Patents by Inventor Kirill V. Shcheglov
Kirill V. Shcheglov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 7093486Abstract: The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.Type: GrantFiled: February 4, 2005Date of Patent: August 22, 2006Assignees: The Boeing Company, California Institute of TechnologyInventors: A. Dorian Challoner, Kirill V. Shcheglov
-
Patent number: 7040163Abstract: The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.Type: GrantFiled: August 12, 2003Date of Patent: May 9, 2006Assignees: The Boeing Company, California Institute of TechnologyInventors: Kirill V. Shcheglov, A. Dorian Challoner
-
Patent number: 7017410Abstract: The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.Type: GrantFiled: February 20, 2003Date of Patent: March 28, 2006Assignees: The Boeing Company, California Institute of TechnologyInventors: A. Dorian Challoner, Kirill V. Shcheglov
-
Patent number: 6990863Abstract: The present invention discloses a resonator gyroscope including an isolated resonator. One or more flexures support the isolated resonator and a baseplate is affixed to the resonator by the flexures. Drive and sense elements are affixed to the baseplate and used to excite the resonator and sense movement of the gyroscope. In addition, at least one secondary element (e.g., another electrode) is affixed to the baseplate and used for trimming isolation of the resonator. The resonator operates such that it transfers substantially no net momentum to the baseplate when the resonator is excited. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate.Type: GrantFiled: April 25, 2003Date of Patent: January 31, 2006Assignees: The Boeing Company, California Institute of TechnologyInventors: A. Dorian Challoner, Kirill V. Shcheglov
-
Patent number: 6955084Abstract: The present invention discloses a gyroscope comprising an isolated resonator including a post proof mass and counterbalancing plate. One or more double beam flexures each interconnect the counterbalancing plate and the proof mass with a first and a second beam attached to the post proof mass and a third and a fourth beam attached to the counterbalancing plate. A baseplate is affixed to the resonator by the double beam flexures. The counterbalancing plate and the proof mass transfer substantially no net momentum to the baseplate when the resonator is excited.Type: GrantFiled: April 10, 2003Date of Patent: October 18, 2005Assignees: The Boeing Company, California Institute of TechnologyInventors: A. Dorian Challoner, Kirill V. Shcheglov
-
Patent number: 6944931Abstract: The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.Type: GrantFiled: August 12, 2003Date of Patent: September 20, 2005Assignees: The Boeing Company, California Institute of TechnologyInventors: Kirill V. Shcheglov, A. Dorian Challoner, Ken J. Hayworth, Dean V. Wiberg, Karl Y. Yee
-
Patent number: 6823734Abstract: The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.Type: GrantFiled: April 25, 2003Date of Patent: November 30, 2004Assignees: California Institute of Technology, The Boeing CompanyInventors: Ken J. Hayworth, Kirill V. Shcheglov, Todd E. Humphreys, A. Dorian Challoner
-
Publication number: 20040226370Abstract: The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.Type: ApplicationFiled: April 25, 2003Publication date: November 18, 2004Applicants: California Institute of Technology, The Boeing CompanyInventors: Ken J. Hayworth, Kirill V. Shcheglov, Todd E. Humphreys, A. Dorian Challoner
-
Patent number: 6796179Abstract: A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.Type: GrantFiled: May 16, 2003Date of Patent: September 28, 2004Assignee: California Institute of TechnologyInventors: Youngsam Bae, Ken J. Hayworth, Kirill V. Shcheglov
-
Publication number: 20040055381Abstract: The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.Type: ApplicationFiled: August 12, 2003Publication date: March 25, 2004Inventors: Kirill V. Shcheglov, A. Dorian Challoner, Ken J. Hayworth, Dean V. Wiberg, Karl Y. Yee
-
Publication number: 20040055380Abstract: The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.Type: ApplicationFiled: August 12, 2003Publication date: March 25, 2004Inventors: Kirill V. Shcheglov, A. Dorian Challoner
-
Publication number: 20040050160Abstract: A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.Type: ApplicationFiled: May 16, 2003Publication date: March 18, 2004Inventors: Youngsam Bae, Ken J. Hayworth, Kirill V. Shcheglov
-
Publication number: 20030205087Abstract: The present invention discloses a gyroscope comprising an isolated resonator including a post proof mass and counterbalancing plate. One or more double beam flexures each interconnect the counterbalancing plate and the proof mass with a first and a second beam attached to the post proof mass and a third and a fourth beam attached to the counterbalancing plate. A baseplate is affixed to the resonator by the double beam flexures. The counterbalancing plate and the proof mass transfer substantially no net momentum to the baseplate when the resonator is excited.Type: ApplicationFiled: April 10, 2003Publication date: November 6, 2003Applicants: THE BOEING COMPANY, CALIFORNIA INSTITUTE OF TECHNOLOGYInventors: A. Dorian Challoner, Kirill V. Shcheglov
-
Publication number: 20030188577Abstract: The present invention discloses a resonator gyroscope including an isolated resonator. One or more flexures support the isolated resonator and a baseplate is affixed to the resonator by the flexures. Drive and sense elements are affixed to the baseplate and used to excite the resonator and sense movement of the gyroscope. In addition, at least one secondary element (e.g., another electrode) is affixed to the baseplate and used for trimming isolation of the resonator. The resonator operates such that it transfers substantially no net momentum to the baseplate when the resonator is excited. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate.Type: ApplicationFiled: April 25, 2003Publication date: October 9, 2003Applicants: THE BOEING COMPANY, CALIFORNIA INSTITUTE OF TECHNOLOGYInventors: A. Dorian Challoner, Kirill V. Shcheglov
-
Publication number: 20030150267Abstract: The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.Type: ApplicationFiled: February 20, 2003Publication date: August 14, 2003Applicant: THE BOEING COMPANYInventors: A. Dorian Challoner, Kirill V. Shcheglov
-
Patent number: 6219145Abstract: An optical profiler is modified in a way which allows it to image a MEMS device at various points during the movement of the MEMS device. The light source is synchronized with a desired movement of the MEMS device. The light source produces pulse at each synchronization period. During each pulse, an interferometric measurement is carried out. So long as the pulse is short enough such that the device does not move significantly, a detection of the position of the device can be accurately obtained.Type: GrantFiled: February 16, 1999Date of Patent: April 17, 2001Assignee: California Institute of TechnologyInventors: Roman C. Gutierrez, Kirill V. Shcheglov, Tony Tang