Abstract: A display device with high resolution is provided. Manufacturing cost of a display device using a micro LED as a display element is reduced. The display device includes a substrate, a plurality of transistors, and a plurality of light-emitting diodes. The plurality of light-emitting diodes are provided in a matrix over the substrate. Each of the plurality of transistors are electrically connected to at least one of the plurality of light-emitting diodes. The plurality of light-emitting diodes are positioned closer to the substrate than the plurality of transistors are. The plurality of light-emitting diodes emit light to the opposite side of the substrate.

Abstract: A novel functional panel that is highly convenient, useful, or reliable is provided. The functional panel includes a base material and a pair of pixels, and the base material covers the pair of pixels and has a light-transmitting property. The pair of pixels includes one pixel and another pixel, and the one pixel includes a light-emitting device and a first microlens. The light-emitting device emits light toward the base material, and the first microlens is interposed between the base material and the light emission and converges light. The first microlens includes a first surface and a second surface; the second surface is closer to the light-emitting device than the first surface is; and the second surface has a smaller radius of curvature than the first surface. The other pixel includes a photoelectric conversion device and a second microlens. The second microlens is interposed between the base material and the photoelectric conversion and converges external light incident from the base material side.

Abstract: A high-resolution display apparatus having a function of sensing light is provided. A high-definition display apparatus having a function of sensing light is provided. The display apparatus includes a first light-emitting device, a second light-emitting device, a third light-emitting device, a first light-receiving device, and a second light-receiving device in a first pixel. The first light-emitting device has a function of emitting red light. The second light-emitting device has a function of emitting green light. The third light-emitting device has a function of emitting blue light. The first light-receiving device has a function of sensing light emitted from at least one of the three light-emitting devices. The second light-receiving device has a function of sensing infrared light.

Abstract: An inspection apparatus includes a light source that generates and emits light to a substrate to be inspected, a lens that captures the light emitted to and reflected by the substrate, a detection unit that detects the light captured by the lens, and a determination unit that calculates a reflectance of light of the substrate based on an intensity of the light generated by the light source and an intensity of the light detected by the detection unit, and performs an abnormality determination of the substrate based on the calculated reflectance.

Abstract: A wire (12) is formed on an insulating film (10) on a semiconductor substrate (1). The wire (12) is covered by silicon nitride film (14), inorganic SOG film (20) and TEOS film (21). A thin film resistance element (30) of chromium silicon (CrSi) is formed on the upper surface of the TEOS film (21). The acute angle (taper angle) at which a line connecting the local maximum and minimum points of a step on the upper surface of the TEOS film (21) beneath the area where the thin film resistance element (30) is formed intersects to the surface of the substrate (1) is set to 10° or less.

Abstract: A product design CAD data reconstruction unit 50 reconstructs product design CAD data used for product evaluation regarding an initial design so as to fulfill restrictive conditions obtained from the product evaluation based on a product structure for the initial design. The reconstructed product design CAD data is stored in a product design CAD data database 90. Upon reception of a corrected design obtained by correcting the initial design, the product design CAD data for the initial design is read from the product design CAAD data database 90, and the product design CAD data is corrected along a design surface of the corrected design.

Abstract: A wire (12) is formed on an insulating film (10) on a semiconductor substrate (1). The wire (12) is covered by silicon nitride film (14), inorganic SOG film (20) and TEOS film (21). A thin film resistance element (30) of chromium silicon (CrSi) is formed on the upper surface of the TEOS film (21). The acute angle (taper angle) at which a line connecting the local maximum and minimum points of a step on the upper surface of the TEOS film (21) beneath the area where the thin film resistance element (30) is formed intersects to the surface of the substrate (1) is set to 10° or less.

Abstract: A factory layout includes a plurality of substantially triangle units provided in radial directions. The triangle units are combined so as to form a polygonal shape including a triangle shape as a whole. The empty regions with an air-conditioning facility are provided at a part of the central portion of the polygonal shape.

Abstract: In a clean room having a plurality of floors of different levels, an escalator is disposed between the plurality of floors for transporting an article between the floors. A self-propelled vehicle is used for transporting an article between floors. The self-propelled vehicle and the article are loaded on a step of the escalator. The vehicle and the article are held on the step from above the article by means of a holding section. The holding section assists loading of the vehicle onto the escalator through the article in the vicinity of an entrance gate of the escalator and assists unloading of the vehicle from the escalator in the vicinity of an exit gate.

Abstract: A process control method allowing an operator to readily confirm an order of operation processes includes steps of: reading magnetic data of a control card when the control card is inserted; transmitting completion data based on a lot number identified from read magnetic data to a host computer; receiving update data by the host computer; writing next process data in the received data as a visually recognizable image on the control card; and writing the next process data as a visually recognizable image based on process data identified by the read magnetic data when a predetermined time period passes without receiving update data.

Abstract: A product design CAD data reconstruction unit 50 reconstructs product design CAD data used for product evaluation regarding an initial design so as to fulfill restrictive conditions obtained from the product evaluation based on a product structure for the initial design. The reconstructed product design CAD data is stored in a product design CAD data database 90. Upon reception of a corrected design obtained by correcting the initial design, the product design CAD data for the initial design is read from the product design CAAD data database 90, and the product design CAD data is corrected along a design surface of the corrected design.

