Abstract: A plasma processing apparatus includes a chamber; a first electrode facing an inside of the chamber; a radio-frequency power supply configured to supply a radio-frequency power to the first electrode; a feeding rod configured to feed the radio-frequency power to a center of a surface of the first electrode opposite to a surface facing the inside of the chamber; a conductive plate provided in parallel to the surface of the first electrode opposite to the surface facing the inside of the chamber, the plate being grounded; and a dielectric plate connecting the first electrode and the conductive plate, and having a shape that is rotationally symmetric with respect to a center of the first electrode.

Abstract: A slider includes a slider body part that includes an upper wing plate and a lower wing plate, a stop tab body, a tab elastic member that biases the stop tab body, a base part integrally formed with the upper wing plate, and an operation cover part rotatably attached to the base part. The operation cover part includes a pressing projecting part that projects from an inner surface of a top plate part, and the pressing projecting part has a configuration in which by rotating the operation cover part, a locked state and an unlocked state can be switched therebetween. Accordingly, since a stop mechanism by the rotation of the operation cover part can be provided in the slider with a relatively simple configuration, the manufacturing cost can be reduced and the productivity can be improved.

Abstract: A concealed-slide-fastener slider includes a body including: a pair of flanges extending inwardly in the left and right direction from upper end portions of a pair of the side plates; and a raised portion raised upward from an upper wing plate. The body cooperates with a lock member to form a pull attachment portion including a shaft hole that penetrates in the left-right direction. A lower surface of the shaft hole includes an upper surface of the raised portion and is positioned above upper surfaces of the pair of flanges. A pair of fabric accommodating space portions, which accommodate a pair of fabrics fixed to upper sides of the pair of tapes and is partitioned by the raised portion in the left-right direction, is formed between the pull in a rearward lying posture and the pair of flanges in an upper-lower direction.

Abstract: There is provided a radio frequency power filter circuit used in a plasma processing apparatus that includes an electrode and a feeding body connected to a center of a rear surface of the electrode and generates plasma by applying radio frequency power, the filter circuit including a series resonance circuit provided in a wiring line between a conductive member provided in the plasma processing apparatus and a power supply configured to supply DC power or power having a frequency of less than 400 kHz to the conductive member, and including a coil connected in series to the wiring line and a capacitor connected between the wiring line and a ground. A central axis of the coil and a central axis of the feeding body coincide with each other.

Abstract: An article for use in a plasma processing apparatus includes a gas supply pipe, and a component disposed in the gas supply pipe. The component is configured to cause radicals of gas passing through the gas supply pipe to be deactivated in the component.

Abstract: A slider includes a slider body part that includes an upper wing plate and a lower wing plate, a stop tab body, a tab elastic member that biases the stop tab body, a base part integrally formed with the upper wing plate, and an operation cover part rotatably attached to the base part. The operation cover part includes a pressing projecting part that projects from an inner surface of a top plate part, and the pressing projecting part has a configuration in which by rotating the operation cover part, a locked state and an unlocked state can be switched therebetween. Accordingly, since a stop mechanism by the rotation of the operation cover part can be provided in the slider with a relatively simple configuration, the manufacturing cost can be reduced and the productivity can be improved.

Abstract: A concealed-slide-fastener slider includes a body including: a pair of flanges extending inwardly in the left and right direction from upper end portions of a pair of the side plates; and a raised portion raised upward from an upper wing plate. The body cooperates with a lock member to form a pull attachment portion including a shaft hole that penetrates in the left-right direction. A lower surface of the shaft hole includes an upper surface of the raised portion and is positioned above upper surfaces of the pair of flanges. A pair of fabric accommodating space portions, which accommodate a pair of fabrics fixed to upper sides of the pair of tapes and is partitioned by the raised portion in the left-right direction, is formed between the pull in a rearward lying posture and the pair of flanges in an upper-lower direction.

Abstract: A piping system includes: pipes, each of which is covered with a heat-insulating member and through which a cooling medium flows; and a heat transfer member arranged between two heat-insulating members of two of the pipes adjacent to each other. The heat transfer member includes: a contact portion configured to be in contact with the two heat-insulating members; and a heat-receiving portion including a heat-receiving surface configured to be in contact with outside air outside of the pipes, and configured to transfer heat, which is received from the outside air on the heat-receiving surface, to the contact portion.

Abstract: A plasma processing apparatus includes a chamber; a first electrode facing an inside of the chamber; a radio-frequency power supply configured to supply a radio-frequency power to the first electrode; a feeding rod configured to feed the radio-frequency power to a center of a surface of the first electrode opposite to a surface facing the inside of the chamber; a conductive plate provided in parallel to the surface of the first electrode opposite to the surface facing the inside of the chamber, the plate being grounded; and a dielectric plate connecting the first electrode and the conductive plate, and having a shape that is rotationally symmetric with respect to a center of the first electrode.

Abstract: A chamber is configured to process a substrate by using a plasma. A heater is disposed in a region within the chamber which is not exposed to the plasma and a radio frequency power supplied for plasma formation. A heater power supply is configured to supply a pulsed power to the heater.

