Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. The photolithography system senses contamination of a collector mirror by the tin droplets and adjusts the flow of a buffer fluid to reduce the contamination.

Abstract: An online geometric/thermal error measurement and compensation system for computer numerically controlled (CNC) machine tools belonging to the technical field of error testing and compensation of CNC machine tools. The online CNC machine tool geometric/thermal error measurement and compensation system includes two parts: the hardware platform and the measurement and compensation software. The hardware platform includes a unidirectional acceleration sensor, a precision integrated circuit (IC) temperature sensor, a multi-channel temperature data collector, and a geometric/thermal error measurement and compensation host. The error measurement and compensation software runs in the geometric/thermal error measurement and compensation host and realizes testing and compensation of geometric and thermal errors in machine tools, which are communicated to the FANUC CNC system.

Abstract: A method for determining the preload value of the screw based on thermal error and temperature rise weighting. Firstly, thermal behavior test of the feed shaft under typical working conditions is carried out to obtain the maximum thermal error and the temperature rise at the key measuring points in each preloaded state. Then, a mathematical model of the preload value of the screw and the maximum thermal error is established; meanwhile, another mathematical model of the preload value of the screw and the temperature rise at the key measuring points is also established. Finally, the optimal preload value of the screw is obtained. The thermal error of the feed shaft and the temperature rise of the moving components are comprehensively considered, improving the processing accuracy and accuracy stability of the machine tool, and ensuring the service life of the moving components such as bearings.

Abstract: The present disclosure provides an apparatus for fabricating a semiconductor structure, including a chuck, an edge ring surrounding the chuck, wherein the edge ring comprises a cavity, a focus ring adjacent to an edge of the chuck and over the edge ring, and a first actuator in the cavity of the edge ring and engaging with the focus ring.

Abstract: An apparatus includes a casing configured to be detachably mounted on a workpiece. The casing includes a first opening configured to expose a portion of the workpiece; a first support member coupled to the casing and constructed to move along a first axis through the casing and rotate around the first axis; a second support member coupled to the first support member and constructed to move along a second axis perpendicular to the first axis; an arm pivotally coupled to the second support member and constructed to rotate around a third axis perpendicular to the first axis and the second axis; and a cleaning head attached to the arm and constructed to rotate around a longitudinal axis of the arm. The casing includes a first plate and a second plate opposite to the first plate, wherein the cleaning head is configured to extend outside the casing through the first opening.

Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. The photolithography system senses contamination of a collector mirror by the tin droplets and adjusts the flow of a buffer fluid to reduce the contamination.

Abstract: The present invention relates to a slanting-bed feed processing machine tool of a large propeller. The machine tool comprises a slanting column feed bed, a machine tool spindle, a workpiece rotary worktable, a large propeller and a bed feed mechanism. The present invention coordinates the geometrical relationship between the machine tool and the large propeller to ensure that the slanting column feed bed moves between two blades, thereby reducing the overhang length of the spindle. Different forms of workpiece rotary worktables and bed feed mechanisms are selected according to different slanting column feed beds. Four types of slanting column feed beds are designed, which can be selected, optimized and applied for different processing objects. The present invention enhances the processing stiffness of the spindle and solves the problem of poor processing quality of the large propeller caused by machine tool vibration.

Abstract: A magnetic-induced stiffness changed soft robot drive module includes magnetic-induced stiffness changed layer, two-degree-of-freedom pneumatic driver, magnetic core and sealing fixing device. The magnetic-induced stiffness changed layer and two-degree-of-freedom pneumatic driver are printed and formed. The magnetic core can be deformed together with the driver, and a magnetic field can be generated when it is energized. After the magnetic core is installed into the two-degree-of-freedom pneumatic driver, then assembled with the sealing fixing device, a soft robot drive module with one end fixed is finished. The magnetic-induced stiffness changed layer has the fast, reversible and controllable stiffness adjustment ability under the action of electromagnetic field.

Abstract: The invention provides a dynamic seal test device for cryogenic fluid medium. The dynamic seal test device includes stator unit, rotor unit, slipway, servo motor unit and sensors. The tested seal is installed inside the stator, and the thermal insulation stator and vacuum rotor together form a dynamic seal test structure. The seals and shaft sleeves can be flexibly replaced, which is beneficial to study the influence of different seal types, structure, and seal land configurations on the sealing performance. The servo motor provides power for the rotor and controls the rotation speed. The device greatly improves the thermal insulation capacity to avoid the gasification for the cryogenic fluid medium induced by the heat transfer from environment so that ensuring the stability of the test device.

Abstract: A projector and a projection method that effectively protect a to-be-protected object existing in a sensing area are provided. The projector includes a first sensor, a second sensor, an optical engine and a processor. The optical engine includes a light source. The first sensor receives a first sensed signal, generates a first signal corresponding to the first sensed signal and transmits the first signal to the processor. The second sensor receives a second sensed signal different from the first sensed signal, generates a second signal corresponding to the second sensed signal and transmits the second signal to the processor. The processor determines whether the first signal and the second signal fall into their respective pre-determined ranges. The processor transmits a light adjusting signal to control a light source.

