Patents by Inventor Kun-Huang Yu

Kun-Huang Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200105926
    Abstract: A high voltage device includes: a crystalline silicon layer, a well, a body region, a gate, a source, and a drain. The body region has a P-type conductivity type, and is formed in the well. The gate is located on and in contact with the well. The source and the drain have an N-type conductivity type, and are located below, outside, and at different sides of the gate, and are located in the body region and the well respectively. An inverse region is defined in the body region between the source and the well, to serve as an inverse current channel in an ON operation. The inverse region includes a germanium distribution region which has a germanium atom concentration higher than 1*1013 atoms/cm2. Adrift region is defined in the well, between the body region and the drain, to serve as a drift current channel in an ON operation.
    Type: Application
    Filed: August 15, 2019
    Publication date: April 2, 2020
    Inventors: Tsung-Yi Huang, Kun-Huang Yu
  • Patent number: 10373837
    Abstract: Provided is a memory device including a first gate, a second gate and an inter-gate dielectric layer. The first gate is buried in a substrate. The second gate includes metal and is disposed on the substrate. The inter-gate dielectric layer is disposed between the first and second gates. The inter-gate dielectric layer comprises a high-k layer having a dielectric constant of greater than about 10.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: August 6, 2019
    Assignee: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Patent number: 10340349
    Abstract: A method of forming a semiconductor structure is disclosed. A substrate having a first area and a second area is provided, wherein a first surface of the first area is lower than a second surface of the second area. A first insulating layer, a first gate, a first dielectric layer and a first dummy gate are sequentially formed on the first surface of the first area. A second dielectric layer and a second dummy gate are formed on the second surface of the second area. An inter-layer dielectric layer is formed around the first gate, the first dummy gate and the second dummy gate. The first dummy gate and the second dummy gate are removed, so as to form a first trench and a second trench in the inter-layer dielectric layer. A second gate and a third gate are filled respectively in the first trench and the second trench.
    Type: Grant
    Filed: October 31, 2017
    Date of Patent: July 2, 2019
    Assignee: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Publication number: 20180269319
    Abstract: The invention provides a high voltage device, including: an operation layer, formed on a substrate; a body region and a well, formed in the operation layer to connect the top surface, wherein a PN interface is formed between the body region and the well; a gate, formed on the top surface; a drain and a source, the source formed in a portion of the operation layer in the body region, and the drain formed in a portion of the operation layer in the well; a pseudo-gate, formed on the top surface between the gate and the drain; a first resist protection oxide layer, formed on the gate, the well, and the pseudo-gate; a first conductor layer, formed on the first resist protection oxide layer; a second resist protection oxide layer, formed on the pseudo-gate and the well, the second resist protection oxide layer having no contact with the first resist protection oxide layer; and a second conductor layer, formed on the second resist protection oxide layer.
    Type: Application
    Filed: June 15, 2017
    Publication date: September 20, 2018
    Inventors: Kun-Huang Yu, Tsung-Yi Huang
  • Publication number: 20180069089
    Abstract: A method of forming a semiconductor structure is disclosed. A substrate having a first area and a second area is provided, wherein a first surface of the first area is lower than a second surface of the second area. A first insulating layer, a first gate, a first dielectric layer and a first dummy gate are sequentially formed on the first surface of the first area. A second dielectric layer and a second dummy gate are formed on the second surface of the second area. An inter-layer dielectric layer is formed around the first gate, the first dummy gate and the second dummy gate. The first dummy gate and the second dummy gate are removed, so as to form a first trench and a second trench in the inter-layer dielectric layer. A second gate and a third gate are filled respectively in the first trench and the second trench.
    Type: Application
    Filed: October 31, 2017
    Publication date: March 8, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Publication number: 20180005835
    Abstract: Provided is a memory device including a first gate, a second gate and an inter-gate dielectric layer. The first gate is buried in a substrate. The second gate includes metal and is disposed on the substrate. The inter-gate dielectric layer is disposed between the first and second gates. The inter-gate dielectric layer comprises a high-k layer having a dielectric constant of greater than about 10.
    Type: Application
    Filed: September 14, 2017
    Publication date: January 4, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Patent number: 9812327
    Abstract: Provided is a memory device including a first gate, a second gate and an inter-gate dielectric layer. The first gate is buried in a substrate. The second gate includes metal and is disposed on the substrate. The inter-gate dielectric layer is disposed between the first and second gates. A method of forming a memory device is further provided.
    Type: Grant
    Filed: September 23, 2015
    Date of Patent: November 7, 2017
    Assignee: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Patent number: 9653558
    Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a substrate, a source region, a drain region, a gate, and a dummy contact. The source region and the drain region are formed in the substrate. The gate is formed on the substrate and between the source region and the drain region. The dummy contact includes a plurality of dummy plugs formed on the substrate, wherein the dummy plugs have depths decreasing towards the drain region.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: May 16, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Yin Hsiao, Kai-Kuen Chang, Kun-Huang Yu
  • Publication number: 20170125583
    Abstract: A high voltage transistor includes a substrate, a well which is disposed within the substrate, a gate disposed on the well, a gate dielectric layer disposed between the well and the gate, two drift regions respectively disposed in the well at two sides of the gate, two source/drain regions respectively disposed within each drift region, wherein a width of the gate dielectric layer is smaller than a width of the source/drain region, and two isolation elements respectively disposed within each drift region
    Type: Application
    Filed: November 2, 2015
    Publication date: May 4, 2017
    Inventors: Shih-Yin Hsiao, Kun-Huang Yu
  • Publication number: 20170098696
    Abstract: Provided is a semiconductor structure including a substrate, a first gate, a second gate, a third gate and an inter-gate dielectric layer. The substrate has a first area and a second area, and the first surface of the first area is lower than the second surface of the second area. The first gate is disposed on the first surface of the first area. The second gate includes metal and is disposed on the first gate. The inter-gate dielectric layer is disposed between the first and second gates. The third gate includes metal and is disposed on the second surface of the second area. A method of foaming a semiconductor structure is further provided.