Abstract: A processing method includes a first process of exposing a first sensor to a processing space within a chamber and blocking a second sensor from the processing space within the chamber; a second process of supplying a first processing gas containing a precursor gas into the chamber; a third process of controlling a state within the chamber based on a measurement value of the first sensor; a fourth process of blocking the first sensor from the processing space within the chamber and exposing the second sensor to the processing space within the chamber; a fifth process of supplying a second processing gas containing a reactant gas into the chamber; and a sixth process of controlling the state within the chamber based on a measurement value of the second sensor. The first process to the six process are repeatedly performed multiple times.

Abstract: An article for use in a plasma processing apparatus includes a gas supply pipe, and a component disposed in the gas supply pipe. The component is configured to cause radicals of gas passing through the gas supply pipe to be deactivated in the component.

Abstract: An elevator device that can continuously evacuate any evacuee left in a building by using an elevator. The elevator device includes a control device configured to maintain an evacuation operation mode corresponding to a rescue floor concerned when a car operation instructing device is operated on the rescue floor concerned before a predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned, and release the evacuation operation mode corresponding to the rescue floor concerned when the car operation instructing device is not operated on the rescue floor concerned before the predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned.

Abstract: There is provided a slide fastener slider. A slider body has an upper blade and a lower blade connected by a guide post at front end sides thereof, and a pull tab attached to a pull tab attachment portion formed on the upper blade. The pull tab attachment portion has a pair of right and left first members protruding from the upper surface of the upper blade, and a second member connecting the pair of the right and left first members. The first members have a base portion and a wall portion arranged to extend from the base portion toward at least one of front and rear sides thereof. The pull tab has a string-shaped member and the string-shaped member is attached to the pull tab attachment portion.

Abstract: A processing method includes a first process of exposing a first sensor to a processing space within a chamber and blocking a second sensor from the processing space within the chamber; a second process of supplying a first processing gas containing a precursor gas into the chamber; a third process of controlling a state within the chamber based on a measurement value of the first sensor; a fourth process of blocking the first sensor from the processing space within the chamber and exposing the second sensor to the processing space within the chamber; a fifth process of supplying a second processing gas containing a reactant gas into the chamber; and a sixth process of controlling the state within the chamber based on a measurement value of the second sensor. The first process to the six process are repeatedly performed multiple times.

Abstract: A lensmeter includes a light emission portion, a light reception portion, a storage unit, a display unit and a display control unit. The light emission portion emits light so as to radiate the light onto a lens-to-be-inspected. The light reception portion receives the light transmitted through the lens-to-be-inspected to measure an optical characteristic of the lens-to-be-inspected. The storage unit stores a measured value of the optical characteristic of the lens-to-be-inspected. The display unit displays the measured value of the optical characteristic of the lens-to-be-inspected stored in the storage unit. The display control unit causes the display unit to display a target pattern including at least two different colors, and changes the target pattern in accordance with the measured value stored in the storage unit.

Abstract: In a film-forming apparatus according to an aspect, a substrate placed on a substrate placing region passes through a first region and a second region in this order by rotation of a placing table. A precursor gas is supplied to the first region. Plasma of a reaction gas is generated in the second region by a plasma generation section. The plasma generation section includes an antenna that supplies microwaves as a plasma source. The antenna includes a dielectric window member and a waveguide. The window member is provided above the second region. The waveguide defines a waveguide path that extends in a radial direction. The waveguide is formed with a plurality of slot holes that allow the microwaves to pass therethrough from the waveguide path toward the window member plate. A bottom surface of the window member defines a groove that extends in the radial direction.

Abstract: An elevator device that can continuously evacuate any evacuee left in a building by using an elevator. The elevator device includes a control device configured to maintain an evacuation operation mode corresponding to a rescue floor concerned when a car operation instructing device is operated on the rescue floor concerned before a predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned, and release the evacuation operation mode corresponding to the rescue floor concerned when the car operation instructing device is not operated on the rescue floor concerned before the predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned.

Abstract: A plasma processing apparatus for alternately performing a first plasma processing step using first and second processing gases and a second plasma processing step using third and fourth processing gases. The apparatus includes: a processing container that has a dielectric window in a ceiling and removably accommodates a workpiece; an exhaust unit that evacuates the processing container; a processing gas supply unit that supplies the first, second, third, and fourth processing gases into the processing container; a first gas introduction unit including a top plate gas injection port, a dielectric window gas flow path, and a first external gas flow path; a second gas introduction unit including a sidewall gas injection port, a sidewall gas flow path, and a second external gas flow path; an electromagnetic wave supply unit that supplies electromagnetic waves into the plasma generating space; a bypass exhaust path; and an opening/closing valve.

Abstract: There is provided a slide fastener slider. A slider body has an upper blade and a lower blade connected by a guide post at front end sides thereof, and a pull tab attached to a pull tab attachment portion formed on the upper blade. The pull tab attachment portion has a pair of right and left first members protruding from the upper surface of the upper blade, and a second member connecting the pair of the right and left first members. The first members have a base portion and a wall portion arranged to extend from the base portion toward at least one of front and rear sides thereof. The pull tab has a string-shaped member and the string-shaped member is attached to the pull tab attachment portion.