Patents by Inventor Klaus Rief

Klaus Rief has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7304717
    Abstract: An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.
    Type: Grant
    Filed: December 17, 2002
    Date of Patent: December 4, 2007
    Assignee: Carl Zelss SMT AG
    Inventors: Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner, Klaus Rief, Stefan Schoengart, Markus Neumaier, Baerbel Trossbach, Ulrich Weber, Michael Muehlbeyer, Hubert Holderer, Alexander Kohl, Jochen Weber, Johannes Lippert, Thorsten Rassel
  • Publication number: 20060164619
    Abstract: An imaging device in a projection exposure machine for microlithography comprises at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. Said linear drive has at least one moving element, said moving element having a shearing part and a lifting part. Said shearing part is arranged to move the optical element and said lifting part is arranged to move said shearing part. Said linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.
    Type: Application
    Filed: December 21, 2005
    Publication date: July 27, 2006
    Applicant: Carl Zeiss SMT AG
    Inventors: Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner, Klaus Rief, Stefan Schoengart, Markus Neumaier, Baerbel Schwaer, Ulrich Weber, Michael Muehlbeyer, Hubert Holderer, Alexander Kohl, Jochen Weber, Johannes Lippert, Thorsten Rassel
  • Publication number: 20040263812
    Abstract: An imaging device (7) in a projection exposure machine (1) for microlithography has at least one optical element (10, 33, 34) and at least one manipulator (9, 36, 41), having a linear drive (11), for manipulating the position of the optical element (10, 33, 34). The linear drive (11) has a driven subregion (14) and a nondriven subregion (15), which are movable relative to one another in the direction of a movement axis (17). The subregions (14, 15) are interconnected at least temporarily via functional elements (18) with an active axis (17) [sic] and via functional elements (19) with an active direction at least approximately parallel to the movement axis (17).
    Type: Application
    Filed: August 20, 2004
    Publication date: December 30, 2004
    Inventors: Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner, Klaus Rief, Stefan Schongart, Markus Neumaier, Barbel Trossbach, Ulrich Weber, Michael Muhlbeyer, Hubert Holderer, Alexander Kohl, Jochen Weber, Johannes Lippert, Thorsten Rassel
  • Patent number: 5839527
    Abstract: A multi-axle steering system which is intended for vehicles has a steering gear (4) for a first steering axle (1) and hydrostatic steering for a second steering axle (2). A master cylinder (11) is disposed on the first steering axle (1) and a slave cylinder (23) on the second steering axle (2). The work chambers (12, 13; 24, 25) of the master cylinder (11) and the slave cylinder (23) are connected with each other by pressure lines (26, 27) and in this way together constitute the hydrostatic steering. A centering device (34) for a return of the steered wheels of the second steering axle (2) into their straight-ahead running position is provided on the second steering axle (2).
    Type: Grant
    Filed: October 21, 1996
    Date of Patent: November 24, 1998
    Assignee: ZF Friedrichshafen AG.
    Inventors: Dieter Elser, Klaus Rief
  • Patent number: 5799259
    Abstract: The present invention relates to a method for steering a vehicle (1) with steerable front and rear wheels (2, 3), in which the angle (.beta.) of the rear wheels (3) is set as a function of the steering angle (.alpha.) of the front wheels (2) and other parameters. The displacement of the rear wheels (3) during start-up and steering out of forward travel follows the steering movement of the front wheels (2) with a time delay. Such a steering characteristic prevents a corner (5) of the rear of the vehicle which is on the outside of the turn from running over a laterally placed obstacle, for example a curb, when starting up.
    Type: Grant
    Filed: July 11, 1996
    Date of Patent: August 25, 1998
    Assignee: ZF Friedrichshafen AG
    Inventors: Klaus Rief, Dieter Elser, Walter Kogel