    Type: Application
    Filed: November 10, 2015
    Publication date: April 6, 2017
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Publication number: 20170062444
    Abstract: Provided is a memory device including a first gate, a second gate and an inter-gate dielectric layer. The first gate is buried in a substrate. The second gate includes metal and is disposed on the substrate. The inter-gate dielectric layer is disposed between the first and second gates. A method of forming a memory device is further provided.
    Type: Application
    Filed: September 23, 2015
    Publication date: March 2, 2017
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Publication number: 20160336410
    Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a substrate, a source region, a drain region, a gate, and a dummy contact. The source region and the drain region are formed in the substrate. The gate is formed on the substrate and between the source region and the drain region. The dummy contact includes a plurality of dummy plugs formed on the substrate, wherein the dummy plugs have depths decreasing towards the drain region.
    Type: Application
    Filed: June 15, 2015
    Publication date: November 17, 2016
    Inventors: Shih-Yin Hsiao, Kai-Kuen Chang, Kun-Huang Yu
  • Publication number: 20160336417
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; using a first patterned mask to form a gate dielectric layer on the substrate; removing the first patterned mask; removing part of the gate dielectric layer; and forming a shallow trench isolation (STI) adjacent to two sides of the gate dielectric layer.
    Type: Application
    Filed: June 24, 2015
    Publication date: November 17, 2016
    Inventors: Shih-Yin Hsiao, Kun-Huang Yu, Nien-Chung Li, Wen-Fang Lee, Chih-Chung Wang
  • Patent number: 9484422
    Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: November 1, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
  • Patent number: 9466694
    Abstract: A method for manufacturing a MOS transistor device includes following steps. A substrate including at least an isolation structure formed therein is provided. Next, a MOS transistor device is formed on the substrate, the MOS transistor device includes a gate, a source region, a drain region and a spacer. After forming the MOS transistor device, at least a first dummy contact is formed on a drain side of the gate and a gate contact is formed to be electrically connected to the gate. The first dummy contact is spaced apart from a surface of the substrate and electrically connected to the gate contact.
    Type: Grant
    Filed: April 19, 2016
    Date of Patent: October 11, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Patent number: 9461133
    Abstract: A high voltage metal-oxide-semiconductor transistor device having stepped gate structure and a manufacturing method thereof are provided. The manufacturing method includes following steps. A gate structure is formed on a semiconductor substrate. The semiconductor substrate includes a first region and a second region disposed on a side of a first part of the gate structure and a side of a second part of the gate structure respectively. A patterned mask layer is formed on the semiconductor substrate and the gate structure. The patterned mask layer covers the first region and the first part. The second part is uncovered by the patterned mask layer. An implantation process is performed to form a drift region in the second region. An etching process is performed to remove a part of the second part uncovered by the patterned mask layer. A thickness of the second part is less than that of the first part after the etching process.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: October 4, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Yin Hsiao, Kun-Huang Yu
  • Publication number: 20160233313
    Abstract: A method for manufacturing a MOS transistor device includes following steps. A substrate including at least an isolation structure formed therein is provided. Next, a MOS transistor device is formed on the substrate, the MOS transistor device includes a gate, a source region, a drain region and a spacer. After forming the MOS transistor device, at least a first dummy contact is formed on a drain side of the gate and a gate contact is formed to be electrically connected to the gate. The first dummy contact is spaced apart from a surface of the substrate and electrically connected to the gate contact.
    Type: Application
    Filed: April 19, 2016
    Publication date: August 11, 2016
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Patent number: 9349818
    Abstract: A MOS transistor device includes a substrate including a gate formed thereon, and a spacer being formed on a sidewall of the gate; a source region and a drain region formed in the substrate; and at least a first dummy contact formed above the substrate on a drain side of the gate. More important, the first dummy contact is formed apart from a surface of the substrate.
    Type: Grant
    Filed: October 21, 2014
    Date of Patent: May 24, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Publication number: 20160111509
    Abstract: A MOS transistor device includes a substrate including a gate formed thereon, and a spacer being formed on a sidewall of the gate; a source region and a drain region formed in the substrate; and at least a first dummy contact formed above the substrate on a drain side of the gate. More important, the first dummy contact is formed apart from a surface of the substrate.
    Type: Application
    Filed: October 21, 2014
    Publication date: April 21, 2016
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao
  • Publication number: 20160043193
    Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
    Type: Application
    Filed: October 14, 2015
    Publication date: February 11, 2016
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen