Patents by Inventor Koji Shigematsu

Koji Shigematsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination optical system, exposure apparatus and device manufacturing method
    Patent number: 10520825
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: December 31, 2019
    Assignee: NIKON CORPORATION
    Inventor: Koji Shigematsu
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 10241417
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: March 26, 2019
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20190086811
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Application
    Filed: November 20, 2018
    Publication date: March 21, 2019
    Applicant: NIKON CORPORATION
    Inventor: Koji SHIGEMATSU
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 10234770
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: March 19, 2019
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Illumination optical system, exposure apparatus and device manufacturing method
    Patent number: 10168620
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Grant
    Filed: December 23, 2016
    Date of Patent: January 1, 2019
    Assignee: NIKON CORPORATION
    Inventor: Koji Shigematsu
  • POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD
    Publication number: 20180341185
    Abstract: An illumination optical apparatus illuminates an object with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light; and a polarization modulating member which modulates a polarization of the illumination light, the polarization modulating member being made of an optical material with optical activity and being arranged in the optical path on an incidence side of the optical integrator such that a direction of an optic axis of the optical material is coincident with a direction of an optical axis of the illumination optical apparatus. The polarization modulating member has a thickness profile varying with respect to azimuthal positions about the optical axis.
    Type: Application
    Filed: August 6, 2018
    Publication date: November 29, 2018
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Koji SHIGEMATSU, Hiroyuki HIROTA, Tomoyuki MATSUYAMA
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 10120291
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: November 6, 2018
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 10031425
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: July 24, 2018
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 10007194
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: October 29, 2008
    Date of Patent: June 26, 2018
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 9989865
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 5, 2018
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD
    Publication number: 20170227854
    Abstract: A polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Application
    Filed: April 26, 2017
    Publication date: August 10, 2017
    Applicant: NIKON CORPORATION
    Inventors: Osamu TANITSU, Koji SHIGEMATSU, Hiroyuki HIROTA, Tomoyuki MATSUYAMA
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 9684246
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 9684247
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: June 20, 2017
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20170108782
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Application
    Filed: December 23, 2016
    Publication date: April 20, 2017
    Applicant: NIKON CORPORATION
    Inventor: Koji SHIGEMATSU
  • Illumination optical system, exposure apparatus and device manufacturing method
    Patent number: 9563130
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Grant
    Filed: December 8, 2014
    Date of Patent: February 7, 2017
    Assignee: NIKON CORPORATION
    Inventor: Koji Shigematsu
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 9429848
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: October 29, 2008
    Date of Patent: August 30, 2016
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 9423694
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: August 23, 2016
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • Lighting optical device, regulation method for lighting optical device, exposure system, and exposure method
    Patent number: 9235133
    Abstract: An illumination optical apparatus is able to adjust each of pupil luminance distributions at respective points on a surface to be illuminated to being almost uniform, while maintaining or adjusting an illuminance distribution on the surface to be illuminated to being almost uniform. The illumination optical apparatus illuminates the surface to be illuminated (M, W), with a light beam from a light source (1). The apparatus is provided with a pupil distribution forming device (1-4) for forming a pupil luminance distribution with a predetermined luminance distribution on an illumination pupil plane; and an adjuster (8, 9) for independently adjusting each of pupil luminance distributions about respective points on the surface to be illuminated. The adjuster has a plurality of adjustment surfaces each of which is disposed in an optical path between the pupil distribution forming device and the surface to be illuminated and has a predetermined transmittance distribution or reflectance distribution.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: January 12, 2016
    Assignee: NIKON CORPORATION
    Inventors: Hirohisa Tanaka, Koji Shigematsu
  • Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
    Patent number: 9140990
    Abstract: There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: September 22, 2015
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama
  • ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20150092173
    Abstract: The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination targe
    Type: Application
    Filed: December 8, 2014
    Publication date: April 2, 2015
    Inventor: Koji SHIGEMATSU