Abstract: A delta-sigma modulation type A/D converter includes: a capacitively coupled amplifier having a sampling capacitor, a feedback capacitor, and an amplifier; a correlated double sampling type first integrator as a first-stage integrator, which is connected to the capacitively coupled amplifier without a switch; a second integrator arranged after the first integrator; a quantizer arranged after the second integrator and quantizing an output of the second integrator; and an D/A converter that D/A-converts an output of the quantizer and feeds back to any one of the capacitively coupled amplifier, the first integrator, and the second integrator.

Abstract: A chopper circuit (100) for a multipath chopper amplifier (201) is described. The chopper circuit (100) comprises a first chopper device (110) in a first circuit path (111), wherein the first chopper device (110) is configured to be controlled by a first clock signal (315), which has a first frequency; and a second chopper device (120) in a second circuit path (121), parallel to the first circuit path (111), wherein the second chopper device (120) is configured to be controlled by a second clock signal (325), which has a second frequency, wherein the first frequency is greater than the second frequency. Furthermore, a corresponding method of chopping an input signal (102) is described.

Abstract: A delta-sigma modulation type A/D converter includes: a capacitively coupled amplifier having a sampling capacitor, a feedback capacitor, and an amplifier; a correlated double sampling type first integrator as a first-stage integrator, which is connected to the capacitively coupled amplifier without a switch; a second integrator arranged after the first integrator; a quantizer arranged after the second integrator and quantizing an output of the second integrator; and an D/A converter that D/A-converts an output of the quantizer and feeds back to any one of the capacitively coupled amplifier, the first integrator, and the second integrator.

Abstract: A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate including: a body having dimensions compatible with the apparatus; a plurality of sensor modules embedded in the body, each sensor module having: a sensor configured generate an analog measurement signal, an analog to digital converter to generate digital measurement information from the analog measurement signal, and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.

Abstract: A method of differential signal transfer from a differential input Vinp and Vinn having a common mode input voltage that can be higher than the power supply voltage by providing an input chopper having first through fourth chopper transistors, each having a source, a drain and a gate, the input chopper having Vinp and Vinn as a differential input, providing an output chopper, capacitively coupling a differential output Voutp and Voutn of the input chopper to a differential input of the output chopper, capacitively coupling a clock to the input chopper and coupling the clock to the output chopper, the clock having a first phase and a second phase opposite from the first phase, the first phase being coupled to the gates of the first and second transistors and the second phase being coupled to the gates of the third and fourth transistors, and providing protection of the gates of the first through fourth transistors from excessive voltages. Various embodiments are disclosed.

Abstract: One example discloses a ratiometric device, including: a current source having a first current, a second current different from the first current, and a current-select program; a sensor device responsive to a gas and having a sensor-cold temperature T(cold,sens) in response to the first current and a sensor-hot temperature T(hot,sens) in response to the second current; a reference device having a reference-cold temperature T(cold,ref) in response to the first current and a reference-hot temperature T(hot,ref) in response to the second current; and wherein the ratiometric device includes a temperature difference ratio output based on T(cold,sens), T(hot,sens), T(cold,ref) and T(hot,ref).

Abstract: An efficient analog to digital converter is disclosed. The efficient analog to digital converter includes a coarse analog to digital converter coupled to an input analog signal. The coarse analog to digital converter is configured to provide an approximate digital representation of the input analog signal. The efficient analog to digital converter also includes a fine analog to digital converter coupled to the input analog signal. The output of the coarse analog to digital converter is coupled to the fine analog to digital converter. The fine analog to digital converter is configured to set input range of the fine analog to digital converter as a function of the output of the coarse analog to digital converter.

Abstract: One example discloses a ratiometric device, including: a current source having a first current, a second current different from the first current, and a current-select program; a sensor device responsive to a gas and having a sensor-cold temperature T(cold,sens) in response to the first current and a sensor-hot temperature T(hot,sens) in response to the second current; a reference device having a reference-cold temperature T(cold,ref) in response to the first current and a reference-hot temperature T(hot,ref) in response to the second current; and wherein the ratiometric device includes a temperature difference ratio output based on T(cold,sens), T(hot,sens), T(cold,ref) and T(hot,ref).

Abstract: Fast-settling capacitive-coupled amplifiers are disclosed. The amplifiers use two Capacitive Coupled paths embedded in a Multipath Hybrid Nested Miller Compensation topology. One path is a direct high frequency path and the other path is a slower stabilization path. This combination results in a flat frequency response to and through the chopper frequency, and a fast settling response. Various exemplary embodiments are disclosed, including operational amplifier and instrumentation amplifier configurations.

Abstract: An efficient analog to digital converter is disclosed. The efficient analog to digital converter includes a coarse analog to digital converter coupled to an input analog signal. The coarse analog to digital converter is configured to provide an approximate digital representation of the input analog signal. The efficient analog to digital converter also includes a fine analog to digital converter coupled to the input analog signal. The output of the coarse analog to digital converter is coupled to the fine analog to digital converter. The fine analog to digital converter is configured to set input range of the fine analog to digital converter as a function of the output of the coarse analog to digital converter.

Abstract: A method of differential signal transfer from a differential input Vinp and Vinn having a common mode input voltage that can be higher than the power supply voltage by providing an input chopper having first through fourth chopper transistors, each having a source, a drain and a gate, the input chopper having Vinp and Vinn as a differential input, providing an output chopper, capacitively coupling a differential output Voutp and Voutn of the input chopper to a differential input of the output chopper, capacitively coupling a clock to the input chopper and coupling the clock to the output chopper, the clock having a first phase and a second phase opposite from the first phase, the first phase being coupled to the gates of the first and second transistors and the second phase being coupled to the gates of the third and fourth transistors, and providing protection of the gates of the first through fourth transistors from excessive voltages. Various embodiments are disclosed.

