Patents by Inventor Kuei-Hung Shen
Kuei-Hung Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12133470Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer over a transistor region, where N is a natural number, and a bottom electrode over the Nth metal layer. The bottom electrode comprises a bottom portion having a first width, disposed in a bottom electrode via (BEVA), the first width being measured at a top surface of the BEVA, and an upper portion having a second width, disposed over the bottom portion. The semiconductor structure also includes a magnetic tunneling junction (MTJ) layer having a third width, disposed over the upper portion, a top electrode over the MTJ layer and an (N+1)th metal layer over the top electrode. The first width is greater than the third width.Type: GrantFiled: November 28, 2022Date of Patent: October 29, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CPMPANY, LTD.Inventors: Harry-Hak-Lay Chuang, Kuei-Hung Shen, Chern-Yow Hsu, Shih-Chang Liu
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Publication number: 20240268236Abstract: An integrated chip including a reference magnetic layer and a barrier layer over the reference magnetic layer. A first free magnetic layer is over the barrier layer. A second free magnetic layer is over the first free magnetic layer. A spacer layer is between the first free magnetic layer and the second free magnetic layer. The spacer layer includes magnesium and a transition metal. An atomic ratio of the magnesium to the transition metal ranges from 15% to 80%.Type: ApplicationFiled: February 6, 2023Publication date: August 8, 2024Inventors: Kuo-Feng Huang, Bo-Hung Lin, Harry-Haklay Chuang, Kuei-Hung Shen, Ding-Shuo Wang, Yu-Jen Wang
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Patent number: 11832529Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a an inter-layer dielectric (ILD) structure laterally surrounding a conductive interconnect. A dielectric protection layer is disposed over the ILD structure and a passivation layer is disposed over the dielectric protection layer. The passivation layer includes a protrusion extending outward from an upper surface of the passivation layer. A bottom electrode continuously extends from over the passivation layer to between sidewalls of the passivation layer. A data storage element is over the bottom electrode and a top electrode is over the data storage element.Type: GrantFiled: April 20, 2022Date of Patent: November 28, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
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Publication number: 20230371396Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a bottom electrode disposed over a substrate. The bottom electrode has a first thickness along an outermost edge and a second thickness between the outermost edge and a lateral center of the bottom electrode. The first thickness is larger than the second thickness. A data storage structure is over the bottom electrode and a top electrode is over the data storage structure.Type: ApplicationFiled: July 24, 2023Publication date: November 16, 2023Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
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Publication number: 20230240150Abstract: A magnetic tunnel junction (MTJ) element includes a reference layer, a tunnel barrier layer, a free layer, and a dusting layer. The reference layer has a fixed magnetic orientation. The tunnel barrier layer is disposed on the reference layer, and includes an insulating material. The free layer has a changeable magnetic orientation, and includes a first surface and a second surface. The second surface is disposed to confront the tunnel barrier layer and opposite to the first surface. The dusting layer is formed on one of the first and second surfaces of the free layer, and includes a non-magnetic metal. Another aspect of the MTJ element, and a method for manufacturing the MTJ element are also disclosed.Type: ApplicationFiled: January 25, 2022Publication date: July 27, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Chi CHEN, Harry-Hak-Lay CHUANG, Kuei-Hung SHEN, Cheng-Wei CHIEN, Yi-Jen HUANG
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Publication number: 20230088093Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer over a transistor region, where N is a natural number, and a bottom electrode over the Nth metal layer. The bottom electrode comprises a bottom portion having a first width, disposed in a bottom electrode via (BEVA), the first width being measured at a top surface of the BEVA, and an upper portion having a second width, disposed over the bottom portion. The semiconductor structure also includes a magnetic tunneling junction (MTJ) layer having a third width, disposed over the upper portion, a top electrode over the MTJ layer and an (N+1)th metal layer over the top electrode. The first width is greater than the third width.Type: ApplicationFiled: November 28, 2022Publication date: March 23, 2023Inventors: Harry-Hak-Lay CHUANG, Kuei-Hung SHEN, Chern-Yow HS, Shih-Chang LIU
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Publication number: 20230065850Abstract: An integrated circuit device includes a substrate, a memory cell, a magnetic shielding element, an interlayer dielectric layer, and a metallization pattern. The memory cell is over the substrate. The memory cell includes a bottom electrode, a resistance switching element over the bottom electrode, a top electrode over the resistance switching element. The magnetic shielding element is around the memory cell. The interlayer dielectric layer surrounds the memory cell and the magnetic shielding element. The metallization pattern is in the interlayer dielectric layer and connected to the top electrode.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yuan-Jen LEE, Harry-Hak-Lay CHUANG, Tien-Wei CHIANG, Hung Cho WANG, Kuei-Hung SHEN, Sheng-Huang HUANG
