Abstract: The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet.

Abstract: A focused ion beam apparatus enables an ion beam to be focused highly accurately on a sample at the beam spot position of the case of the absence of magnetic field without causing isotope separation of the ion beam on the sample, even when there is a magnetic field on the ion beam optical axis or the magnetic field fluctuates. The focused ion beam apparatus comprises a corrective magnetic field generating unit 10 disposed on the optical axis of the ion beam 3 for correcting the deflection of the ion beam 3 due to an external magnetic field. The corrective magnetic field generating unit 10 includes pole-piece pairs 26A and 26B, each of which having two pole pieces 26a and 26b or 26c and 26d that are adjacent to each other with a gap d. The pole-piece pairs 26A and 26B are disposed opposite to each other with a gap g (>d) across the optical axis of the ion beam 3.

Abstract: It is possible to carry out a highly accurate thin film machining by irradiation of an ion beam to a sample and a high-resolution STEM observation of the sample by irradiating an electron beam with a high throughput almost without moving the sample. The FIB irradiation system has an irradiation axis almost orthogonally intersecting an irradiation axis of the STEM observation electron beam irradiation system. The sample is arranged at the intersection point of the irradiation axes. The FIB machining plane of the sample is extracted from the thin film plane of the STEM observation sample. The transmitting/scattered beam detector are arranged at backward of the sample on the electron beam irradiation axis viewed from the electron beam irradiation direction.

Abstract: A focused ion beam apparatus and a focused ion beam irradiation method are disclosed. Even in the case where a magnetic field exists on the optical axis of an ion beam and the particular magnetic field undergoes a change, the ion beam is focused without separating the isotopes on the sample at the same ion beam spot position as if the magnetic field is not existent. A canceling magnetic field is generated on the optical axis of the ion beam from a canceling magnetic field generator thereby to offset the deflection of the ion beam due to the external magnetic field.

Abstract: An ICP (Inductively Coupled Plasma) system is used as a plasma generating means. A CVD process gas is introduced within a vacuum vessel from a gas inlet nozzle, and is then converted into plasma by a high frequency electric field induced within the vacuum vessel by an electromagnetic wave from an antenna. A sample can be located at a position not to be exposed to plasma, and a decomposed product material produced from the CVD process gas by the plasma is deposited on the surface of the sample mounted on a sample stage, thus forming a film. A dielectric viewing port, the antenna and the sample are disposed along the same axial direction such that the directions of the planes thereof correspond to each other, so that the film formation on the surface of the sample within the vacuum vessel can be observed through the transparent dielectric viewing port.

Abstract: A needle-shaped terminal, i.e., a probe tip, is brought into extremely close proximity with an object being measured. This probe tip is formed from an optically active material and in itself is electrically non-conductive, so that it has no electrical influence whatsoever on the object being measured. When optical pulses are beamed onto this probe tip, the probe tip becomes an electric conductor and a current flows between it and the object being measured, so that the electric potential of the object can be measured. This facilitates previously impossible measurements of high-speed electric waveforms. It also facilitates high spatial resolution monitoring and control of probe tip position and characterization of measurement sites, and enables highly reliable measurements to be made inexpensively.

Abstract: A control system for a torque converter includes a lock-up clutch provided in the torque converter for connecting input and output members of the torque converter directly, and a shift valve having first and second spools disposed in series in a sleeve for shifting an introduction of an engaging and releasing pressure acting on the lock-up clutch in accordance with positions of the first and second spools. The first spool is subjected to a first hydraulic pressure at one end thereof. The second spool is subjected to a second hydraulic pressure at one end thereof opposite to the one end of the first spool. The first and second spools are subjected to a third hydraulic pressure therebetween. The control system further has a first control device for controlling the first hydraulic pressure, and an adjusting valve for controlling the releasing pressure of the lock-up clutch.

Abstract: Several embodiments of engine intake systems that improve the charging efficiency by providing a closed branch passage which forms a volume in the intake tract between the throttle valve and the point of discharge into an engine chamber. The illustrated embodiments of the application of this concept is to both four and two cycle engines. In addition, a plenum chamber is illustrated for permitting the effective volume of the branch passage to be increased without unduly increasing its length. The branch passage outlet in certain embodiments is oriented so that its discharge during the intake cycle increases turbulence to improve combustion efficiency.

Abstract: A control system for an automatic transmission has a shift gear mechanism with a plurality of frictional elements, including a low reverse brake which is selectively actuated for switching a power transmitting path to establish a desired shift stage. A hydraulic control circuit controls supply of a hydraulic fluid to and relief of the fluid from an actuator for the frictional element. An accumulator is provided in a hydraulic passage communicated with the low reverse brake for obviating a shock as the low reverse brake is engaged. Back pressure of the accumulator is controlled when a first shift gear stage is established through the engagement of the low reverse brake. A torque shock can be suppressed when the first stage is established in an L-range.

Abstract: An automatic transmission line pressure control system controls line pressure in an automatic transmission equipped with a torque convertor for hydraulically coupling and uncoupling friction coupling elements of the automatic transmission. The automatic transmission line pressure control system regulates line pressure for selectively coupling and uncoupling the friction coupling elements so as to shift the automatic transmission into desired speed gears. The line pressure is forcibly dropped to a level lower than a level present before an occurrence of a manual shift-down operation when a shift-down sensor detects the occurrence of a manual shift-down. The line pressure is then raised as a speed sensor detects an increase in rotational speed transmitted the automatic transmission, thereby shifting the automatic transmission into desired speed gears.

Abstract: A shift control system for an automatic transmission including a shift gear mechanism for providing a plurality of shift stages of different speed ratios, a plurality of frictional elements to be selectively actuated for switching a power transmitting path to establish a desired shift stage, range selecting device for selecting a shift range at least between a forward and a reverse ranges through a manual operation of a driver, control device for providing the shift gear mechanism with a specific shift stage in which an input member and output member of the shift gear mechanism are rotated together with each other in the case where the reverse range is selected during a forward movement and thereafter a forward range is selected again, the specific shift stage being provided for a predetermined time period after the forward range is selected again. A double lock condition of the shift gear mechanism can be avoided.

Abstract: Two embodiments of induction systems for internal combustion engines that improve charging efficiency, particularly at low speeds and throttle openings. In each embodiment a plenum chamber is provided that communicates with the induction system between the throttle valve and the chamber which is served. In each embodiment a control valve controls the communication of the plenum chamber with the induction passage for substantially restricting the communication when the throttle valve of the engine is in its wide open position.