Abstract: A method is proposed for producing passive and/or active optical polymer components having integrated fibre-chip coupling by means of casting technology. For this purpose, the master structure is produced in common on a silicon substrate both for accommodating an optical waveguide and a fibre-guiding structure anisotropically etched into the substrate [sic], this master structure is cast by electroplating and the negative mould thus produced is used to produce daughter structures identical to the master structure, the anisotropically etched V-shaped positioning trenches being filled with polymer materials, so that a planar surface is produced, the planar surface is coated with a photoresist or another structurable polymer, trench-shaped openings which subsequently produce the optical waveguides are structured into the polymer coating, and the trench structures are opened by means of laser ablation.

Abstract: An integrated-optical device in polymer technology, having a photoelement coupled onto an optical waveguide, with only the evanescent field components of the optical waveguide being coupled by an optical coupling element into the photoelement, wherein the photoelement (23) is incorporated into a polymeric upwardly closed cover plate (51), the cover plate (51) is fitted exactly onto a base plate (50) having an optical waveguide (20), and the coupling element is an optical buffer layer (54) disposed between the cover plate (51) and base plate (50). Preferably, the buffer layer (30) has a refractive index in the region opposite the photoelement (23) which is less than or equal to the refractive index of the optical waveguide (20), but greater than the refractive index of the buffer laser (30) outside the region opposite the photoelement (23).

Abstract: A monochromator for examining very narrow band ranges of a light spectrum has a fixed inlet slot, a grid illuminated by said slot and rotatively driven by a grid drive, a fixed outlet slot arranged in the angular area of the generated spectrum and at least one cutoff filter arranged in the path of the rays, continuously and swivelingly driven by the grid drive transversely to the path of the rays for filtering out light of orders other than the observed order. The cutoff filter is coupled to the grid drive in such a way that it is synchronically swiveled over the same angle as the grid, covering the desired spectral range.

Abstract: A method of producing passive and/or active optical polymer components (10) having vertical coupling structures (45), wherein at least one structure (22) for receiving a light waveguide (40; 46), and at least two fiber guide structures (14) and at least two adjusting structures (36) are produced on a substrate plate (32) and on a lid plate (34) such that both the plate and the lid plate possess fiber guide structures (14) with which the adjusting structures (36) located opposite in the lid plate or substrate, plate respectively are associated after assembly, and wherein the light waveguide structures (22) of the substrate plate (32) and the lid plate (34) which connect the fiber guide structures (14) extend parallel to each other in at least one region (45) such that the optical fields in the respective light waveguides (40) can be coupled with one another.

Abstract: A method of planarizing trench-like structures, particularly on semiconductor substrates, by filling in the trench-like structures. For this purpose, a pre-polymer is selectively filled into the trench-like structures, is hardened and is then expanded.

Abstract: Proposed is an integrated optical component, particularly a modulator, directional coupler, switch, polarizer, distributor or the like, as well as a method of producing such a component. The component has a light waveguide (17) of an optical polymer which is disposed on a silicon substrate (10) that has at least one optical buffer layer (14) having a low refraction index, wherein a positioning trench (12) that is anisotropically etched into the substrate (10), is essentially aligned with the light waveguide (17) and has a V-shaped cross-section is provided for receiving a glass fiber (11) to be coupled to the coupling end surface (18) of the light waveguide by means of end-to-end coupling.

Abstract: The invention relates to an electrode configuration for a device for generating a plasma. RF is coupled contactlessly via a capacitive coupling electrode disposed at the dark space distance into a carrier backside of a coating installation. Dark space shields on the coating side define the plasma zone and prevent the formation of parasitic plasmas. HF substrate bias voltage on the moving substrate carrier is achieved with a defined plasma zone and the development of parasitic plasmas is avoided.

Abstract: A method and composition for the preparation of calcium silicate bounded shaped articles comprising mixing SiO.sub.2 containing powder, unslaked or slaked lime, calcium hydroxide, with a waste paper pulper slurry containing cellulosic particle of less than 1.1 mm in length is described. Additionally, Portland cement, alumina cement, calcium sulfate anhydride, plaster of Paris, a foam, and a thermally activated accelerator may also be added to the mixture which is then shaped into blanks, and autoclaved.

