Patents by Inventor Kouzou Tachibana

Kouzou Tachibana has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8871301
    Abstract: A coating treatment apparatus includes: a rotating and holding part; a nozzle supplying a coating solution; a moving mechanism moving the nozzle; and a control unit that controls the rotating and holding part, the nozzle, and the moving mechanism to supply the coating solution onto a central portion of the substrate and rotate the substrate at a first rotation speed, then move a supply position of the coating solution from a central position toward an eccentric position of the substrate with the substrate being rotated at a second rotation speed lower than the first rotation speed while continuing supply of the coating solution, then stop the supply of the coating solution with the rotation speed of the substrate decreased to a third rotation speed lower than the second rotation speed, and then increase the rotation speed of the substrate to be higher than the third rotation speed.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: October 28, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Kouzou Tachibana, Takahisa Otsuka, Akira Nishiya
  • Publication number: 20140030423
    Abstract: A liquid processing apparatus includes a substrate holding unit arranged within a processing cup and configured to horizontally hold a substrate, a rotating mechanism configured to rotate the substrate holding unit about a vertical axis, a processing liquid supply unit configured to supply a processing liquid onto a surface of the substrate, and an exhaust mechanism configured to discharge an atmospheric gas around the substrate. The exhaust mechanism includes an exhaust flow path connected to an exhaust port formed at the processing cup, a circulation flow path branched from the exhaust flow path and configured to communicate with the processing cup, a gas liquid separator, a first regulator valve installed at one end of the exhaust flow path, and a second regulator valve installed at the other end of the exhaust flow path.
    Type: Application
    Filed: July 24, 2013
    Publication date: January 30, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Minoru KUBOTA, Kousuke YOSHIHARA, Kouzou TACHIBANA
  • Publication number: 20120189773
    Abstract: A coating treatment apparatus includes: a rotating and holding part; a nozzle supplying a coating solution; a moving mechanism moving the nozzle; and a control unit that controls the rotating and holding part, the nozzle, and the moving mechanism to supply the coating solution onto a central portion of the substrate and rotate the substrate at a first rotation speed, then move a supply position of the coating solution from a central position toward an eccentric position of the substrate with the substrate being rotated at a second rotation speed lower than the first rotation speed while continuing supply of the coating solution, then stop the supply of the coating solution with the rotation speed of the substrate decreased to a third rotation speed lower than the second rotation speed, and then increase the rotation speed of the substrate to be higher than the third rotation speed.
    Type: Application
    Filed: January 6, 2012
    Publication date: July 26, 2012
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kouzou TACHIBANA, Takahisa OTSUKA, Akira NISHIYA
  • Patent number: 5089642
    Abstract: A carboalkylated amino alcohol having each of the below shown formulae is novel and optically active. A separating agent comprising the alcohol and a support is effectively useful to separate a variety of racemates for example with chromatography. The alcohol may be chemically or physically combined with the support.
    Type: Grant
    Filed: October 26, 1990
    Date of Patent: February 18, 1992
    Assignee: Daicel Chemical Industries, Ltd.
    Inventors: Masaki Hasegawa, Kazuhiko Saigo, Yoichi Yuki, Kouzou Tachibana
  • Patent number: 5041573
    Abstract: A carboalkylated amino alcohol having each of the below shown formulae is novel and optically active. A separating agent comprising the alcohol and a support is effectively useful to separate a variety of racemates for example with chromatography. The alcohol may be chemically or physically combined with the support. ##STR1## [wherein Ph represents a phenyl group, R represents a hydrogen atom, an alkyl group having the carbon number of 1 to 10, or an aryl group having the carbon number of 6 to 10, X represents an --O-- group or a --S-- group, and Z represents a hydrogen atom, an alkyl group having the carbon number of 1 to 10 or a metal element].
    Type: Grant
    Filed: October 18, 1989
    Date of Patent: August 20, 1991
    Assignee: Daicel Chemical Industries, Ltd.
    Inventors: Masaki Hasegawa, Kazuhiko Saigo, Yoichi Yuki, Kouzou Tachibana
  • Patent number: 4966985
    Abstract: A carboalkylated amino alcohol having each of the below shown formulae is novel and optically active. A separating agent comprising the alcohol and a support is effectively useful to separate a variety of racemates for example with chromatography. The alcohol may be chemically or physically combined with the support. ##STR1## [wherein Ph represents a phenyl group, R represents a hydrogen atom, an alkyl group having the carbon number of 1 to 10, or an aryl group having the carbon number of 6 to 10, X represents an --0-- group or a --S-- group, and Z represents a hydrogen atom, an alkyl group having the carbon number of 1 to 10 or a metal element].
    Type: Grant
    Filed: December 24, 1986
    Date of Patent: October 30, 1990
    Assignee: Daicel Chemical Industries, Ltd.
    Inventors: Masaki Hasegawa, Kazuhiko Saigo, Yoichi Yuki, Kouzou Tachibana
  • Patent number: 4942149
    Abstract: A crown ether compound is shown below and useful as a separating agent for chemical compounds. ##STR1## (In the formula, A and B represent hydrogen atoms, straight chain or branched alkyl groups having 1-6 carbon atoms, allyl groups having 6-10 carbon atoms, or aralkyl groups having 7-9 carbon atoms. Although A and B may be different groups, it is preferable that they be the same.R.sub.1 represents a hydrogen atom, a straight chain or branched alkyl group having 1-20 carbon atoms, or preferably an alkyl group having 6-16 carbon atoms. R.sub.1 may be bonded to any carbon atom on the cyclical ester group and its number is 1-12, and preferably 1-3. n represents an integer from 3-10, and preferably 4-8, with 5 or 6 being even more preferable.In addition R.sub.2 and R.sub.3 represent straight chain or branched alkyl groups having 1-30, and preferably 6-20 carbon atoms, or aryl groups having 6-18 carbon atoms, or aralkyl groups having 7-30 carbon atoms. The location of R.sub.2 and R.sub.
    Type: Grant
    Filed: August 25, 1989
    Date of Patent: July 17, 1990
    Assignees: Director-General of Agency of Industrial Science and Technology, Daicel Chemical Industries
    Inventors: Toshio Shinbo, Tomohiko Yamaguchi, Kouzou Tachibana