Abstract: A cleaning processing system comprises a wafer transfer device, a wafer detecting sensor for detecting a wafer, a memory for storing the position and direction of an extra wafer present inside the cleaning processing system when the power supply is cut off, an alarm device for generating an alarm in the case where the information detected by the wafer detecting sensor when the power supply to the cleaning processing system is turned on differs from the wafer information taken out of the memory, an alarm canceling section for canceling the alarm, an apparatus control section for controlling the wafer transfer device to recover the extra wafer, and a recovery start-up section for emitting an instruction to start the wafer recovery to the apparatus control section.

Abstract: A system ROM stores a control program for measuring an internal operation state of a CPU unit, and a data RAM stores a measured internal operation state of the CPU unit. The internal operation measuring control program enables the internal operation state of the CPU unit to be measured in response to a monitor processing request from an external peripheral device, and a measurement result to be sent to the external peripheral device, to thereby allow the external peripheral device to monitor the internal operation state of the CPU unit.

Abstract: In a non-contact development with a two component type developer composed of toner particles and resin-coated tic carrier particles, the resin-coated magnetic carrier particles have a specific electric resistance of 10.sup.5 .OMEGA..multidot.cm to 10.sup.12 .OMEGA..multidot.cm, and a strength of magnetic field on a surface of a cylindrical developing sleeve at the closest position between cylindrical developing sleeve and a photoreceptor drum in a developing region is 1000 G(gauss) to 2500 G.

Abstract: A stabilizer or dispersing agent for use in a suspension polymerization of a vinyl compound is provided which comprises a modified and partially hydrolyzed polyvinyl alcohol having an average polymerization degree of from 200 to 3,000 and an average hydrolysis degree of from 60 to 90 mol % and including anion hydrophilic groups at the side chains thereof, wherein said anion hydrophilic groups are selected from the group consisting of dicarboxyl groups and/or esters thereof and/or salts thereof, sulfuric esters and/or salts thereof and phosphoric esters and/or salts thereof, and the content of said anion hydrophilic groups is in the range of from 0.02 to 10 mol % per unit mol of the polyvinyl alcohol. A process for preparing a polymer of a vinyl compound is also provided wherein said vinyl compound is polymerized in a suspension thereof suspended by the use of the stabilizer or dispersing agent.