Abstract: A method of differential signal transfer from a differential input Vinp and Vinn having a common mode input voltage that can be higher than the power supply voltage by providing an input chopper having Vinp and Vinn as a differential input, providing an output chopper, capacitively coupling a differential output Voutp and Voutn of the input chopper to a differential input of the output chopper, capacitively coupling a clock to the input chopper and coupling the clock to the output chopper, the clock having a first phase and a second phase opposite from the first phase, the first phase being coupled to the gates of the first and second transistors and the second phase being coupled to the gates of the third and fourth transistors, and providing protection of the gates of the first through fourth transistors from excessive voltages. Various embodiments are disclosed.

Abstract: Fast-settling capacitive-coupled amplifiers are disclosed. The amplifiers use two Capacitive Coupled paths embedded in a Multipath Hybrid Nested Miller Compensation topology. One path is a direct high frequency path and the other path is a slower stabilization path. This combination results in a flat frequency response to and through the chopper frequency, and a fast settling response. Various exemplary embodiments are disclosed, including operational amplifier and instrumentation amplifier configurations.

Abstract: An ADC is disclosed which has, as a first stage, a successive approximation converter, or other compensated, direct comparison converter, followed by a sigma delta modulation converter as a second stage. The sigma delta converter may beneficially be a first order modulator. The resulting ADC combines accuracy with low power consumption per conversion, and thus is particularly suited for use in temperature sensors for applications such as RFID transponders. Such a temperature sensor and an RFID transponder are also disclosed. There is also disclosed a method of analog-to-digital conversion, comprising a first successive approximation register or other compensated, direct comparison conversion stage followed by a sigma delta modulation stage, which, further, may be combined with providing a proportional-to-absolute-temperature (PTAT) signal, for low-power, accurate temperature sensing.

Abstract: A method of differential signal transfer from a differential input Vinp and Vinn having a common mode input voltage that can be higher than the power supply voltage by providing an input chopper having Vinp and Vinn as a differential input, providing an output chopper, capacitively coupling a differential output Voutp and Voutn of the input chopper to a differential input of the output chopper, capacitively coupling a clock to the input chopper and coupling the clock to the output chopper, the clock having a first phase and a second phase opposite from the first phase, the first phase being coupled to the gates of the first and second transistors and the second phase being coupled to the gates of the third and fourth transistors, and providing protection of the gates of the first through fourth transistors from excessive voltages. Various embodiments are disclosed.

Abstract: A phase detection circuit determines phase difference between a periodic signal and a reference signal of substantially equal frequency. The circuit includes: a source input receiving the periodic signal; a feedback signal generator providing a feedback signal (PFB) with substantially the same frequency as the reference signal; a phase difference circuit coupled to the source input node and a second signal input node coupled to the feedback signal generator, determining an error signal from phase difference between the periodic signal and PFB; an integrator circuit integrating the error signal into an integration signal; and a digitizing circuit digitizing the integration signal. The feedback signal generator is coupled to the digitizing circuit, providing PFB based on the digitized integration signal, and selecting the phase of PFB from a number of fixed phases. The phase detection circuit generates a time-average of the phase of PFB selected from the plurality of fixed phases.

Abstract: An ADC is disclosed which has, as a first stage, a successive approximation converter, or other compensated, direct comparison converter, followed by a sigma delta modulation converter as a second stage. The sigma delta converter may beneficially be a first order modulator. The resulting ADC combines accuracy with low power consumption per conversion, and thus is particularly suited for use in temperature sensors for applications such as RFID transponders. Such a temperature sensor and an RFID transponder are also disclosed. There is also disclosed a method of analog-to-digital conversion, comprising a first successive approximation register or other compensated, direct comparison conversion stage followed by a sigma delta modulation stage, which, further, may be combined with providing a proportional-to-absolute-temperature (PTAT) signal, for low-power, accurate temperature sensing.

Abstract: An oscillator device for generating an oscillator signal, includes a heater arrangement, a first switching element, a temperature sensor, signal process means, and voltage controlled oscillator; an output of the temperature sensor being connected to an input of the signal processing means, and an output of the signal processing means being connected to an input of the voltage controlled oscillator. The first switching element is arranged for receiving the oscillator signal from the voltage controlled oscillator and for providing a heater drive signal to either a first heater element or a second heater element of the heater arrangement based on the oscillator signal. The signal processing means comprise a synchronous demodulator.

Abstract: A phase detection circuit arranged as sigma-delta modulator for determining a phase difference between a periodic signal and a reference signal, the periodic signal and the reference signal having a substantially equal frequency, includes: a source input configured to receive the periodic signal whose phase relationship with respect to the reference signal is to be determined; a feedback signal generator configured to provide a feedback signal, the feedback signal and reference signal having substantially the same frequency; a phase difference circuit coupled to the source input node and a second signal input node coupled to the feedback signal generator, and configured to determine an error signal as a function of the phase difference between the periodic signal and the feedback signal; an integrator circuit coupled to the phase difference circuit, configured to receive the error signal and to integrate the error signal to provide an integration signal; a digitizing circuit coupled to the integration circuit

Abstract: An oscillator device for generating an oscillator signal, includes a heater arrangement, a first switching element, a temperature sensor, signal process means, and voltage controlled oscillator; an output of the temperature sensor being connected to an input of the signal processing means, and an output of the signal processing means being connected to an input of the voltage controlled oscillator. The first switching element is arranged for receiving the oscillator signal from the voltage controlled oscillator and for providing a heater drive signal to either a first heater element or a second heater element of the heater arrangement based on the oscillator signal. The signal processing means comprise a synchronous demodulator.