Patents by Inventor Koji Nakagawa

Koji Nakagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11177144
    Abstract: Embodiments of the present disclosure provide a thermal process chamber that includes a substrate support, a first plurality of heating elements disposed over or below the substrate support, and a spot heating module disposed over the substrate support. The spot heating module is utilized to provide local heating of regions on a substrate disposed on the substrate support during processing. Localized heating of the substrate alters temperature profile. The shape of the beam spot produced by the spot heating module can be modified without making changes to the optics of the spot heating module.
    Type: Grant
    Filed: May 9, 2019
    Date of Patent: November 16, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Shu-Kwan Lau, Zhiyuan Ye, Zuoming Zhu, Koji Nakanishi, Toshiyuki Nakagawa, Nyi O. Myo, Schubert S. Chu
  • Publication number: 20210316250
    Abstract: A thermo-sensitive draw solute including a polyoxyalkylene adduct represented by a general formula (1): R1O(AO)nR2 (1), where R1 denotes a residue after withdrawal of a hydroxy group from a monovalent alcohol having a carbon number ranging from 6 to 13, R2 denotes a hydrogen atom or denotes an alkyl group or an alkenyl group having a carbon number ranging from 1 to 13, AO denotes an oxyalkylene group having a carbon number ranging from 2 to 4, n denotes an average added mole number of an alkylene oxide ranging from 1 to 235, and where n is two or more, the two or more AOs may be the same or different from each other.
    Type: Application
    Filed: August 5, 2019
    Publication date: October 14, 2021
    Inventors: Aya OSATO, Takeshi TSUJi, Koji FUCHIGAMI, Keiji TOMURA, Shigeki FUJIWARA, Makcto KUNUGI, Yuya SATO, Eri WATANABE, Masami NAKAGAWA, Sohei HAMAGUCHI, Koji KUBO
  • Publication number: 20210296080
    Abstract: Provided is a focused ion beam processing apparatus including: an ion source; a sample stage a condenser lens; an aperture having a slit in a straight line shape; a projection lens and the sample stage, wherein, in a transfer mode, by Köhler illumination, with an applied voltage of the condenser lens when a focused ion beam is focused on a main surface of the projection lens scaled to be 100, the applied voltage is set to be less than 100 and greater than or equal to 80; a position of the aperture is set such that the focused ion beam is masked by the aperture with the one side of the aperture at a distance greater than 0 ?m and equal to or less than 500 ?m from a center of the focused ion beam; and the shape of the slit is transferred onto the sample.
    Type: Application
    Filed: March 19, 2021
    Publication date: September 23, 2021
    Inventors: Hiroshi OBA, Yasuhiko SUGIYAMA, Yoshitomo NAKAGAWA, Koji NAGAHARA
  • Publication number: 20210285105
    Abstract: Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a thermal process chamber. The thermal process chamber includes a substrate support, a first plurality of heating elements disposed over or below the substrate support, and a spot heating module disposed over the substrate support. The spot heating module is utilized to provide local heating of cold regions on a substrate disposed on the substrate support during processing. Localized heating of the substrate improves temperature profile, which in turn improves deposition uniformity.