Abstract: A distribution management system in which a host server and portable terminals are arranged in such a manner as to be able to exchange information with each other. The host server has a section for receiving information relating to distribution from each of the portable terminals, and a section for transmitting, to each of the portable terminals, predetermined information such as information indicating a distribution state or history of a distribution article. This makes it possible to transmit, in real time, predetermined information such as information indicating a distribution state or history of a distribution article from the host server to a transmission source portable terminal.

Abstract: A factory layout includes a plurality of substantially triangle units provided in radial directions. The triangle units are combined so as to form a polygonal shape including a triangle shape as a whole. The empty regions with an air-conditioning facility are provided at a part of the central portion of the polygonal shape.

Abstract: A process control method allowing an operator to readily confirm an order of operation processes includes steps of: reading magnetic data of a control card when the control card is inserted; transmitting completion data based on a lot number identified from read magnetic data to a host computer; receiving update data by the host computer; writing next process data in the received data as a visually recognizable image on the control card; and writing the next process data as a visually recognizable image based on process data identified by the read magnetic data when a predetermined time period passes without receiving update data.

Abstract: In a clean room having a plurality of floors of different levels, an escalator is disposed between the plurality of floors for transporting an article between the floors. A self-propelled vehicle is used for transporting an article between floors. The self-propelled vehicle and the article are loaded on a step of the escalator. The vehicle and the article are held on the step from above the article by means of a holding section. The holding section assists loading of the vehicle onto the escalator through the article in the vicinity of an entrance gate of the escalator and assists unloading of the vehicle from the escalator in the vicinity of an exit gate.

Abstract: A product controlling method that enables the operator to easily recognize an order of operation includes the steps of: transmitting a number can uniquely identifies portable telephone 200 such as a telephone number and inquiry data to a host computer when an inquiry button of a portable telephone attached to the product is pressed; receiving response data from the host computer; displaying data representing the following process of the received response data as well as data representing the process condition of the following process; and transmitting data representing the process condition of the following process to a production facility in the following process.

Abstract: A prober can make an appropriate evaluation in a microcurrent region. A wafer (9) is disposed on a chuck (8) in a casing (1). In the upper surface of the chuck (8), an electrode (8a) is formed which is connected to a power supply (11) via a wire (10). In the casing (1), a cylindrical electromagnetic shielding box (7) is disposed with the upper surface open. The upper surface of the casing (1) and the side surfaces and bottom surface of the electromagnetic shielding box (7) form a closed space (30) for surrounding the chuck (8) and the wafer (9). Also, a loader (6) for driving the chuck (8) and the electromagnetic shielding box (7) is disposed in the casing (1). On the upper surface of the casing (1), a tester head (3) is disposed with a probe card (4) disposed therein. Since part of the upper surface of the casing (1) is open, probe needles (5) of the probe card (4) protrude into the casing (1) through the opening.

Abstract: This invention relates to a magnetoresistive element used for a magnetic sensor, etc. A ferromagnetic magnetoresistive element thin film is formed so as to be electrically connected to and so as to overlap the upper end portion of an aluminum wiring metal on a substrate. Through using a vacuum heat treatment with a temperature between 350.degree. and 450.degree. C., a Ni--Al-based alloy is formed at the overlapping portion. Therefore, even when a surface protection film of silicon nitride is subsequently formed by plasma CVD on the substrate, the alloy prevents the nitriding of the upper end portion of the aluminum wiring metal. Accordingly, the surface can be protected from moisture by the silicon nitride film without increasing the contact resistance between the magnetoresistive element thin film and the wiring metal. Instead of the Ni--Al-based alloy, other conductive metals such as TiW, TiN, Ti, Zr, or the like may be used.

Abstract: A semiconductor device is provided which includes a conductive layer, an insulating film formed on the surface of the conductive layer, and a conductive metal interconnection layer formed on the insulating film and electrically connected to the conductive layer through a contact hole formed in a predetermine position of the insulating film. The conductive metal interconnection and the surface of the conductive layer are directly joined together and a silicon layer including a single crystal or polycrystalline silicon having a grain size of at least about 10 .mu.m is interposed between the conductive metal interconnection layer and the insulating film. The conductive metal interconnection layer becomes a single crystal or a polycrystal having a grain size of about 10 .mu.m or above under the influence of the crystalline properties of the underlying crystal of the silicon layer.

Abstract: A semiconductor device capable of effectively preventing a dielectric breakdown of a gate oxide film without adversely affecting the characteristics of a transistor and a process of manufacturing the same are disclosed. The semiconductor device comprises a SOI film 2 whose upper angular parts are rounded off by sputter etching and a gate oxide film 3 formed on SOI film 2 with an almost uniform thickness. Therefore, electric field concentration in the upper angular parts of SOI film 2 is reduced. Furthermore, the control characteristics of the transistor are enhanced by the uniform gate oxide film 3. As a result, a dielectric breakdown of the gate oxide film is effectively prevented without adversely affecting the characteristics of the transistor. Sputter etching enabling processing at a low temperature is used, so that the upper angular parts of SOI film 2 are rounded off without adversely affecting a semiconductor element formed in the lower layer.