Abstract: An ultrahigh-pressure sealing device improves sealing performance under ultrahigh pressures and improves durability. The ultrahigh-pressure sealing device is arranged to seal an annular space between an outer member and an inner member and separates between a high-pressure chamber and a low-pressure chamber. A bottom ring includes a first inner periphery, a first large-diameter outer periphery, a first small-diameter outer periphery, and a first middle outer periphery. A back-up ring includes a second inner periphery, a second engagement portion, and a second outer periphery. A packing ring includes a third low-pressure-chamber end, a third inner periphery, a third large-diameter outer periphery, a third the small-diameter outer periphery, and a third middle outer periphery. An elastic ring includes a fourth inner periphery, a fourth the engagement portion, and a fourth outer periphery.

Abstract: An ultrahigh-pressure sealing device improves sealing performance under ultrahigh pressures and improves durability. The ultrahigh-pressure sealing device is arranged to seal an annular space between an outer member and an inner member and separates between a high-pressure chamber and a low-pressure chamber. A bottom ring includes a first inner periphery, a first large-diameter outer periphery, a first small-diameter outer periphery, and a first middle outer periphery. A back-up ring includes a second inner periphery, a second engagement portion, and a second outer periphery. A packing ring includes a third low-pressure-chamber end, a third inner periphery, a third large-diameter outer periphery, a third the small-diameter outer periphery, and a third middle outer periphery. An elastic ring includes a fourth inner periphery, a fourth the engagement portion, and a fourth outer periphery.

Abstract: In a substrate processing apparatus 1 which performs a process on a substrate W, each of multiple processing modules 2 includes at least a first processing member 21 and a second processing member 22, and substrate transfer devices 15 and 17 transfer substrates W into the multiple processing modules 2. Further, a controller 3 configured to control the substrate processing apparatus 1 stores member operating possibility information on whether it is possible to use the first processing member 21 and the second processing member 22 provided in each of the multiple processing modules 2, and the controller 3 creates, based on the member operating possibility information and process recipe information on processes to be performed on the substrates W, a transfer schedule in which the substrate transfer devices 15 and 17 transfer the substrates W into the multiple processing modules 2 in parallel.

Abstract: In a substrate processing apparatus 1 which performs a process on a substrate W, each of multiple processing modules 2 includes at least a first processing member 21 and a second processing member 22, and substrate transfer devices 15 and 17 transfer substrates W into the multiple processing modules 2. Further, a controller 3 configured to control the substrate processing apparatus 1 stores member operating possibility information on whether it is possible to use the first processing member 21 and the second processing member 22 provided in each of the multiple processing modules 2, and the controller 3 creates, based on the member operating possibility information and process recipe information on processes to be performed on the substrates W, a transfer schedule in which the substrate transfer devices 15 and 17 transfer the substrates W into the multiple processing modules 2 in parallel.

Abstract: Disclosed is a substrate processing apparatus in which a target substrate is taken out from a slot of a cassette having a plurality of slots and processed. The substrate processing apparatus includes a substrate processing unit that processes the target substrate, a transfer unit that transfers the target substrate from the cassette to the substrate processing unit and transfers the target substrate processed in the substrate processing unit from the substrate processing unit to the cassette, and a confirming unit that determines whether or not the slot is empty. The substrate processing apparatus further includes a control unit that reads the slot designated to the target substrate and makes the confirming unit to determine whether or not the slot is empty, after the target substrate has been processed in the substrate processing unit but before the target substrate is disposed in the cassette.

Abstract: A substrate processing apparatus includes a loading/unloading unit including a mounting table on which a storage container accommodating a target substrate is mounted; a processing unit set including a plurality of processing units that perform a process on the target substrate; a plurality of transit units that transit the target substrate between the loading/unloading unit and the processing unit set; a selection unit that receives input for selecting a storage container for loading, a storage container for unloading, and a processing unit to be used for processing the target substrate; and a transfer recipe creating unit that automatically selects a transit unit to be used among the plurality of transit units based on the storage container for loading, the storage container for unloading, and the processing unit selected through the selection unit, automatically generates a transfer route of the target substrate, and creates a transfer recipe.

Abstract: Provided is a dispenser including an ice-making water tank for storing ice-making water and an auger-type ice-making machine for producing ice chips by freezing the ice-making water in the ice-making water tank. The auger-type ice-making machine includes a refrigeration casing into which the ice-making water is supplied, and the refrigeration casing and the drain pan are connected to each other through the intermediation of an ice-making water drain pipe. The ice-making water in the refrigeration casing is drained at predetermined time points, and the drain pan is washed with the ice-making water thus drained.

Abstract: Provided is a dispenser in which a wash water discharge opening provided to a drain pan is connected to an external tap water system via a wash water supply path. The wash water supply path is provided with a wash water supply valve for controlling whether or not to supply wash water to the drain pan. Based on delivery information output from a delivery control section for controlling delivery of ice chips, a wash control section in a controller judges whether or not a delivery count of the ice chips has reached a predetermined set count, and, when it is judged that the delivery count has reached the set count, opens the wash water supply valve to perform a wash action.

Abstract: Provided is a dispenser in which a wash water discharge opening provided to a drain pan is connected to an external tap water system via a wash water supply path. The wash water supply path is provided with a wash water supply valve for controlling whether or not to supply wash water to the drain pan. A wash control section in a controller performs timing separately from control of a generation/delivery control section for performing generation and delivery of ice chips, and also performs a wash action at predetermined time intervals by opening the wash water supply valve.

Abstract: Disclosed is a substrate processing apparatus in which a target substrate is taken out from a slot of a cassette having a plurality of slots and processed. The substrate processing apparatus includes a substrate processing unit that processes the target substrate, a transfer unit that transfers the target substrate from the cassette to the substrate processing unit and transfers the target substrate processed in the substrate processing unit from the substrate processing unit to the cassette, and a confirming unit that determines whether or not the slot is empty. The substrate processing apparatus further includes a control unit that reads the slot designated to the target substrate and makes the confirming unit to determine whether or not the slot is empty, after the target substrate has been processed in the substrate processing unit but before the target substrate is disposed in the cassette.

Abstract: A substrate processing apparatus includes a loading/unloading unit including a mounting table on which a storage container accommodating a target substrate is mounted; a processing unit set including a plurality of processing units that perform a process on the target substrate; a plurality of transit units that transit the target substrate between the loading/unloading unit and the processing unit set; a selection unit that receives input for selecting a storage container for loading, a storage container for unloading, and a processing unit to be used for processing the target substrate; and a transfer recipe creating unit that automatically selects a transit unit to be used among the plurality of transit units based on the storage container for loading, the storage container for unloading, and the processing unit selected through the selection unit, automatically generates a transfer route of the target substrate, and creates a transfer recipe.

Abstract: Provided is a dispenser in which a wash water discharge opening provided to a drain pan is connected to an external tap water system via a wash water supply path. The wash water supply path is provided with a wash water supply valve for controlling whether or not to supply wash water to the drain pan. Based on delivery information output from a delivery control section for controlling delivery of ice chips, a wash control section in a controller judges whether or not a delivery count of the ice chips has reached a predetermined set count, and, when it is judged that the delivery count has reached the set count, opens the wash water supply valve to perform a wash action.

Abstract: Provided is a dispenser including an ice-making water tank for storing ice-making water and an auger-type ice-making machine for producing ice chips by freezing the ice-making water in the ice-making water tank. The auger-type ice-making machine includes a refrigeration casing into which the ice-making water is supplied, and the refrigeration casing and the drain pan are connected to each other through the intermediation of an ice-making water drain pipe. The ice-making water in the refrigeration casing is drained at predetermined time points, and the drain pan is washed with the ice-making water thus drained.

Abstract: Provided is a dispenser in which a wash water discharge opening provided to a drain pan is connected to an external tap water system via a wash water supply path. The wash water supply path is provided with a wash water supply valve for controlling whether or not to supply wash water to the drain pan. A wash control section in a controller performs timing separately from control of a generation/delivery control section for performing generation and delivery of ice chips, and also performs a wash action at predetermined time intervals by opening the wash water supply valve.

Abstract: When, for example, an acceptance processing unit, among several acceptance processing units, performs acceptance processing of a reservation request, whether or not there is availability in resources of a video chat device assigned to the acceptance processing unit is checked, and if there is availability in the resource, the use of the resource is reserved.

Abstract: A cleaning processing system including a wafer transfer device, a wafer detecting sensor for detecting a wafer, a memory for storing the position and direction of an extra wafer present inside the cleaning processing system when the power supply is cut off, an alarm device for generating an alarm in the case where the information detected by the wafer detecting sensor when the power supply to the cleaning processing system is turned on differs from the wafer information taken out of the memory, an alarm canceling section for canceling the alarm, an apparatus control section for controlling the wafer transfer device to recover the extra wafer, and a recovery start-up section for emitting an instruction to start the wafer recovery to the apparatus control section.

Abstract: A metal die device for casting of a simpler device structure by which a cast product having an undercut may directly be produced is disclosed. A casting (cavity) S is provided between a fixed die 21 and a movable die 31 as a movable core 40 having an undercut forming projection 41 is interposed between the fixed and movable dies. A swing member 54, caused to swing by a cylinder 51, is provided overlying the movable die 31. On the swing member 54, there is provided a cylinder 57 for vertically sliding the core 40. In die opening, following casting, the core 40 is vertically slid and subsequently caused to swing towards an upper outer side to release the core 40 from the cast product. Degree of freedom in metal designing is achieved without excess restriction in the shape or position of the undercut.

Abstract: A metal die device for casting of a simpler device structure by which a cast product having an undercut may directly be produced is disclosed. A casting (cavity) S is provided between a fixed die 21 and a movable die 31 as a movable core 40 having an undercut forming projection 41 is interposed between the fixed and movable dies. A swing member 54, caused to swing by a cylinder 51, is provided overlying the movable die 31. On the swing member 54, there is provided a cylinder 57 for vertically sliding the core 40. In die opening, following casting, the core 40 is vertically slid and subsequently caused to swing towards an upper outer side to release the core 40 from the cast product. Degree of freedom in metal designing is achieved without excess restriction in the shape or position of the undercut.

Abstract: When, for example, an acceptance processing unit 151 among acceptance processing units 151 to 15N performs acceptance processing of a reservation request, whether or not there is availability in a resource of a video chat device 23 which is assigned to the acceptance processing unit 151 is checked, and if there is availability in the resource, the use of the resource is reserved.