    Type: Application
    Filed: May 26, 2021
    Publication date: September 16, 2021
    Inventors: Shu-Kwan LAU, Koji NAKANISHI, Toshiyuki NAKAGAWA, Zuoming ZHU, Zhiyuan YE, Joseph M. RANISH, Nyi O. MYO, Errol Antonio C. SANCHEZ, Schubert S. CHU
  • Patent number: 10701834
    Abstract: An information processing apparatus includes a plurality of electronic apparatus stacked over a plurality of hierarchies in the information processing apparatus, a heat exchanger that cools refrigerant liquid for cooling the plurality of electronic apparatus, a first distributor that distributes the refrigerant liquid from the heat exchanger to the plurality of hierarchies, a plurality of second distributor that stores the refrigerant liquid temporarily, and a plurality of pipes that branched from the distribution pipes to the plurality of the electronic apparatus, wherein the number of the second distributor increases toward a hierarchy on downstream side, the pipes of the last hierarchy are coupled to the electronic apparatus.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: June 30, 2020
    Assignee: FUJITSU LIMITED
    Inventors: Tsuyoshi So, Osamu Aizawa, Nobumitsu Aoki, Koji Nakagawa, Keita Hirai
  • Publication number: 20200189237
    Abstract: The present invention relates to a laminated glass including a first glass plate, a second glass plate and an intermediate layer provided between the first glass plate and the second glass plate, in which the first glass plate has a first face and a second face opposing the first face, the second glass plate has a third face and a fourth face opposing the third face, the intermediate layer is provided between the second face and the third face, the second glass plate is a chemically-strengthened glass, and in the second glass plate, when a compressive stress on the third face is denoted as CS(3), a tensile stress generated in an interior of the second glass plate is denoted as CT, a thickness of the second glass plate is denoted as t, a depth of the compressive stress on a side of the third face is denoted as DOL(3) and a depth of a compressive stress on a side of the fourth face is denoted as DOL(4), CS(3)/[CT2×{t?(DOL(3)+DOL(4))}] is greater than 1.1 MPa?1×mm.
    Type: Application
    Filed: February 20, 2020
    Publication date: June 18, 2020
    Applicant: AGC Inc.
    Inventors: Keiji NOTSU, Jiro NISHIHAMA, Shunsuke SADAKANE, Makoto NARITA, Koji NAKAGAWA, Yusuke SAKAI, Maya HATANO
  • Patent number: 10546766
    Abstract: Surface image data of a non-defective sample substrate is acquired, and surface image data of a substrate to be inspected is acquired. Differences between gradation values are calculated for pixels of the surface image data of the substrate to be inspected and corresponding pixels of the surface image data of the sample substrate. A constant value is added to the difference between gradation values of each pixel. In the case where the value acquired by addition is in a predetermined allowable range, it is determined that there is no defect for the substrate to be inspected. In the case where the value acquired by addition is outside of the allowable range, it is determined that the substrate to be inspected is defective. A defect in appearance on the substrate to be inspected is detected based on a pixel of which the value is outside of the allowable range.
    Type: Grant
    Filed: January 19, 2018
    Date of Patent: January 28, 2020
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomohiro Matsuo, Koji Nakagawa
  • Patent number: 10502937
    Abstract: A variable magnification optical system includes: in order from an object side, a first lens unit having a positive refractive power; a second lens unit having a negative refractive power; a third lens unit having a positive refractive power; and an image-side lens unit. The image-side lens unit includes a lens belonging to a first region and a lens belonging to a second region. At a time of changing magnification, the second lens unit and the third lens unit move.
    Type: Grant
    Filed: April 5, 2017
    Date of Patent: December 10, 2019
    Assignee: OLYMPUS CORPORATION
    Inventors: Kazuteru Kawamura, Koji Nakagawa, Masahiro Imamura
  • Patent number: 10342164
    Abstract: A rack mount-type information processing apparatus includes: a plurality of slots, into each of which an electronic device is inserted, a liquid-cooled element provided in a cooling target included in the electronic device, a liquid to cool the cooling target being circulated in the liquid-cooled element; a manifold pipe extending in a direction where the slots are arranged; and a plurality of connection pipes configured to interconnect the liquid-cooled element and the manifold pipe, and coupled in parallel to the manifold pipe at a portion of the manifold pipe which corresponds to at least one slot among the plurality of slots.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: July 2, 2019
    Assignee: FUJITSU LIMITED
    Inventors: Tsuyoshi So, Osamu Aizawa, Keita Hirai, Koji Nakagawa, Yoshinori Uzuka, Nobumitsu Aoki, Naofumi Kosugi
  • Patent number: 10254509
    Abstract: An image pickup lens includes in order from an object side, a front lens unit having a positive refractive power, one focusing lens unit having a positive refractive power, and a rear lens unit having a negative refractive power, wherein at the time of focusing, the focusing lens moves on an optical axis, and a single lens having a positive refractive power is disposed nearest to an object in the rear lens unit.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: April 9, 2019
    Assignee: OLYMPUS CORPORATION
    Inventors: Akinori Nishio, Koji Nakagawa
  • Publication number: 20190104646
    Abstract: An information processing apparatus includes a plurality of electronic apparatus stacked over a plurality of hierarchies in the information processing apparatus, a heat exchanger that cools refrigerant liquid for cooling the plurality of electronic apparatus, a first distributor that distributes the refrigerant liquid from the heat exchanger to the plurality of hierarchies, a plurality of second distributor that stores the refrigerant liquid temporarily, and a plurality of pipes that branched from the distribution pipes to the plurality of the electronic apparatus, wherein the number of the second distributor increases toward a hierarchy on downstream side, the pipes of the last hierarchy are coupled to the electronic apparatus.
    Type: Application
    Filed: September 24, 2018
    Publication date: April 4, 2019
    Applicant: FUJITSU LIMITED
    Inventors: Tsuyoshi So, Osamu Aizawa, Nobumitsu Aoki, Koji NAKAGAWA, Keita Hirai
  • Patent number: 10247928
    Abstract: A zoom lens includes, in order from the object side, a first lens unit having negative refractive power, a second lens unit having positive refractive power, a third lens unit having negative refractive power, and a fourth lens unit having positive refractive power. At a time of zooming from a wide-angle end to a telephoto end, the distance between the first lens unit and the second lens unit is reduced, the distance between the third lens unit and the fourth lens unit is increased, and the fourth lens unit is fixed.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: April 2, 2019
    Assignee: OLYMPUS CORPORATION
    Inventors: Akinori Nishio, Koji Nakagawa
  • Publication number: 20190002342
    Abstract: The present invention relates to a chemically strengthened glass having a first principal surface and a second principal surface facing the first principal surface, at least a portion of the first principal surface being chemically strengthened, wherein the depth of a compressive stress layer in at least a portion of the first principal surface continuously changes. This chemically strengthened glass can be suitably used in an application in which chemical strengthening characteristics that differ among different regions in the same plane are desired in a chemically strengthened glass.
    Type: Application
    Filed: September 6, 2018
    Publication date: January 3, 2019
    Applicant: AGC Inc.
    Inventors: Koji Nakagawa, Shinya Ota, Toshifumi Nihei, Maya Hatano, Hiroki Ishibashi, Shuichi Yamashita, Atsushi Nakano
  • Publication number: 20180263141
    Abstract: An information processing apparatus includes a power supply, a fan that causes air to flow into the power supply, and a power distributor that is disposed in front of or in back of the power supply in a direction of flow of the air due to the fan and that is electrically coupled to the power supply, wherein a vent through which the air passes is formed in a surface of the power distributor that faces the power supply.
    Type: Application
    Filed: March 1, 2018
    Publication date: September 13, 2018
    Applicant: FUJITSU LIMITED
    Inventors: Yoshimi Maekawa, Koji NAKAGAWA, Yukihiro Hirano, Keita Hirai
  • Patent number: 10043694
    Abstract: Surface image data of a non-defective sample substrate is acquired, and surface image data of a substrate to be inspected is acquired. Differences between gradation values are calculated for pixels of the surface image data of the substrate to be inspected and corresponding pixels of the surface image data of the sample substrate. A constant value is added to the difference between gradation values of each pixel. In the case where the value acquired by addition is in a predetermined allowable range, it is determined that there is no defect for the substrate to be inspected. In the case where the value acquired by addition is outside of the allowable range, it is determined that the substrate to be inspected is defective. A defect in appearance on the substrate to be inspected is detected based on a pixel of which the value is outside of the allowable range.
