Patents by Inventor Kunliang Zhang

Kunliang Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240071414
    Abstract: A read head includes a permanent magnet (PM) layer formed up to 100 nm behind a free layer where PM layer magnetization may be initialized in a direction that adjusts free layer (FL) bias point, and shifts sensor asymmetry (Asym) closer to 0% for individual heads at slider or Head Gimbal Assembly level to provide a significant improvement in device yield. Asym is adjusted using different initialization schemes and initialization directions. With individual heads, initialization direction is selected based on a prior measurement of asymmetry. The PM layer is CoPt or CoCrPt and has coercivity from 500 Oersted to 1000 Oersted. The PM layer may have a width equal to the FL, or in another embodiment, the PM layer adjoins a backside of the top shield and has a width equal to or greater than that of the FL.
    Type: Application
    Filed: October 30, 2023
    Publication date: February 29, 2024
    Inventors: Glen Garfunkel, Yan Wu, Wenyu Chen, Kunliang Zhang, Min Li, Shohei Kawasaki
  • Patent number: 11887635
    Abstract: A read head includes a permanent magnet (PM) layer formed up to 100 nm behind a free layer where PM layer magnetization may be initialized in a direction that adjusts free layer (FL) bias point, and shifts sensor asymmetry (Asym) closer to 0% for individual heads at slider or Head Gimbal Assembly level to provide a significant improvement in device yield. Asym is adjusted using different initialization schemes and initialization directions. With individual heads, initialization direction is selected based on a prior measurement of asymmetry. The PM layer is CoPt or CoCrPt and has coercivity from 500 Oersted to 1000 Oersted. The PM layer may have a width equal to the FL, or in another embodiment, the PM layer adjoins a backside of the top shield and has a width equal to or greater than that of the FL.
    Type: Grant
    Filed: July 1, 2022
    Date of Patent: January 30, 2024
    Assignee: Headway Technologies, Inc.
    Inventors: Glen Garfunkel, Yan Wu, Wenyu Chen, Kunliang Zhang, Min Li, Shohei Kawasaki
  • Publication number: 20230343362
    Abstract: Methods of critical dimension (CD) uniformity control for magnetic head devices are disclosed. In some embodiments, a method can include providing a film stack, the film stack including a substrate, a magnetoresistive (MR) sensor layer, and a hard mask layer, patterning the hard mask layer using a first mask that defines critical shape patterns other than the CD, forming a mandrel pattern using a second mask that defines the CD, and forming a sidewall spacer pattern on sidewalls of the mandrel pattern, and removing the mandrel pattern.
    Type: Application
    Filed: June 28, 2023
    Publication date: October 26, 2023
    Inventors: Tom Zhong, Hiroshi Omine, Jianing Zhou, Kunliang Zhang, Ruhang Ding, Min Li
  • Patent number: 11715491
    Abstract: Methods of critical dimension (CD) uniformity control for magnetic head devices are disclosed. In some embodiments, a method can include providing a film stack, the film stack including a substrate, a magnetoresistive (MR) sensor layer, and a hard mask layer, patterning the hard mask layer using a first mask that defines critical shape patterns other than the CD, forming a mandrel pattern using a second mask that defines the CD, and forming a sidewall spacer pattern on sidewalls of the mandrel pattern, and removing the mandrel pattern.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: August 1, 2023
    Assignee: Headway Technologies, Inc.
    Inventors: Tom Zhong, Hiroshi Omine, Jianing Zhou, Kunliang Zhang, Ruhang Ding, Min Li
  • Publication number: 20230005500
    Abstract: Methods of critical dimension (CD) uniformity control for magnetic head devices are disclosed. In some embodiments, a method can include providing a film stack, the film stack including a substrate, a magnetoresistive (MR) sensor layer, and a hard mask layer, patterning the hard mask layer using a first mask that defines critical shape patterns other than the CD, forming a mandrel pattern using a second mask that defines the CD, and forming a sidewall spacer pattern on sidewalls of the mandrel pattern, and removing the mandrel pattern.
    Type: Application
    Filed: June 30, 2021
    Publication date: January 5, 2023
    Inventors: Tom Zhong, Hiroshi Omine, Jianing Zhou, Kunliang Zhang, Ruhang Ding, Min Li
  • Publication number: 20220335969
    Abstract: A read head includes a permanent magnet (PM) layer formed up to 100 nm behind a free layer where PM layer magnetization may be initialized in a direction that adjusts free layer (FL) bias point, and shifts sensor asymmetry (Asym) closer to 0% for individual heads at slider or Head Gimbal Assembly level to provide a significant improvement in device yield. Asym is adjusted using different initialization schemes and initialization directions. With individual heads, initialization direction is selected based on a prior measurement of asymmetry. The PM layer is CoPt or CoCrPt and has coercivity from 500 Oersted to 1000 Oersted. The PM layer may have a width equal to the FL, or in another embodiment, the PM layer adjoins a backside of the top shield and has a width equal to or greater than that of the FL.
