Abstract: The present disclosure provides an apparatus for fabricating a semiconductor structure, including a chuck, an edge ring surrounding the chuck, wherein the edge ring comprises a cavity, a focus ring adjacent to an edge of the chuck and over the edge ring, and a first actuator in the cavity of the edge ring and engaging with the focus ring.

Abstract: A magnetorheological support method for blisk processing is disclosed. In the method, a fork structure and a soft film are used to wrap magnetorheological fluid. The magnetorheological fluid is used for flow filling under certain pressure. The bulged soft film can conduct shape matching on the surface of a blisk blade. The magnetorheological fluid can be cured through magnetic field excitation, thereby ensuring the flexible support for a weak rigid component. Electric permanent magnets are symmetrically arranged at both ends of the fork structure to construct a uniform magnetic field that can realize a global excitation of magnetorheological fluid, so that the magnetorheological fluid works in a shear mode to achieve damping force controlling by magnetic field. The solid-liquid conversion of the magnetorheological fluid is controlled by an electric permanent magnet field.

Abstract: A large-panel ultrasonic on-machine scanning thickness measurement equipment and method is disclosed. A GNCMT is adopted as the measuring machine main body on which a measured large panel is clamped and conducts scanning measurement motion; a non-contact ultrasonic measurement device is installed on the spindle of the machine tool for realizing transmission and acquisition of ultrasonic signals; a coupling liquid circulation system with the functions of multi-layer filtering, flow monitoring and regulation is set up; a jet flow immersion coupling mode is adopted on the surface of the measured large panel, and micro-emulsion cutting fluid is used as compatible coupling liquid of ultrasonic on-machine thickness measurement; and the coupling liquid is recycled, purified and stably supplied circularly. The thickness measurement equipment has high multi-function integration and reliable performance.

Abstract: A method for calculating the reliability of the thermal error model of a machine tool based on deep neural network (DNN) and the Monte Carlo method, which belongs to the field of the thermal error compensation of computer numerical control (CNC) machine tools. Firstly, according to the probability distribution of the thermal parameters and thermal error model, a set of data for training the DNN is generated. Next, the DNN is constructed based on the deep belief networks (DBNs) and trained with the training data. Then, a group of random sampling data is obtained according to the probability distribution of the thermal characteristic parameters of the machine tool, and the group of random sampling is taken as the input and the output is obtained by the trained depth neural network. Finally, the reliability of the thermal error model is calculated based on the Monte Carlo method.

Abstract: A spindle thermal error compensation method which is insensitive to the disturbance of the cooling system is provided, belonging to the technical field of error compensation in numerical control machine tools. First, the spindle model coefficient identification test, based on multi-state speed variable, is performed; after which, based on the correlation analysis between temperature and thermal error, the temperature measurement point, significantly correlated with the axial thermal error of the spindle, is determined. Next, a spindle thermal error model is established, which is insensitive to the cooling system disturbance. In addition, the coefficients in the model are identified under constraint condition, according to the nonlinear quadratic programming algorithm. Finally, based on the OPC UA communication protocol, the compensation value, as calculated by the model, is input to the numerical control system, in order to realize the compensation of the spindle thermal error.

Abstract: An online geometric/thermal error measurement and compensation system for computer numerically controlled (CNC) machine tools belonging to the technical field of error testing and compensation of CNC machine tools. The online CNC machine tool geometric/thermal error measurement and compensation system includes two parts: the hardware platform and the measurement and compensation software. The hardware platform includes a unidirectional acceleration sensor, a precision integrated circuit (IC) temperature sensor, a multi-channel temperature data collector, and a geometric/thermal error measurement and compensation host. The error measurement and compensation software runs in the geometric/thermal error measurement and compensation host and realizes testing and compensation of geometric and thermal errors in machine tools, which are communicated to the FANUC CNC system.

Abstract: A self-adaptive compensation method for feed axis thermal error, which belongs to the field of error compensation in NC machine tools. First, based on laser interferometer and temperature sensor, the feed axis thermal error test is carried out; following, the thermal error prediction model, based on the feed axis thermal error mechanism, is established and the thermal characteristic parameters in the model are identified, based on the thermal error test data; next, the parameter identification test is carried out, under the preload state of the nut; next, the adaptive prediction model is established, based on the thermal error prediction model, while the parameters in the measurement model are identified; finally, adaptive compensation of thermal errors is performed, based on the adaptive error prediction model, according to the generated feed axis heat.

