Abstract: An integrated controlling chip includes a signal processing unit, a resistance unit and an electrostatic discharge protection circuit. The signal processing unit includes an input port. The resistance unit includes a first node coupled to a signal pin of the integrated controlling chip, and includes a second node coupled to the input port of the signal processing unit. The electrostatic discharge protection circuit includes a node coupled between the first node of the resistance unit and the signal pin of the integrated controlling chip.

Abstract: An electronic static discharge (ESD) protection apparatus for a programmable device is provided. The apparatus can improve the turn-on efficiency and reduce the surface area of the chip efficiently by providing a low impedance current path which can sufficiently lower the voltage of the programmable device when ESD occurs. The ESD protection apparatus includes an ESD protection device, a programmable device, a first circuit, a second circuit, and a third circuit.

Abstract: An apparatus and a method for mounting a conditioning disk to a conditioning head for use in a chemical mechanical polishing apparatus. A torroidal-shaped bearing mount is fixedly mounted to a conditioning arm of the CMP apparatus for receiving a ball bearing and a cylinder rotator. A cylinder shaft is mounted inside a cylinder chamber defined by the cylinder rotator and is further equipped with a piston mounted at near a top end of the shaft which has an elastomeric gasket mounted on an outer rim for sealingly engaging a sidewall in the cylinder chamber. A disk holder is mounted to a bottom end of the cylinder shaft by a universal connector/universal mount such that the disk holder, with a conditioning disk mounted thereon, can be operated to follow a contour of the polishing disk by tilting to an angle of at least ±30° from a horizontal plane.