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Patent number: 11515473Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer over a transistor region, where N is a natural number, and a bottom electrode over the Nth metal layer. The bottom electrode comprises a bottom portion having a first width, disposed in a bottom electrode via (BEVA), the first width being measured at a top surface of the BEVA, and an upper portion having a second width, disposed over the bottom portion. The semiconductor structure also includes a magnetic tunneling junction (MTJ) layer having a third width, disposed over the upper portion, a top electrode over the MTJ layer and an (N+1)th metal layer over the top electrode. The first width is greater than the third width.Type: GrantFiled: July 17, 2020Date of Patent: November 29, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Shih-Chang Liu, Chern-Yow Hsu, Kuei-Hung Shen
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Publication number: 20220291306Abstract: Disclosed methods include placing a semiconductor wafer containing MRAM devices into a first magnetic field that has a magnitude sufficient to magnetically polarize MRAM bits and has a substantially uniform field strength and direction over the entire area of the wafer. The method further includes placing the wafer in a second magnetic field having an opposite field direction, a substantially uniform field strength and direction over the entire area of the wafer, and magnitude less than a design threshold for MRAM bit magnetization reversal. The method further includes determining a presence of malfunctioning MRAM bits by determining that such malfunctioning MRAM bits have a magnetic polarization that was reversed due to exposure to the second magnetic field. Malfunctioning MRAM bits may further be characterized by electrically reading data bits, or by using a chip probe to read one or more of voltage, current, resistances, etc., of the MRAM devices.Type: ApplicationFiled: September 9, 2021Publication date: September 15, 2022Inventors: Cheng-Wei Chien, Harry-Hak-Lay Chuang, Kuei-Hung Shen, Kuo-Feng Huang, Bo-Hung Lin, Chun-Chi Chen
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Publication number: 20220246838Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a an inter-layer dielectric (ILD) structure laterally surrounding a conductive interconnect. A dielectric protection layer is disposed over the ILD structure and a passivation layer is disposed over the dielectric protection layer. The passivation layer includes a protrusion extending outward from an upper surface of the passivation layer. A bottom electrode continuously extends from over the passivation layer to between sidewalls of the passivation layer. A data storage element is over the bottom electrode and a top electrode is over the data storage element.Type: ApplicationFiled: April 20, 2022Publication date: August 4, 2022Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
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Patent number: 11316096Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a an inter-layer dielectric (ILD) structure laterally surrounding a conductive interconnect. A dielectric protection layer is disposed over the ILD structure and a passivation layer is disposed over the dielectric protection layer. The passivation layer includes a protrusion extending outward from an upper surface of the passivation layer. A bottom electrode continuously extends from over the passivation layer to between sidewalls of the passivation layer. A data storage element is over the bottom electrode and a top electrode is over the data storage element.Type: GrantFiled: June 12, 2020Date of Patent: April 26, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
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Patent number: 11227893Abstract: The present disclosure provides a semiconductor structure, including a logic region and a memory region adjacent to the logic region. The memory region includes a Nth metal layer, a bottom electrode over the Nth metal layer, a magnetic tunneling junction (MTJ) layer over the bottom electrode, a top electrode over the MTJ layer, and a (N+1)th metal layer over the top electrode. The top electrode includes material having an oxidation rate lower than that of Tantalum or Tantalum derivatives. N is an integer greater than or equal to 1.Type: GrantFiled: June 22, 2018Date of Patent: January 18, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Kuei-Hung Shen
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Patent number: 10991758Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a bottom electrode via (BEVA) in a dielectric layer, a recap layer on the BEVA, a bottom electrode on the recap layer, and a magnetic tunneling junction (MTJ) layer over the recap layer and vertically aligning with the BEVA. The BEVA includes a lining layer over a bottom and a sidewall of a trench of the BEVA and a copper layer over the lining layer, filling the trench of the BEVA. The copper layer has a dimpled structure with a top surface lower than a top surface of the dielectric layer. The recap layer overlaps a top surface of the lining layer, an entire top surface of the copper layer, and a portion of the dielectric stack adjacent to the lining layer.Type: GrantFiled: May 21, 2019Date of Patent: April 27, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Kuei-Hung Shen, Hsun-Chung Kuang, Cheng-Yuan Tsai, Ru-Liang Lee
