Abstract: A heat pipe includes a tubular member that is a hollow member in which liquid is encapsulated and of which an inner surface is subjected to an oxidation treatment in advance and a movement section that moves the liquid encapsulated and liquefied in the tubular member along a longitudinal direction of the tubular member by means of a capillary phenomenon and of which a surface is subjected to an oxidation treatment in advance.

Abstract: A substrate processing apparatus includes: a processing container; a stage provided inside the processing container to place a substrate; a support member penetrating a through-hole of a bottom portion of the processing container to support the stage from below; a movable member located outside the processing container, connected to an end portion of the support member to move integrally with the stage; a fixed member fixed around the through-hole outside the processing container; and actuators provided in parallel with each other between the fixed member and the movable member to move the movable member and the stage. Each actuator includes a motor and a rod, and expands and contracts the rod by rotation of a rotary shaft of the motor to move the movable member and the stage, and two or more actuators having a predetermined positional relationship are opposite in rotational directions of the rotary shafts of the motors.

Abstract: A method of measuring a positional deviation of a substrate stage in a substrate processing apparatus provided rotatably inside a processing container, includes: detecting an initial position of a substrate transferred by an arm that transfers the substrate; placing the substrate on the substrate stage; rotating the substrate by a predetermined rotational angle by rotating the substrate stage; delivering the substrate after rotation from the substrate stage to the arm; detecting a position of the substrate after rotation transferred by the arm; and calculating the positional deviation amount of the substrate stage with respect to the initial position of the substrate based on the initial position of the substrate, the position of the substrate after rotation, and the rotational angle.

Abstract: A fixing device includes a belt member that cyclically moves, a pressing unit that comes into contact with the belt member and presses a recording medium moving between the belt member and the pressing unit, and a heat source that includes a base material, a resistance heating element disposed on a surface of the base material along a longitudinal direction of the base material, and an insulator covering the resistance heating element and that comes into contact with the pressing unit via the belt member to heat an inner surface of the belt member, in which the insulator is formed to cover a corner portion of the base material in a direction of movement of the belt member.

Abstract: A refrigerator includes a cooling/heating chamber capable of cooling and heating foods. The cooling/heating chamber is divided into a heating zone that is a space where foods to be heated are placed, and a non-heating zone that is a space continuous with the heating zone where foods not to be heated are placed. The refrigerator further includes an oscillation electrode and a counter electrode that are arranged so as to face each other with the heating zone in between, and an oscillating unit that applies an AC voltage to between the oscillation electrode and the counter electrode.

Abstract: An electromechanical power switch device and methods thereof. At least some of the illustrative embodiments are devices including a semiconductor substrate, at least one integrated circuit device on a front surface of the semiconductor substrate, an insulating layer on the at least one integrated circuit device, and an electromechanical power switch on the insulating layer. By way of example, the electromechanical power switch may include a source and a drain, a body region disposed between the source and the drain, and a gate including a switching metal layer. In some embodiments, the body region includes a first body portion and a second body portion spaced a distance from the first body portion and defining a body discontinuity therebetween. Additionally, in various examples, the switching metal layer may be disposed over the body discontinuity.

Abstract: A substrate processing method includes: exhausting a first space in a processing container by an exhaust mechanism, which is configured to exhaust the first space via a gap by exhausting a second space in the processing container, or configured to exhaust the first space in a state in which a seal gas is caused to flow from the second space to the first space via the gap; and executing the substrate processing on a substrate while causing, by a driving mechanism configured to move a stage, a position of the stage to be changed such that a width of the gap becomes uniform in a time average.

Abstract: A substrate processing method includes: a substrate processing process performing a substrate processing on a substrate in a state in which a stage is tilted by a drive mechanism so that a central axis of the stage, which passes through a center of a mounting surface mounted with the substrate and extends in a direction perpendicular to the mounting surface, forms a first angle other than 0° with respect to a predetermined reference axis of a shower plate, which extends in a vertical direction, while changing a position of the stage by the drive mechanism so that the central axis rotates around the reference axis while maintaining the first angle with respect to the reference axis.

Abstract: A method of transporting a workpiece includes steps of: (a) adjusting an inclination of a stage including a placement surface on which the workpiece is to be placed such that the placement surface is inclined with respect to a horizontal plane; (b) receiving the workpiece from a transport apparatus configured to transport the workpiece by raising lift pins provided in the stage, before or after step (a); (c) placing the workpiece on the inclined placement surface by performing at least one of lowering the lift pins and raising the stage; and (d) adjusting the inclination of the stage such that the placement surface on which the workpiece is placed is parallel to the horizontal plane.

Abstract: A refrigerator according to the present disclosure includes at least one storage chamber and uses an electromagnetic wave to heat a stored object inside the storage chamber. A first electromagnetic wave shield is provided on a door of the storage chamber, and a second electromagnetic wave shield is provided on a housing part of the refrigerator that is in contact with the door while the door is closed. This makes it possible to provide a structure capable of exhibiting a function as an electromagnetic wave shield even for a refrigerator door in which wiring to a grounding part is difficult.