Abstract: An apparatus includes a first support member coupled to a casing and constructed to move along a first axis through the casing and rotate around the first axis, a second support member coupled to the first support member and constructed to move along a second axis perpendicular to the first axis, and an arm pivotally coupled to the second support member and constructed to rotate around a third axis perpendicular to the first axis and the second axis. The apparatus also includes a cleaning head attached to the arm and constructed to rotate around a longitudinal axis of the arm.

Abstract: A spindle thermal error compensation method which is insensitive to the disturbance of the cooling system is provided, belonging to the technical field of error compensation in numerical control machine tools. First, the spindle model coefficient identification test, based on multi-state speed variable, is performed; after which, based on the correlation analysis between temperature and thermal error, the temperature measurement point, significantly correlated with the axial thermal error of the spindle, is determined. Next, a spindle thermal error model is established, which is insensitive to the cooling system disturbance. In addition, the coefficients in the model are identified under constraint condition, according to the nonlinear quadratic programming algorithm. Finally, based on the OPC UA communication protocol, the compensation value, as calculated by the model, is input to the numerical control system, in order to realize the compensation of the spindle thermal error.

Abstract: A self-adaptive compensation method for feed axis thermal error, which belongs to the field of error compensation in NC machine tools. First, based on laser interferometer and temperature sensor, the feed axis thermal error test is carried out; following, the thermal error prediction model, based on the feed axis thermal error mechanism, is established and the thermal characteristic parameters in the model are identified, based on the thermal error test data; next, the parameter identification test is carried out, under the preload state of the nut; next, the adaptive prediction model is established, based on the thermal error prediction model, while the parameters in the measurement model are identified; finally, adaptive compensation of thermal errors is performed, based on the adaptive error prediction model, according to the generated feed axis heat.

Abstract: A large-panel ultrasonic on-machine scanning thickness measurement equipment and method is disclosed. A GNCMT is adopted as the measuring machine main body on which a measured large panel is clamped and conducts scanning measurement motion; a non-contact ultrasonic measurement device is installed on the spindle of the machine tool for realizing transmission and acquisition of ultrasonic signals; a coupling liquid circulation system with the functions of multi-layer filtering, flow monitoring and regulation is set up; a jet flow immersion coupling mode is adopted on the surface of the measured large panel, and micro-emulsion cutting fluid is used as compatible coupling liquid of ultrasonic on-machine thickness measurement; and the coupling liquid is recycled, purified and stably supplied circularly. The thickness measurement equipment has high multi-function integration and reliable performance.

Abstract: A magnetic-induced stiffness changed soft robot drive module includes magnetic-induced stiffness changed layer, two-degree-of-freedom pneumatic driver, magnetic core and sealing fixing device. The magnetic-induced stiffness changed layer and two-degree-of-freedom pneumatic driver are printed and formed. The magnetic core can be deformed together with the driver, and a magnetic field can be generated when it is energized. After the magnetic core is installed into the two-degree-of-freedom pneumatic driver, then assembled with the sealing fixing device, a soft robot drive module with one end fixed is finished. The magnetic-induced stiffness changed layer has the fast, reversible and controllable stiffness adjustment ability under the action of electromagnetic field.

Abstract: A prediction method of part surface roughness and tool wear based on multi-task learning belong to the file of machining technology. Firstly, the vibration signals in the machining process are collected; next, the part surface roughness and tool wear are measured, and the measured results are corresponding to the vibration signals respectively; secondly, the samples are expanded, the features are extracted and normalized; then, a multi-task prediction model based on deep belief networks (DBN) is constructed, and the part surface roughness and tool wear are taken as the output of the model, and the features are extracted as the input to establish the multi-task DBN prediction model; finally, the vibration signals are input into the multi-task prediction model to predict the surface roughness and tool wear.

Abstract: In some embodiments, the present application provides a method for manufacture a memory device. The method includes forming a multilayer stack including a first magnetic layer and a first dielectric layer and forming another magnetic layer. The multilayer stack and the another magnetic layer are tailored to meet dimensions of a package structure. The package structure includes a chip having a memory cell and an insulating material enveloping the chip, where an outer surface of the package structure comprises the insulating material. The tailored multilayer stack and the tailored another magnetic layer are attached to the outer surface of the package structure.

Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. The photolithography system senses contamination of a collector mirror by the tin droplets and adjusts the flow of a buffer fluid to reduce the contamination.

Abstract: The invention provides a tool holder suitable for cryogenic minimum quantity lubrication, which belongs to the technical field of cooling and lubrication of numerical control machine tools. The device comprises a toolholder body, a peripheral static structure, a multilayer sealing structure, a heat insulation structure, and a bearing support structure. The invention solves the problems of insufficient cooling performance in the micro-lubrication technology and insufficient lubrication in the cryogenic cooling machining technology, and integrates the oxygen insulation protection effect of the cryogenic medium, the cooling effect of the cryogenic medium, and the friction reduction and lubrication effect of the micro-lubrication. It has a good processing effect on difficult-to-cut materials.

Abstract: In some embodiments, the present application provides a memory device. The memory device includes a chip that includes a magnetic random access memory (MRAM) cell. A magnetic-field-shielding structure comprised of conductive or magnetic material at least partially surrounds the chip. The magnetic-field-shielding structure comprises a sidewall region that laterally surrounds the chip, an upper region extending upward from the sidewall region, and a lower region extending downward from the sidewall region. At least one of the upper region and/or lower region terminate at an opening over the chip.