Abstract: A semiconductor device includes a substrate, a channel member above the substrate, a gate structure engaging the channel member, an epitaxial feature in physical contact with the channel member, and a dielectric layer interposing the gate structure and the epitaxial feature. A sidewall surface of the dielectric layer facing the gate structure has a convex shape in a top view, and the convex shape has a center portion extending towards the gate structure.

Abstract: In an embodiment, a device includes: first nanostructures; a first undoped semiconductor layer contacting a first dummy region of the first nanostructures; a first spacer on the first undoped semiconductor layer; a first source/drain region on the first spacer, the first source/drain region contacting a first channel region of the first nanostructures; and a first gate structure wrapped around the first channel region and the first dummy region of the first nanostructures.

Abstract: A method of manufacturing an integrated circuit device is provided. The method includes forming a semiconductor fin over a semiconductor substrate; forming an isolation structure surrounding the semiconductor fin; etching a trench in the semiconductor fin; forming a dielectric fin in the trench; after forming the dielectric fin, recessing a top surface of the isolation structure, such that the dielectric fin and the semiconductor fin protrude from the recessed top surface of the isolation structure; and forming a first metal gate structure and a second metal gate structure over the dielectric fin and the semiconductor fin, respectively.

Abstract: A semiconductor device includes a substrate, first and second stacks of semiconductor nanosheets, a gate structure, first and second strained layers and a blocking wall. The substrate includes first and second fins separated by an insulating region. The first stack of semiconductor nanosheets is disposed on the first fin. The second stack of semiconductor nanosheets disposed on the second fin. The gate structure wraps the first and second stacks of semiconductor nanosheets. The first strained layer is disposed on the first fin adjacent to the first stack of semiconductor nanosheets. The second strained layer is disposed on the second fin adjacent to the second stack of semiconductor nanosheets. The blocking wall is disposed on the insulating region and located between the first and second strained layers. The top surface of the blocking wall is higher than the top surface of the first strained layer or the second strained layer.

Abstract: An integrated circuit includes a nanostructure transistor including a plurality of first semiconductor nanostructures over a substrate and a source/drain region in contact with each of the semiconductor nanostructures. The integrated circuit includes a fin sidewall spacer laterally bounding a lower portion of the source/drain region. The integrated circuit also includes a bottom isolation structure electrically isolating the source/drain region from the semiconductor substrate.

Abstract: Examples of an integrated circuit with an interconnect structure that includes a buried interconnect conductor and a method for forming the integrated circuit are provided herein. In some examples, the method includes receiving a substrate that includes a plurality of fins extending from a remainder of the substrate. A spacer layer is formed between the plurality of fins, and a buried interconnect conductor is formed on the spacer layer between the plurality of fins. A set of capping layers is formed on the buried interconnect conductor between the plurality of fins. A contact recess is etched through the set of capping layers that exposes the buried interconnect conductor, and a contact is formed in the contact recess that is electrically coupled to the buried interconnect conductor.

Abstract: A semiconductor device and a method of forming the same are provided. A semiconductor device according to the present disclosure includes a first source/drain feature, a second source/drain feature, a first semiconductor channel member and a second semiconductor channel member extending between the first and second source/drain features, and a first dielectric feature and a second dielectric feature each including a first dielectric layer and a second dielectric layer different from the first dielectric layer. The first and second dielectric features are sandwiched between the first and second semiconductor channel members.

Abstract: A method of fabricating a device includes forming a dummy gate over a plurality of fins. Thereafter, a first portion of the dummy gate is removed to form a first trench that exposes a first hybrid fin and a first part of a second hybrid fin. The method further includes filling the first trench with a dielectric material disposed over the first hybrid fin and over the first part of the second hybrid fin. Thereafter, a second portion of the dummy gate is removed to form a second trench and the second trench is filled with a metal layer. The method further includes etching-back the metal layer, where a first plane defined by a first top surface of the metal layer is disposed beneath a second plane defined by a second top surface of a second part of the second hybrid fin after the etching-back the metal layer.

Abstract: Semiconductor structures and the manufacturing method thereof are disclosed. An exemplary semiconductor structure according to the present disclosure includes a substrate having a p-type well or an n-type well, a first base portion over the p-type well, a second base portion over the n-type well, a first plurality of channel members over the first base portion, a second plurality of channel members over the second base portion, an isolation feature disposed between the first base portion and the second base portion, and a deep isolation structure in the substrate disposed below the isolation feature.

Abstract: Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. For example, one or more silicon and silicon germanium stacks are utilized to form PMOS transistors comprising germanium nanostructure channels and NMOS transistors comprising silicon nanostructure channels. In an example, a first silicon and silicon germanium stack is oxidized to transform silicon to silicon oxide regions, which are removed to form germanium nanostructure channels for PMOS transistors. In another example, silicon and germanium layers within a second silicon and silicon germanium stack are removed to form silicon nanostructure channels for NMOS transistors. PMOS transistors having germanium nanostructure channels and NMOS transistors having silicon nanostructure channels are formed as part of a single fabrication process.

Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a dielectric feature comprising a first dielectric layer and a second dielectric layer, the first dielectric layer has a first sidewall and a second sidewall opposing the first sidewall, and the second dielectric layer is in contact with at least a portion of the first sidewall and at least a portion of the second sidewall. The structure also includes a first semiconductor layer adjacent the first sidewall, wherein the first semiconductor layer is in contact with the second dielectric layer. The structure further includes a first gate electrode layer surrounding at least three surfaces of the first semiconductor layer, wherein the first gate electrode layer has a surface facing the second dielectric layer, and the surface extends over a plane defined by an interface between the second dielectric layer and the first semiconductor layer.

Abstract: According to one example, a semiconductor device includes a substrate and a fin stack that includes a plurality of nanostructures, a gate device surrounding each of the nanostructures, and inner spacers along the gate device and between the nanostructures. A width of the inner spacers differs between different layers of the fin stack.

Abstract: An integrated circuit includes a first nanosheet transistor and a second nanosheet transistor on a substrate. The first and second nanosheet each include gate electrodes. A gate isolation structure extends from a backside of the substrate between the gate electrodes. The gate isolation structure physically and electrically isolates the first and second gate electrodes from each other.

Abstract: A semiconductor device includes a first channel region disposed in a first device region over a substrate; a first gate dielectric layer disposed over the first channel region; a second gate dielectric layer disposed over the second channel region; and a gate electrode disposed over the first gate dielectric layer. The first gate dielectric layer includes a first dipole dopant and the second gate dielectric layer includes a second dipole dopant embedded therein. A boundary between the first gate dielectric layer and the second gat dielectric layer contains the first dipole dopant and the second dipole dopant.

Abstract: A semiconductor structure includes a plurality of fin structures extending along a first direction, a plurality of gate structure segments positioned along a line extending in a second direction, the second direction being orthogonal to the first direction, wherein the gate structure segments are separated by dummy fin structures. The semiconductor structure further includes a conductive layer disposed over both the gate structure segments and the dummy fin structures to electrically connect at least some of the gate structure segments, and a cut feature aligned with one of the dummy fin structures and positioned to electrically isolate gate structure segments on both sides of the one of the dummy fin structures.

Abstract: In a method of manufacturing a semiconductor device, a FET structure is formed over a substrate, which includes a plurality of semiconductor sheets vertically arranged over a bottom fin structure, a gate dielectric layer wrapping around each of the plurality of semiconductor sheets, a gate electrode disposed over the gate dielectric layer and a source/drain structure. A gate cap conductive layer is formed over the gate electrode, the bottom fin structure is replaced with a dielectric fin structure, spacers are formed on opposite sides of the dielectric fin structure, a trench is formed by etching the gate electrode using the dielectric fin and the spacers as an etching mask until the gate cap conductive layer is exposed, and the trench is filled with a first dielectric material.

Abstract: A semiconductor device and a manufacturing method thereof are provided. The method includes the following steps. A fin structure extending along a first direction and having a lower fin structure and an upper fin structure disposed over the lower fin structure is formed, the upper fin structure includes first semiconductor layers and second semiconductor layers alternately stacked. A sacrificial gate structure extending along a second direction perpendicular to the first direction is formed over the upper fin structure. Gate spacers are formed on the sacrificial gate structure. A portion of the sacrificial gate structure is removed to expose the gate spacers. Portions of the exposed gate spacers are removed to form a first gate trench with a first dimension along the first direction. The rest of the sacrificial gate structure is removed to form a second gate trench with a second dimension along the first direction under the first gate trench, wherein the first dimension is greater than the second dimension.

Abstract: A device includes a channel layer, a gate structure, a first source/drain epitaxial structure, a second source/drain epitaxial structure, and a sidewall spacer. The channel layer is over a substrate. The gate structure wraps around the channel layer. The first source/drain epitaxial structure and the second source/drain epitaxial structure are on opposite sides of the channel layer. The sidewall spacer is on a sidewall of the first source/drain epitaxial structure and includes a first dielectric layer and a second dielectric layer over the first dielectric layer and in contact with first source/drain epitaxial structure. The first dielectric layer and the second dielectric layer include different materials.

Abstract: A semiconductor having a first gate-all-around (GAA) transistor, a second GAA transistor, and a third GAA transistor is provided. The first (GAA) transistor includes a first plurality of channel members, a gate dielectric layer over the first plurality of channel members, a first work function layer over the gate dielectric layer, and a glue layer over the first work function layer. The second GAA transistor include a second plurality of channel members, the gate dielectric layer over the second plurality of channel members, and a second work function layer over the gate dielectric layer, the first work function layer over and in contact with the second work function layer, and the glue layer over the first work function layer. The third GAA transistor includes a third plurality of channel members, the gate dielectric layer over the third plurality of channel members, and the glue layer over the gate dielectric layer.

Abstract: The present disclosure provides a semiconductor structure that includes a substrate having a frontside and a backside; an active region extruded from the substrate and surrounded by an isolation feature; a gate stack formed on the front side of the substrate and disposed on the active region; a first and a second source/drain (S/D) feature formed on the active region and interposed by the gate stack; a frontside contact feature disposed on a top surface of the first S/D feature; a backside contact feature disposed on and electrically connected to a bottom surface of the second S/D feature; and a semiconductor layer disposed on a bottom surface of the first S/D feature with a first thickness and a bottom surface of the gate stack with a second thickness being greater than the first thickness.