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Patent number: 10868234Abstract: A storage device includes: a plurality of first magnetic tunnel junction (MTJ) cells disposed on a first portion of a substrate; and a plurality of second MTJ cells disposed on a second portion different from the first portion of the substrate; wherein each of the plurality of first MTJ cells has a first cross-sectional surface area viewing from a top of the substrate, each of the plurality of second MTJ cells has a second cross-sectional surface area viewing from the top of the substrate, and the second cross-sectional surface area is greater than the first cross-sectional surface area.Type: GrantFiled: December 12, 2018Date of Patent: December 15, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Chang-Hung Chen, Kuei-Hung Shen, Wen-Chun You, Tien-Wei Chiang
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Publication number: 20200350491Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer over a transistor region, where N is a natural number, and a bottom electrode over the Nth metal layer. The bottom electrode comprises a bottom portion having a first width, disposed in a bottom electrode via (BEVA), the first width being measured at a top surface of the BEVA, and an upper portion having a second width, disposed over the bottom portion. The semiconductor structure also includes a magnetic tunneling junction (MTJ) layer having a third width, disposed over the upper portion, a top electrode over the MTJ layer and an (N+1)th metal layer over the top electrode. The first width is greater than the third width.Type: ApplicationFiled: July 17, 2020Publication date: November 5, 2020Inventors: Harry-Hak-Lay CHUANG, Shih-Chang LIU, Chern-Yow HSU, Kuei-Hung SHEN
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Publication number: 20200303629Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a an inter-layer dielectric (ILD) structure laterally surrounding a conductive interconnect. A dielectric protection layer is disposed over the ILD structure and a passivation layer is disposed over the dielectric protection layer. The passivation layer includes a protrusion extending outward from an upper surface of the passivation layer. A bottom electrode continuously extends from over the passivation layer to between sidewalls of the passivation layer. A data storage element is over the bottom electrode and a top electrode is over the data storage element.Type: ApplicationFiled: June 12, 2020Publication date: September 24, 2020Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
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Patent number: 10720571Abstract: The present disclosure provides a semiconductor structure, including an Nth metal layer over a transistor region, where N is a natural number, and a bottom electrode over the Nth metal layer. The bottom electrode comprises a bottom portion having a first width, disposed in a bottom electrode via (BEVA), the first width being measured at a top surface of the BEVA, and an upper portion having a second width, disposed over the bottom portion. The semiconductor structure also includes a magnetic tunneling junction (MTJ) layer having a third width, disposed over the upper portion, a top electrode over the MTJ layer and an (N+1)th metal layer over the top electrode. The first width is greater than the third width.Type: GrantFiled: July 28, 2018Date of Patent: July 21, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Harry-Hak-Lay Chuang, Shih-Chang Liu, Chern-Yow Hsu, Kuei-Hung Shen
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Publication number: 20200194662Abstract: A storage device includes: a plurality of first magnetic tunnel junction (MTJ) cells disposed on a first portion of a substrate; and a plurality of second MTJ cells disposed on a second portion different from the first portion of the substrate; wherein each of the plurality of first MTJ cells has a first cross-sectional surface area viewing from a top of the substrate, each of the plurality of second MTJ cells has a second cross-sectional surface area viewing from the top of the substrate, and the second cross-sectional surface area is greater than the first cross-sectional surface area.Type: ApplicationFiled: December 12, 2018Publication date: June 18, 2020Inventors: HARRY-HAK-LAY CHUANG, CHANG-HUNG CHEN, KUEI-HUNG SHEN, WEN-CHUN YOU, TIEN-WEI CHIANG
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Patent number: 10686125Abstract: The present disclosure, in some embodiments, relates to an integrated circuit. The integrated circuit includes a dielectric protection layer disposed over a dielectric structure that laterally surrounds one or more conductive interconnect layers. The dielectric protection layer has a protrusion extending outward from an upper surface of the dielectric protection layer. A bottom electrode is disposed over the dielectric protection layer and has sidewalls extending outward from a lower surface of the bottom electrode through the dielectric protection layer. The bottom electrode has a substantially planar upper surface over the protrusion. A data storage element is over the substantially planar upper surface of the bottom electrode, and a top electrode is over the data storage element.Type: GrantFiled: December 17, 2018Date of Patent: June 16, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
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Patent number: 10665321Abstract: The disclosure is related a method for testing a magnetic memory device and a test apparatus are provided. In some exemplary embodiments, the method includes at least the following steps. The magnetic memory device is initialized by applying a first magnetic field to force write a first data to the magnetic memory device. Then, a second magnetic field is applied to the magnetic memory device. Second data may be obtained from the magnetic memory device by performing a chip probing process. Accordingly, performance of the magnetic memory device may be determined based on the second data.Type: GrantFiled: August 30, 2017Date of Patent: May 26, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Yu Wang, Ching-Huang Wang, Chun-Jung Lin, Tien-Wei Chiang, Meng-Chun Shih, Kuei-Hung Shen