    Type: Application
    Filed: July 1, 2022
    Publication date: October 20, 2022
    Inventors: Glen Garfunkel, Yan Wu, Wenyu Chen, Kunliang Zhang, Min Li, Shohei Kawasaki
  • Patent number: 11380355
    Abstract: A read head includes a permanent magnet (PM) layer formed up to 100 nm behind a free layer where PM layer magnetization may be initialized in a direction that adjusts free layer (FL) bias point, and shifts sensor asymmetry (Asym) closer to 0% for individual heads at slider or Head Gimbal Assembly level to provide a significant improvement in device yield. Asym is adjusted using different initialization schemes and initialization directions. With individual heads, initialization direction is selected based on a prior measurement of asymmetry. The PM layer is CoPt or CoCrPt and has coercivity from 500 Oersted to 1000 Oersted. The PM layer may have a width equal to the FL, or a width equal to the cross-track distance between outer sides of the longitudinal bias layers. In another embodiment, the PM layer adjoins a backside of the top shield.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: July 5, 2022
    Assignee: Headway Technologies, Inc.
    Inventors: Glen Garfunkel, Yan Wu, Wenyu Chen, Kunliang Zhang, Min Li, Shohei Kawasaki
  • Publication number: 20220130419
    Abstract: A read head includes a permanent magnet (PM) layer formed up to 100 nm behind a free layer where PM layer magnetization may be initialized in a direction that adjusts free layer (FL) bias point, and shifts sensor asymmetry (Asym) closer to 0% for individual heads at slider or Head Gimbal Assembly level to provide a significant improvement in device yield. Asym is adjusted using different initialization schemes and initialization directions. With individual heads, initialization direction is selected based on a prior measurement of asymmetry. The PM layer is CoPt or CoCrPt and has coercivity from 500 Oersted to 1000 Oersted. The PM layer may have a width equal to the FL, or a width equal to the cross-track distance between outer sides of the longitudinal bias layers. In another embodiment, the PM layer adjoins a backside of the top shield.
    Type: Application
    Filed: October 27, 2020
    Publication date: April 28, 2022
    Inventors: Glen Garfunkel, Yan Wu, Wenyu Chen, Kunliang Zhang, Min Li, Shohei Kawasaki
  • Patent number: 11217274
    Abstract: A hard magnet stabilization scheme is disclosed for a top shield and junction shields for double or triple dimension magnetic reader structures. In one design, the hard magnet (HM) adjoins a top or bottom surface of all or part of a shield domain such that the HM is recessed from the air bearing surface to satisfy reader-to-reader spacing requirements and stabilizes a closed loop magnetization in the top shield. The HM may have a height and width greater than that of the top shield. The top shield may have a ring shape with a HM formed above, below, or within the ring shape, and wherein the HM stabilizes a vortex magnetization. HM magnetization is set or reset from room temperature to 100° C. to maintain a desired magnetization direction in the top shield, junction shield, and free layer in the sensor.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: January 4, 2022
    Assignee: Headway Technologies, Inc.
    Inventors: Junjie Quan, Glen Garfunkel, Yewhee Chye, Kunliang Zhang, Min Li
  • Patent number: 10950261
    Abstract: The use of supermalloy-like materials such as NiFeMe where Me is one or more of Mo, Cr, and Cu for the side and top shields of a magnetic bit sensor is shown to provide better shielding protection from stray fields because of their extremely high permeability. Moreover, the side shield may comprise a stack in which a Ni, Fe, Co, FeNi, CoFe, or FeCo is sandwiched between two NiFeMe layers to enhance the bias field on an adjacent free layer. Including NiFeMe in a side shield results in an increase in readback amplitude under the same asymmetric sigma. For these sensors, the signal to noise ratio was higher and the bit error rate was lower than with conventional materials in the side shield. A method is disclosed for forming a magnetic bit sensor having supermalloy-like materials in the side shields.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: March 16, 2021
    Assignee: Headway Technologies, Inc.
