an elongated light spot of the collimated light beam on the object surface, an image-forming optical system for forming an image of the elongated light spot by focusing the reflected light from the object surface, a detector for forming an output signal corresponding to the reflected light from the spot image, an image rotator and a driving member. The elongated light spot is formed by means of slit. The direction of the slit is changed by the driving member to change the direction of the elongated light spot on the object surface. The driving member also drives the image rotator so as to keep the direction of the reflected spot image unchanged irrespective of the change of the direction of the slit.

Abstract: An optical apparatus for the detection of scattered light has a light source for supplying a beam of light with a determined wavelength, an objective lens for focusing the light beam on a test object and a photo receptor for receiving the light scattered around the objective lens by the boundaries of a pattern on the test object. The apparatus further has a light converging ring member and a filter arranged in the optical path between the test object and the photo receptor to allow the scattered light from the test object to enter the filter and the photo receptor after the scattered light is converted into a beam of substantially collimated rays by the action of reflection and convergence by the converging ring member.

Abstract: An optical alignment apparatus with an image-forming optical system for forming an image of an object by means of a light beam and detection means for detecting the position of the object image comprises a collimator lens group for converting the beam coming from said object and having the principal rays intersecting the optical axis into a collimated beam and a condenser lens group for condensing the collimated beam. The condenser lens is so disposed that its optical axis is substantially coincident with the principal ray of the collimated beam from the collimator lens group.In the optical alignment apparatus, the principal rays of the beam passed through the condenser lens group perpendicularly fall on the focal plane of the condenser lens group, and after passing through the condenser lens group, the principal rays pass through the central area of every optical element.

Abstract: An alignment apparatus for aligning a semiconductor wafer with an optical mask containing a circuit pattern to be exposed onto the wafer in the fabrication of semiconductor devices by a proximity exposure apparatus.