Patents by Inventor Koichi Terao

Koichi Terao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Glass, plasma resisting component, component for electromagnetic wave-transparent window and plasma processing apparatus
    Publication number: 20020049127
    Abstract: A glass material for use in a microwave-transparent window of a plasma processing apparatus is provided. The glass material has not only good properties similar to those of quartz glass but a corrosion resistance particularly to fluorine-containing plasma. The glass having the corrosion resistance to the fluorine-containing plasma is composed of a first glass phase consisting of Si and O and a second glass phase consisting of Si, Al and O. The second glass phase has a mass ratio of Al to Si of at least 0.01. The glass member is useful as a component for forming an electromagnetic-wave introducing window of the plasma processing apparatus or the like.
    Type: Application
    Filed: March 20, 2001
    Publication date: April 25, 2002
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Yuichi Takano, Koichi Terao