Abstract: An electromechanical power switch device and methods thereof. At least some of the illustrative embodiments are devices including a semiconductor substrate, at least one integrated circuit device on a front surface of the semiconductor substrate, an insulating layer on the at least one integrated circuit device, and an electromechanical power switch on the insulating layer. By way of example, the electromechanical power switch may include a source and a drain, a body region disposed between the source and the drain, and a gate including a switching metal layer. In some embodiments, the body region includes a first body portion and a second body portion spaced a distance from the first body portion and defining a body discontinuity therebetween. Additionally, in various examples, the switching metal layer may be disposed over the body discontinuity.

Abstract: A substrate processing apparatus includes: a processing container having a plurality of processing spaces formed therein; a substrate stage arranged in each of the plurality of processing spaces; a rotary arm including at least one end effector capable of holding a substrate and having a rotation axis located at a position equidistant from the plurality of processing spaces; a sensor provided on a back surface of the at least one end effector of the rotary arm, which is opposite to a substrate holding surface of the at least one end effector; and a rotation mechanism configured to rotate the rotary arm so that the sensor is moved to a position facing the substrate stage or the substrate placed on the substrate stage inside the processing container.

Abstract: Provided is a refrigerator that includes the following: a storage chamber having a space to store a preserved product; an oscillator that forms high frequency power; and oscillation electrode (24) and counter electrode (25) disposed facing each other and connected to the oscillator, oscillation electrode (24) and counter electrode (25) receiving the high frequency power from the oscillator to generate an electric field in the storage chamber. Oscillation electrode (24) and counter electrode (25) are provided at interval H that is shorter than a long side dimension of oscillation electrode (24).

Abstract: Provided is a refrigerator that includes a storage chamber capable of storing a preserved product, power supply unit (48), oscillation circuit (22), oscillation electrode (24) and counter electrode (25), matching unit (52) that matches impedance, controller (50), and a shield. Power supply unit (48) includes a first power supply part that rectifies an alternating current from a commercial alternating-current power supply and converts the alternating current into a direct current, a first ground part that serves as a reference potential of the first power supply part, a second power supply part and a third power supply part that each step down an output voltage of the first power supply part and output the stepped-down output voltage, a second ground part that serves as a reference potential of the second power supply part, and a third ground part that serves as a reference potential of the third power supply part.

Abstract: A substrate processing apparatus includes a vacuum processing container and a rotation arm including a rotary axis disposed at a central portion of the vacuum processing container, wherein, in the rotation arm, a rotation cylinder having a hollow interior constitutes the rotary axis, and a hollow portion of the rotation cylinder constitutes an exhaust path of the vacuum processing container.

Abstract: A processing module includes: a processing container including therein processing spaces in which stages are disposed, respectively, wherein a center of each of the processing spaces is located on a same circumference; a rotation arm including holders configured to hold wafers, which are placed on the stages of the processing spaces, respectively, wherein the rotation arm is rotatable around a center of the circumference as a rotation axis; and a sensor located between adjacent processing spaces and configured to detect positions of the wafers held by the rotation arm during rotational operation of the rotation arm.

Abstract: A culture container linkage device according to the present disclosure includes a first actuator configured to advance or retract needles 32, an actuator holder rotatably provided on a frame and configured to hold the first actuator, a second actuator, and a washer configured to wash the needles. The second actuator rotates the needles via the actuator holder. The needles are configured to be positioned, by the second actuator, at a container-facing position at which the needles face a culture container and a washing-facing position at which the needles face the washer.

Abstract: A rotary mechanism connects a first rotary part and a second rotary part, without using a coupling and while allowing an installation error between the first rotary part and the second rotary part. A rotation body includes a first rotary part and a first fixed part. A flat plate is fixed to the first fixed part of the rotation body and has rigidity in a rotating direction of the first rotary part and flexibility in an axial direction for the rotating direction. A motor includes a second rotary part coaxially fixed to the first rotary part of the rotation body and a second fixed part fixed to the flat plate.

Abstract: The present disclosure relates to a vacuum processing apparatus. The vacuum processing apparatus includes a processing container capable of maintaining an inside thereof in a vacuum atmosphere, a stage provided in the processing container and on which a substrate is placed, a support member passing through an opening formed at a bottom of the processing container to support the stage from below, a holder part located outside the processing container, a flange part arranged around the opening on the outside of the processing container, and a sealing part configured to be expandable and contractible and provided inside the spherical bearing along the circumferential direction of the opening so as to airtightly seal at least a space between the flange part and the holder part.

Abstract: An electric field sensor includes a probe, a cylindrical probe guide, an insulating member, a preload spring and a connector. The probe serves as an inner conductor of a coaxial transmission path and has a portion forming a monopole antenna at a tip end to be in constant contact with a microwave transmission window by a pressing force of a built-in spring thereof. The probe guide is disposed at an outer side of the probe and serves as an outer conductor of the coaxial transmission path. The insulating member is disposed between the probe and the probe guide. The preload spring preloads the probe guide downward and presses the probe guide so that the tip end of the probe guide comes in constant contact with the planar slot antenna. The connector is connected to the probe and the probe guide to connect coaxial signal cables for extracting signals.