Abstract: The invention relates to a sputtering unit with an electrode (3) and a target (2) connected with this electrode (3) wherein this target (2) is interchangeable. Herein a consumed target (2) is replaced by a fresh and pre-sputtered target (7) thereby that the complete electrode (3) is replaced by a new electrode (6).

Abstract: Method for machining flat, circular disk-shaped recording media, for example, audio, video or ROM compact disks, for the purpose of improving their surface quality and their dimensional stability, employs a lathe having a driven lathe spindle (7), a vacuum chuck (8) for holding the recording medium or substrate (15, 15'. . . ) to be machined, and a carriage (9) for holding and guiding the cuting tool (5) magazine (14) hold the machined and unmachined substrates, there being further provided a robot (10) held on the base (2) or bed (4) of the lathe and having a gripper arm (11) with gripping tongs (12) movable in several planes which transport the substrates from one magazine (14) to the vacuum chuck (8) or from the vacuum chuck to the other magazine, the stacking axes (L) of the two magazines extending at an angle to the horizontal plane (E), and the magazines being maintained within the range of action of the gripper arm (11) with gripping tongs (12).

Abstract: In a device for transporting substrates in vacuum coating systems with several stations, comprising several substrate holders 16 of plate-like configurations which can e moved across the stations along a prescribed path of transportation in a vertical position and which interact with rails 13, 14 being provided in the area of their foot part 15 below the substrates 22, 23 to be mounted to the substrate holders 16, the foot part 15 of the substrate holder 16 has a pair of rails 13, 14 spaced parallel apart and disposed in a vertical plane. The smaller sides thereof, which face one another, have longitudinal grooves 13a, 14 which correspond with rollers 7, 8 or sliding pads being disposed stationary on the bottom part of the device and being provided in rows corresponding to the course of the grooves and in planes that are on top of each other and spaced vertically apart.

Abstract: A lathe apparatus for machining flat, circular disk-shaped recording media, for example, audio, video or ROM compact disks, for the purpose of improving their surface quality and their dimensional stability is provided which comprises a driven lathe spindle (7), a vacuum chuck (8) for holding the recording medium or substrate (15, 15') to be machined, a carriage (9) for holding and guiding the tool (5), and magazines (14) for holding the machined and unmachined substrates. A robot (10) provided on the base (2) or bed (4) of the lathe comprises a gripper arm (11) with gripping tongs (12) movable in several planes which transports the substrates from one magazine (14) to the vacuum chuck (8) or from the vacuum chuck to the other magazine. The stacking axes (L) of the two magazines extend at an angle to the horizontal plane (E), and the magazines are maintained within the range of action of the gripper arm (11) with gripping tongs (12).

Abstract: A device for the automatic cleaning, testing, and sorting of discoidal, flat substrates (9, 9', . . . ) for example magnetic memory plates, having three support mandrels (12, 13, 23) for the substrates (9, 9', . . . ) to be treated, three magazines (6, 7, 8) to deposit the treated and the untreated substrates (9, 9', . . . ), and having a transporting device fixed to a machine frame (2) or a machine support with several transferring arms (14, 15, 16) which can be moved on several levels and which are equipped with gripping devices (20, 21, 22) is provided with a motor-driven first support mandrel (23) rotating round its longitudinal axis (r) and with a nozzle (25, 26) disposed directly adjacent to said support mandrel in order to apply a cleaning liquid onto the substrate (9, 9', . . . ) which is firmly held by the first support mandrel.

Abstract: In the cleansing especially of cooling water for a heat exchanger the installation of rotationally symmetric filter bodies in the cooling water feeder pipe and suction of sediments across a suction nozzle rotating on the windward side. Difficulties result therein in the production of a required back-flow through the filter and the avoidance of lateral airfluxes in front of the filter surface, as a certain gap is necessary between filter and suction nozzle for holding the sediments.