Abstract: A substrate processing apparatus is provided with five inspection devices that perform inspections of different kinds to a substrate. Among the five kinds of inspections, the film quality is measured after resist coating, and before post-coating heat-treatment. As the film quality, the amount of solvent remaining in a resist film is measured. The film thickness is measured after heat-treatment following resist coating and before exposure. Meanwhile, the line width and the superposition precision are measured and macroscopic defect inspection is performed after post-development heat-treatment and before the substrate is returned to an indexer.

Abstract: A magnetic head comprises: an induction type head for recording including a lower magnetic core, a writing gap film formed on the lower magnetic core, an upper magnetic core having a track portion and a portion spreading from the track portion, a plurality of insulating films laminated between the lower magnetic core and the upper magnetic core, and a coil formed between the plurality of insulating films. One of the plurality insulating films is an insulating film determining a zero throat level position. The track portion of the upper magnetic core is an air bearing surface. A magnetoresistance effect type head for reproducing includes a lower shielding film and a magnetoresistance effect sensor film is formed between the lower shielding film and the lower magnetic core.

Abstract: A magnetic head comprises: an induction type head for recording including a lower magnetic core, a writing gap film formed on the lower magnetic core, an upper magnetic core having a track portion and a portion spreading from the track portion, a plurality of insulating films laminated between the lower magnetic core and the upper magnetic core, and a coil formed between the plurality of insulating films. One of the plurality insulating films is an insulating film determining a zero throat level position. The track portion of the upper magnetic core is an air bearing surface. A magnetoresistance effect typehead for reproducing includes a lower shielding film and a magnetoresistance effect sensor film is formed between the lower shielding film and the lower magnetic core.