    Inventors: Yewhee Chye, Kunliang Zhang, Min Li
  • Publication number: 20200176024
    Abstract: A hard magnet stabilization scheme is disclosed for a top shield and junction shields for double or triple dimension magnetic reader structures. In one design, the hard magnet (HM) adjoins a top or bottom surface of all or part of a shield domain such that the HM is recessed from the air bearing surface to satisfy reader-to-reader spacing requirements and stabilizes a closed loop magnetization in the top shield. The HM may have a height and width greater than that of the top shield. The top shield may have a ring shape with a HM formed above, below, or within the ring shape, and wherein the HM stabilizes a vortex magnetization. HM magnetization is set or reset from room temperature to 100° C. to maintain a desired magnetization direction in the top shield, junction shield, and free layer in the sensor.
    Type: Application
    Filed: February 7, 2020
    Publication date: June 4, 2020
    Inventors: Junjie Quan, Glen Garfunkel, Yewhee Chye, Kunliang Zhang, Min Li
  • Patent number: 10593357
    Abstract: A hard magnet stabilization scheme is disclosed for a top shield and junction shields for double or triple dimension magnetic reader structures. In one design, the hard magnet (HM) adjoins a top or bottom surface of all or part of a shield domain such that the HM is recessed from the air bearing surface to satisfy reader-to-reader spacing requirements and stabilizes a closed loop magnetization in the top shield. The HM may have a height and width greater than that of the top shield. The top shield may have a ring shape with a HM formed above, below, or within the ring shape, and wherein the HM stabilizes a vortex magnetization. HM magnetization is set or reset from room temperature to 100° C. to maintain a desired magnetization direction in the top shield, junction shield, and free layer in the sensor.
    Type: Grant
    Filed: October 16, 2018
    Date of Patent: March 17, 2020
    Assignee: Headway Technologies, Inc.
    Inventors: Junjie Quan, Glen Garfunkel, Yewhee Chye, Kunliang Zhang, Min Li
  • Patent number: 10586560
    Abstract: A PMR (perpendicular magnetic recording) head is configured for thermally assisted magnetic recording (TAMR). The thermal energy is supplied by the near-fields of plasmons and the near-fields are directed to a magnetic recording medium by a PPG layer. The PPG layer is Rhodium (Rh) whose small-grained crystal structure normally makes it subject to thermal deformations and other weaknesses. By growing the PPG layer on a thin template layer (TTL), the portion of the PPG layer adjacent to the air-bearing surface (ABS) develops a larger grain size and stronger forces between its atomic constituents which makes it resistant to those deformations.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: March 10, 2020
    Assignee: Headway Technologies, Inc.
    Inventors: Shengyuan Wang, Weihao Xu, Cherng-Chyi Han, Xuhui Jin, Min Li, Kunliang Zhang
  • Patent number: 10354707
    Abstract: A seed layer stack with a smooth top surface having a peak to peak film thickness variation of about 0.5 nm is formed by sputter depositing a second seed layer on a first seed layer that is Mg, MgN, or an alloy thereof where the second seed layer has a bond energy substantially greater than that of the first seed layer. The second seed layer may be Ta or NiCr. In some embodiments, an uppermost seed layer that is one or both of Ru and Cu is deposited on the second seed layer. Higher coercivity (Hc) and perpendicular magnetic anisotropy (Hk) is observed in an overlying ferromagnetic layer than when a prior art seed layer stack is employed. The first seed layer has a thickness from 2 to 20 Angstroms and has a resputtering rate about 2 to 40 times that of the second seed layer.
    Type: Grant
    Filed: April 14, 2016
    Date of Patent: July 16, 2019
    Assignee: Headway Technologies, Inc.
    Inventors: Kunliang Zhang, Ruhang Ding, Min Li, Wenyu Chen
  • Publication number: 20190051321
    Abstract: A hard magnet stabilization scheme is disclosed for a top shield and junction shields for double or triple dimension magnetic reader structures. In one design, the hard magnet (HM) adjoins a top or bottom surface of all or part of a shield domain such that the HM is recessed from the air bearing surface to satisfy reader-to-reader spacing requirements and stabilizes a closed loop magnetization in the top shield. The HM may have a height and width greater than that of the top shield. The top shield may have a ring shape with a HM formed above, below, or within the ring shape, and wherein the HM stabilizes a vortex magnetization. HM magnetization is set or reset from room temperature to 100° C. to maintain a desired magnetization direction in the top shield, junction shield, and free layer in the sensor.
