Abstract: A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints.

Abstract: An apparatus for photolithographically transferring, onto a plate-like member a pattern corresponding to picture elements of a liquid crystal display device and a pattern corresponding to driving circuits and so on, by use of a photomask. The surface of the plate-like member is divided into different areas and, each time one of the different areas of the plate-like member is subjected to the pattern transfer operation, the plate-like member is fed stepwise relative to an optical system provided to project an image of the photomask onto the plate-like member. At the same time, the range of the photomask pattern which is to be transferred onto the plate-like member is changed.

Abstract: A static pressure gas bearing assemby having a gaseous fluid discharging bearing member for supporting a shaft by the discharged gaseous fluid is disclosed. The bearing member is made of porous graphite. For the manufacture, carbon particles approximately 80% of which have particle diameters not greater than approx. 40 microns, more particularly, particle diameters ranging from 1-20 microns are used. The carbon particles are subjected to molding, calcination and graphitization, whereby a porous graphite member having pores distributed substantially uniformly is obtained. In another aspect of the invention, the bearing member is made of a porous graphite material having a specific degree of swelling. Also, in another aspect, the surface of the shaft to be supported by the bearing member is coated with titanium nitride by ion plating treatment. In this manner, a high-precision and high-prerformance bearing assembly can be provided with reduced manufacturing costs.

Abstract: A rotary motion driving apparatus includes a gas bearing assembly for supporting a rotatable shaft and is usable in any ambience such as a vacuum ambience. The rotatable shaft has two flange-like collar portions formed on the opposite ends of the rotatable shaft. The collars are used as the members to be supported by the gas bearing assembly with respect to the thrust direction. A driving motor has a rotor and a stator, the rotor being fixed to one of the collars of the rotatable shaft and the stator being fixed to the gas bearing assembly. The other collar of the rotatable shaft functions as an output end of the rotary drive produced by the motor. Around such drive outputting collar of the rotatable shaft, a sealing plate having a plurality of grooves or recesses is provided. The sealing plate is maintained out of contact with the collar, and suitable vacuum is supplied to the grooves of the sealing plate.

Abstract: An exposure apparatus for exposing in a step-and-scan manner a plate-like member to a pattern with radiation so that images of the pattern are transferred onto different regions on the plate-like member. The apparatus includes a mirror imaging optical system for projecting the image of the pattern onto the plate-like member, a carriage for scanningly moving, at the time of exposure, the plate-like member relative to the mirror imaging system, and a stage movably mounted on the carriage for step-feeding the plate-like member at the time of non-exposure so as to sequentially place the different regions of the plate-like member at an exposure station under the mirror imaging system. A locking system is provided to lock the stage relative to the carriage by use of vacuum, at the time of exposure, whereby unwanted displacement of the plate-like member relative to the carriage at the time of scanning exposure is prevented.

Abstract: An exposure apparatus for exposing in a step-and-scan manner a plate-like member to a pattern with radiation so that images of the pattern are transferred onto different regions on the plate-like member. The exposure apparatus includes a mirror imaging optical system for projecting the image of the pattern onto the plate-like member. Also, the exposure apparatus includes a carriage for scanningly moving, at the time of exposure, the plate-like member relative to the mirror imaging optical system and a stage for step-feeding the plate-like member at the time of non-exposure so as to sequentially place the different regions of the plate-like member at an exposure station under the mirror imaging system. The stage is mounted on the carriage, and the movement of the carriage is guided by linear air-bearings.

Abstract: A moving mechanism for relatively moving first and second members, the mechanism comprising a first fluid discharging portion provided on the first member, for relatively supporting the second member by use of a static pressure, and a second fluid discharging portion operable to produce a static pressure that is effective to apply, to the first member, a force contributable to prevent any deformation of the first member due to the static pressure caused by the first fluid discharging portion.

Abstract: A position detecting device usable in an exposure apparatus for transferring an image of a first object onto a second object, for detecting the position of at least one of the first and second objects, includes a rotatable portion having a carrying portion for carrying thereon the at least one object, a first supporting member for supporting the rotatable portion, the first supporting member including a first driving system for moving the rotatable portion in a rotational direction, second supporting member for supporting the first supporting member, the second supporting member including a second driving system for moving the first supporting member in a rotational direction, and a displacement detecting system for detecting displacement of the first supporting member.

Abstract: An exposure apparatus for exposing a plate-like member to a pattern with radiation in a step-and-repeat manner thereby to transfer images of the pattern onto different regions on a surface of the plate-like member. The apparatus includes an X-Y stage for moving the plate-like member in X and Y directions, a .theta.-stage for moving the plate-like member in a .theta. (rotational) direction relative to the X-Y stage, and laser interferometers for measuring an amount of movement of the plate-like member, by the X-Y stage, in each of the X and Y directions by use of a mirror mounted on the .theta.-stage. Placement of the mirror on the .theta.-stage allows correction of yawing if it occurs during movement of the plate-like member by X-Y stage. Also, deviation of the plate-like member in the Y direction if it occurs during movement of the plate-like member by the X-Y stage in the X direction, is detected by the laser interferometers. This allows detection of a positional error of the mirror in the .theta.