Abstract: A method for the rapid detection of the linear axis angular error of an NC machine tool, belongs to the technical field of NC machine tool testing. Firstly, the measuring device is mounted on the linear axis. Then, the linear axis moves at three different speeds at a constant speed, and the upper measurement system automatically performs multi-channel acquisition and storage of the motion measurement's point measurement data. Then, based on the same geometric error signal, it is decomposed into the different frequency components, and the measurement angle error is filtered at the different speeds. Finally, the measurement angle errors at the three speeds after filtering are superimposed to complete the rapid measurement of the linear axis angular error of the machine tool. The measurement efficiency is high and data processing capability is strong.

Abstract: An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a trajectory correcting device attached to or embedded in the EUV collector mirror body and a trajectory correcting device to adjust the trajectory of metal from the reflective surface of the EUV collector mirror body to an opposite side of the EUV collector mirror body.

Abstract: A magnetorheological support method for blisk processing is disclosed. In the method, a fork structure and a soft film are used to wrap magnetorheological fluid. The magnetorheological fluid is used for flow filling under certain pressure. The bulged soft film can conduct shape matching on the surface of a blisk blade. The magnetorheological fluid can be cured through magnetic field excitation, thereby ensuring the flexible support for a weak rigid component. Electric permanent magnets are symmetrically arranged at both ends of the fork structure to construct a uniform magnetic field that can realize a global excitation of magnetorheological fluid, so that the magnetorheological fluid works in a shear mode to achieve damping force controlling by magnetic field. The solid-liquid conversion of the magnetorheological fluid is controlled by an electric permanent magnet field.

Abstract: The invention provides a method for modeling and compensating for the spindle's radial thermal drift error in a horizontal CNC lathe, which belongs to the field of error compensation technology of CNC machine tools. Firstly, the thermal drift error of two points in the radial direction of the spindle and the corresponding temperature of the key points are tested; then the thermal inclination angle of the spindle is obtained based on the thermal tilt deformation mechanism of the spindle, and the correlation between the thermal inclination angle and the temperature difference between the left and right sides of the spindle box is analyzed. According to the positive or negative thermal drift error of the two points that have been measured and the elongation or shortening of the spindle box on the left and right sides, the thermal deformation of the spindle is then classified and the thermal drift error model under various thermal deformation attitudes is then established.

Abstract: A comprehensive performance evaluation method for the CNC machine tools based on an improved pull-off method belongs to the technical field of performance evaluation of CNC machine tools. A linear proportional method is used to standardize the performance index data of machine tool. The entropy weight method and mean variance method are used to determine the two objective weights of each level of indicator. Based on the principle of vector A comprehensive evaluation of three-level index is obtained from the linear weighted evaluation function. Finally, a similar method was used to calculate the comprehensive evaluation of a large system layer by layer. The present invention is used for the comprehensive performance evaluation of various CNC machine tools and also for a lateral comparison of specific performance of different machine tools, providing a scientific and possible evaluation method and process for the comprehensive performance evaluation of machine tools.

Abstract: The present invention is directed to a device and method for blocking the toilet trap of a toilet for cleaning and disinfecting purposes. The device includes an inflatable member having an opening; an elongated fluid conduit having a proximal end and a distal end, the proximal end of the fluid conduit is coupled to the opening of the inflatable member; a disc coupled between the opening of the inflatable member and the proximal end of the fluid conduit; and a pump assembly coupled to the distal end of the elongated fluid conduit, wherein the inflatable member, the elongated fluid conduit, and the pump assembly are in fluid communication, the pump assembly comprises a fluid pump for pumping fluid under pressure and a release valve for releasing the fluid under pressure.

