Abstract: A speed-reducing apparatus of low mechanical noise is disclosed which includes a wobbling rotation plate. In the speed-reducing apparatus, a fixed plate and a wobbling rotation plate face each other at a rotation angle and a rotation phase difference and are gradually engaged together with an output shaft.

Abstract: An apparatus for hydrophobic treatment of a semiconductor wafer comprises a tank in which HMDS liquid is stored, a process chamber in which the wafer is treated, and a unit for supplying HMDS liquid from the tank into the process chamber in an amount needed at any desired time. The process chamber can be decompressed by an ejector which is connected to the process chamber through an exhaust pipe. A mount on which the wafer is mounted is arranged in the process chamber and it includes a heater embedded therein. A ring surrounds the mount and two liquid receiving recesses are formed on the top of the ring. Two HMDS liquid supply pipes extend just above their corresponding liquid receiving recesses. HMDS in liquid phase is supplied into the process chamber and vaporized in it. The density of HMDS gas in the process chamber is controlled by adjusting the amount of HMDS liquid supplied.

Abstract: A photopolymerizable composition composed principally of an acrylic linear copolymer, an ethylenically-unsaturated compound and a photoinitiator and adapted to fabricate printed circuit boards. The ethylenically-unsaturated compound contains a specific acrylic ester. The photopolymerizable composition can be developed with an aqueous mild alkaline solution.

Abstract: A mechanical press includes a slider which is reciprocated, through connecting rods, by an oscillating plate oscillating around a driving shaft to obtain a press load. The press further includes a swash plate rotatable with the driving shaft. The oscillating plate oscillates in accordance with the rotation of the swash plate. A plurality of lock pins are concentrically disposed in parallel with the driving shaft on a side of the oscillating plate opposite to the swash plate. Each of the lock pins has a spherical head housed in the oscillating plate so as to make the pins rotatable and axial movable. A slider guide supports the pins and the slider.

Abstract: An axial piston pump apparatus includes a rotary cylinder barrel with plural cylinder bores in each of which a slidable piston is arranged. Each piston is rotatably held at one end with a piston support synchronously rotatable with the cylinder barrel. The piston support rotates in a plane inclined to the cylinder barrel, while each piston reciprocally moves in the corresponding cylinder bore to perform suction/discharging of a fluid. Two of the pistons come into surface contact with the corresponding cylinder bores; and the end of these pistons are held respectively in the piston support for radial movement to serve as drive pins for transmitting torque between the cylinder barrel and the piston support. During operation of the pump apparatus, the one end of each drive piston radially moves in accordance with rotation of the piston support, thereby preventing the drive pistons from inclining to the corresponding cylinder bores and appropriately maintaining surface contact between them.

Abstract: A photopolymerizable composition composed principally of an acrylic linear copolymer, an ethylenically-unsaturated compound and a photoinitiator and adapted to fabricate printed circuit boards. The ethylenically-unsaturated compound contains a specific acrylic ester. The photopolymerizable composition can be developed with an aqueous mild alkaline solution.

Abstract: A universal joint comprising, first and second rotating members each having a rotating axis, and arranged end to end with a distance therebetween. A guide pin is providing having a spherical portion at one end thereof and rotatably and swingably held by the first member at the rotating axis. The other end of the guide pin is slidably inserted in the second member along the rotating axis, and a pair of driving pins are arranged symmetrically with respect to the guide pin, and each having one end swingably and radially slidably held by the first member and the other end inserted in the second member, one end of each the driving pin being slidable axially.