    Type: Grant
    Filed: April 22, 2016
    Date of Patent: August 7, 2018
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomohiro Matsuo, Koji Nakagawa
  • Publication number: 20180177079
    Abstract: An information processing device includes: a first distributing layer distributer configured to distribute a coolant for cooling electronic devices; and a second distributing layer distributer coupled to the first distributing layer distributer and configured to distribute the coolant, wherein the first distributing layer distributer includes a first distributing pipe and first distributing connecting pipes branched from the first distributing pipe, the first distributing pipe is disposed so that an axis of the first distributing pipe is parallel with the height direction, and the first distributing connecting pipes are arranged in the height direction, wherein the second distributing layer distributer includes second distributing pipes which are coupled to the respective first distributing connecting pipes, each of the second distributing pipes is disposed so that an axis of the second distributing pipe is parallel with the height direction, and the second distributing pipes are arranged in the height direct
    Type: Application
    Filed: December 6, 2017
    Publication date: June 21, 2018
    Applicant: FUJITSU LIMITED
    Inventors: Koji Nakagawa, Nobumitsu Aoki, Osamu Aizawa, Keita Hirai, Tsuyoshi So
  • Publication number: 20180144961
    Abstract: Surface image data of a non-defective sample substrate is acquired, and surface image data of a substrate to be inspected is acquired. Differences between gradation values are calculated for pixels of the surface image data of the substrate to be inspected and corresponding pixels of the surface image data of the sample substrate. A constant value is added to the difference between gradation values of each pixel. In the case where the value acquired by addition is in a predetermined allowable range, it is determined that there is no defect for the substrate to be inspected. In the case where the value acquired by addition is outside of the allowable range, it is determined that the substrate to be inspected is defective. A defect in appearance on the substrate to be inspected is detected based on a pixel of which the value is outside of the allowable range.
    Type: Application
    Filed: January 19, 2018
    Publication date: May 24, 2018
    Inventors: Tomohiro MATSUO, Koji NAKAGAWA
  • Publication number: 20180132387
    Abstract: A rack mount-type information processing apparatus includes: a plurality of slots, into each of which an electronic device is inserted, a liquid-cooled element provided in a cooling target included in the electronic device, a liquid to cool the cooling target being circulated in the liquid-cooled element; a manifold pipe extending in a direction where the slots are arranged; and a plurality of connection pipes configured to interconnect the liquid-cooled element and the manifold pipe, and coupled in parallel to the manifold pipe at a portion of the manifold pipe which corresponds to at least one slot among the plurality of slots.
    Type: Application
    Filed: October 5, 2017
    Publication date: May 10, 2018
    Applicant: FUJITSU LIMITED
    Inventors: Tsuyoshi So, Osamu Aizawa, Keita Hirai, Koji NAKAGAWA, Yoshinori Uzuka, Nobumitsu Aoki, NAOFUMI KOSUGI
  • Publication number: 20180100995
    Abstract: A zoom lens includes, in order from the object side, a first lens unit having negative refractive power, a second lens unit having positive refractive power, a third lens unit having negative refractive power, and a fourth lens unit having positive refractive power. At a time of zooming from a wide-angle end to a telephoto end, the distance between the first lens unit and the second lens unit is reduced, the distance between the third lens unit and the fourth lens unit is increased, the fourth lens unit is fixed, and Conditional Expressions (1) and (2) below are satisfied: 2.5?f2/fw4.5??(1), and 4.3??2GWT/fw?8.0??(2).
    Type: Application
    Filed: December 13, 2017
    Publication date: April 12, 2018
    Applicant: OLYMPUS CORPORATION
    Inventors: Akinori NISHIO, Koji NAKAGAWA
  • Publication number: 20180079684
    Abstract: The present invention relates to a chemically strengthened glass having a first surface and a second surface facing the first surface, and having a compressive stress layer provided on the first surface and the second surface, in which a depth of compressive stress DOL1 (?m) of the first surface is larger than a depth of compressive stress DOL2 (?m) of the second surface, and a stress distribution in a sheet thickness direction of the chemically strengthened glass satisfies the following relational expression (1) and the following relational expression (3): CT1/CT2?0.8??(1) and CT1×L1/2?30 (MPa·mm1/2)??(3).
    Type: Application
    Filed: November 30, 2017
    Publication date: March 22, 2018
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Maya HATANO, Koji Nakagawa, Yusuke Kobayashi, Shusaku Akiba