    Type: Application
    Filed: October 16, 2018
    Publication date: February 14, 2019
    Inventors: Junjie Quan, Glen Garfunkel, Yewhee Chye, Kunliang Zhang, Min Li
  • Publication number: 20190013041
    Abstract: The use of supermalloy-like materials such as NiFeMe where Me is one or more of Mo, Cr, and Cu for the side and top shields of a magnetic bit sensor is shown to provide better shielding protection from stray fields because of their extremely high permeability. Moreover, the side shield may comprise a stack in which a Ni, Fe, Co, FeNi, CoFe, or FeCo is sandwiched between two NiFeMe layers to enhance the bias field on an adjacent free layer. Including NiFeMe in a side shield results in an increase in readback amplitude under the same asymmetric sigma. For these sensors, the signal to noise ratio was higher and the bit error rate was lower than with conventional materials in the side shield. A method is disclosed for forming a magnetic bit sensor having supermalloy-like materials in the side shields.
    Type: Application
    Filed: August 28, 2018
    Publication date: January 10, 2019
    Inventors: Yewhee Chye, Kunliang Zhang, Min Li
  • Patent number: 10157634
    Abstract: A process flow is disclosed for forming a MR sensor having an antiferromagnetic (AFM) layer recessed behind a bottom shield to reduce reader shield spacing and improve pin related noise. An AP2/AFM coupling layer/AP1 stack that extends from an air bearing surface to the MR sensor backside is formed above the AFM layer. The AP2 layer is pinned by the AFM layer, and the AP1 layer serves as a reference layer to an overlying free layer during a read operation. The AP1 and AP2 layers have improved resistance to magnetization flipping because back portions thereof have a full cross-track width “w” between MR sensor sides thereby enabling greater pinning strength from the AFM layer. Front portions of the AP1/AP2 layers lie under the free layer and have a track width less than “w”. The bottom shield may have an anti-ferromagnetic coupling structure.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: December 18, 2018
    Assignee: Headway Technologies, Inc.
    Inventors: Ruhang Ding, Yewhee Chye, Wenyu Chen, Kunliang Zhang, Yan Wu, Min Li
  • Patent number: 10115418
    Abstract: A hard magnet stabilization scheme is disclosed for a top shield and junction shields for double or triple dimension magnetic reader structures. In one design, the hard magnet (HM) adjoins a top or bottom surface of all or part of a shield domain such that the HM is recessed from the air bearing surface to satisfy reader-to-reader spacing requirements and stabilizes a closed loop magnetization in the top shield. Alternatively, the HM may replace a shield domain. The top shield may have various shapes including a ring shape in which the HM stabilizes a vortex magnetization. In a whole shield coupling design, the HM contacts all of the top shield bottom surface except over the sensor and junction shield. HM magnetization is set or reset from room temperature to 100° C. to maintain a desired magnetization direction in the top shield, junction shield, and free layer in the sensor.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: October 30, 2018
    Assignee: Headway Technologies, Inc.
    Inventors: Junjie Quan, Glen Garfunkel, Yewhee Chye, Kunliang Zhang, Min Li
  • Publication number: 20180144766
    Abstract: A hard magnet stabilization scheme is disclosed for a top shield and junction shields for double or triple dimension magnetic reader structures. In one design, the hard magnet (HM) adjoins a top or bottom surface of all or part of a shield domain such that the HM is recessed from the air bearing surface to satisfy reader-to-reader spacing requirements and stabilizes a closed loop magnetization in the top shield. Alternatively, the HM may replace a shield domain. The top shield may have various shapes including a ring shape in which the HM stabilizes a vortex magnetization. In a whole shield coupling design, the HM contacts all of the top shield bottom surface except over the sensor and junction shield. HM magnetization is set or reset from room temperature to 100° C. to maintain a desired magnetization direction in the top shield, junction shield, and free layer in the sensor.
    Type: Application
    Filed: November 21, 2016
    Publication date: May 24, 2018
    Inventors: Junjie Quan, Glen Garfunkel, Yewhee Chye, Kunliang Zhang, Min Li
  • Publication number: 20180130487
    Abstract: A process flow is disclosed for forming a MR sensor having an antiferromagnetic (AFM) layer recessed behind a bottom shield to reduce reader shield spacing and improve pin related noise. An AP2/AFM coupling layer/AP1 stack that extends from an air bearing surface to the MR sensor backside is formed above the AFM layer. The AP2 layer is pinned by the AFM layer, and the AP1 layer serves as a reference layer to an overlying free layer during a read operation. The AP1 and AP2 layers have improved resistance to magnetization flipping because back portions thereof have a full cross-track width “w” between MR sensor sides thereby enabling greater pinning strength from the AFM layer. Front portions of the AP1/AP2 layers lie under the free layer and have a track width less than “w”. The bottom shield may have an anti-ferromagnetic coupling structure.
    Type: Application
    Filed: October 23, 2017
    Publication date: May 10, 2018
    Inventors: Ruhang Ding, Yewhee Chye, Wenyu Chen, Kunliang Zhang, Yan Wu, Min Li