Abstract: The present invention provides a method for determining the real-time thermal deformation attitude of the spindle and it belongs to the technical field of error testing of the CNC machine tools. Firstly, the temperature and the displacement sensors are applied to determine the temperature of the upper and lower surfaces of the spindle box and the radial thermal error of the running spindle, respectively. Then, the thermal variation of the upper and lower surfaces of the spindle box is calculated in accordance with the radial thermal error of the spindle. Then the model for the thermal variation and the temperature of the upper and lower surfaces of the spindle box is established. Finally, the established model is employed to determine the real-time thermal deformation attitude of the spindle, according to the real-time temperatures of the upper and lower surface of the spindle box.

Abstract: A comprehensive performance evaluation method for the CNC machine tools based on an improved pull-off method belongs to the technical field of performance evaluation of CNC machine tools. A linear proportional method is used to standardize the performance index data of machine tool. The entropy weight method and mean variance method are used to determine the two objective weights of each level of indicator. Based on the principle of vector A comprehensive evaluation of three-level index is obtained from the linear weighted evaluation function. Finally, a similar method was used to calculate the comprehensive evaluation of a large system layer by layer. The present invention is used for the comprehensive performance evaluation of various CNC machine tools and also for a lateral comparison of specific performance of different machine tools, providing a scientific and possible evaluation method and process for the comprehensive performance evaluation of machine tools.

Abstract: An application method of the thermal error-temperature loop in the spindle of a CNC machine tool. This uses a bar and two displacement sensors to determine radial thermal errors of the spindle. Meanwhile two temperature sensors are used to determine the temperature of the upper and lower surfaces of the spindle box. Then, the thermal error-temperature loop is drawn with the temperature difference between two temperature sensors as the abscissa and the radial thermal error of the spindle as the ordinate. Finally, the loop is employed to analyze the mechanism of the radial thermal deformation of the spindle and the thermal error level is evaluated. Since the method is based on measured data, the results of the analysis are closer to the reality, compared to those from the numerical simulations.

Abstract: A method for determining the preload value of the screw based on thermal error and temperature rise weighting. Firstly, thermal behavior test of the feed shaft under typical working conditions is carried out to obtain the maximum thermal error and the temperature rise at the key measuring points in each preloaded state. Then, a mathematical model of the preload value of the screw and the maximum thermal error is established; meanwhile, another mathematical model of the preload value of the screw and the temperature rise at the key measuring points is also established. Finally, the optimal preload value of the screw is obtained. The thermal error of the feed shaft and the temperature rise of the moving components are comprehensively considered, improving the processing accuracy and accuracy stability of the machine tool, and ensuring the service life of the moving components such as bearings.

Abstract: A reliability evaluation method for CNC machine tools based on Bayes and fault tree, belongs to the technical field of reliability evaluation for CNC machine tools. First, the CNC machine tool is regarded as a system composed of subsystems, and the subsystem fault data of the same production batch is used as the prior information. Next, the joint probability density function of the failure rate of each failure subsystem is used as the likelihood function of the field data, and the logarithmic inverse Gamma distribution is used as the conjugate prior distribution of the reliability. Based on this, the joint prior distribution probability density function of Weibull distribution size and shape parameters is determined Finally, the fault tree model is established. This can increase the sample size of the prior information, eliminate the complicated sample compatibility test, and ensure the compatibility of the prior information.

Abstract: A method for controlling the IoT devices and an IoT system using the same are provided. The IoT devices includes a trigger device and a functional device. A managing software is executable on a client device. First, a credential is sent to the client from the functional device. Second, a script is received at the trigger device. The script includes the credential, at least one supported command, and at least one supported event. The script is generated at the managing software. The supported command is recognizable to the functional device. When the supported event is triggered at the trigger device, the supported command from the trigger device is received at the functional device. Then, a function of the functional device is performed based on the command, which increases the convenience of operating the system. The trigger device need not recognize the command, which increases the flexibility of the system.

Abstract: A projector and a projection method that effectively protect a to-be-protected object existing in a sensing area are provided. The projector includes a first sensor, a second sensor, an optical engine and a processor. The optical engine includes a light source. The first sensor receives a first sensed signal, generates a first signal corresponding to the first sensed signal and transmits the first signal to the processor. The second sensor receives a second sensed signal different from the first sensed signal, generates a second signal corresponding to the second sensed signal and transmits the second signal to the processor. The processor determines whether the first signal and the second signal fall into their respective pre-determined ranges. The processor transmits a light adjusting signal to control a light source.