Abstract: Disclosed are a substrate processing apparatus that allow a chemical liquid to penetrate deeply into a gap between patterns of a substrate. The substrate processing apparatus includes a housing having a processing space defined therein in which a substrate is processed; a substrate support installed in the processing space so as to be rotatable about a rotation axis and configured to support the substrate; a chemical liquid supply disposed on top of the substrate support and configured to spray a chemical liquid toward an upper surface of the substrate supported on the substrate support; and a controller configured to repeatedly apply a first rotation control signal and a second rotation control signal indicating different rotation speeds to the substrate support so as to generate an inertial behavior of the chemical liquid coated on the substrate.

Abstract: A liquid supply apparatus is provided.

Abstract: Provided is a substrate processing apparatus and substrate processing method capable of allowing a liquid chemical to penetrate deeply into patterns of a substrate, the substrate processing apparatus including a housing for forming a treatment space where a substrate is processed, a substrate supporter mounted in the treatment space to rotate about a rotational axis, and provided to support the substrate, a liquid chemical supplier provided above the substrate supporter to eject a liquid chemical toward an upper surface of the substrate supported by the substrate supporter, and an ejector provided at a side of the treatment space to eject a heat transfer medium with a temperature different from the temperature of the liquid chemical onto the substrate.

Abstract: Disclosed are a substrate processing apparatus and a substrate processing method that allow a chemical liquid to penetrate deeply into a gap between patterns of a substrate. The substrate processing apparatus includes a chamber having a processing space defined therein in which a substrate is processed; a chuck installed in the processing space and configured to support the substrate thereon; a chemical liquid supply formed on top of the chuck and configured to supply a chemical liquid droplet toward an upper surface of the substrate supported on the chuck; and a pressurizer formed on top of the chuck and configured to pressurize the chemical liquid droplet supplied on the upper surface of the substrate so that the pressed chemical liquid droplet fills a gap between patterns formed on the substrate.

Abstract: A pipe register includes: a plurality of register units configured to output data in response to control signals; and a pipe control circuit configured to generate a reference timing signal by dividing a clock signal, the clock signal activated during an activation time of a read enable signal, and generate the control signals based on the read enable signal and the reference timing signal.

Abstract: The present invention relates to novel mesylate salt of N-(5-(4-(4-((dimethylamino)methyl)-3-phenyl-1H-pyrazol-1-yl)pyrimidine-2-ylamino)-4-methoxy-2-morpholinophenyl)acrylamide, a novel crystalline form thereof, and a process for preparing the same. More specifically, the present invention relates to mesylate salt of N-(5-(4-(4-((dimethylamino)methyl)-3-phenyl-1H-pyrazol-1-yl)pyrimidine-2-ylamino)-4-methoxy-2-morpholinophenyl)acrylamide, which is excellent in stability, solubility, and bioavailability when it is administered not only alone but also in combination with other drugs and which has a high purity, a crystalline form thereof, and a process for preparing the same.

Abstract: One exemplary embodiment of the present invention relates to a thermal management fluid module for a vehicle using a circulating fluid such as a refrigerant or a coolant, the thermal management fluid module including a manifold plate in which a plurality of fluid flow channels are formed, and a thermal interference avoidance unit which is coupled to the manifold plate and in which fluid flow channels having a relatively high temperature or low temperature are formed to be separated and spaced apart from other fluid flow channels among the fluid flow channels.

Abstract: Disclosed are a rechargeable lithium battery, and a negative electrode for a rechargeable lithium battery, the rechargeable lithium battery including a positive electrode, a negative electrode, a separator between the positive electrode and the negative electrode, and an electrolyte, wherein the negative electrode includes a negative electrode current collector and a negative electrode active material layer on the negative electrode current collector, the negative electrode active material layer includes a carbon material capable of intercalating and deintercalating lithium as a negative electrode active material, the negative electrode further includes a lithiophilic element on the surface of the negative electrode current collector and/or inside the negative electrode active material layer, the lithiophilic element includes one or more elements selected from Al, Ag, Au, Bi, In, Mg, Pd, Pt, Si, Sn, and Zn, the negative electrode is one in which lithium is electrodeposited between the negative electrode curre

Abstract: A vehicular air conditioning system includes: an intake part including an intake door configured to open an outdoor air inlet to introduce an outdoor air in an outdoor air mode, open an indoor air inlet to introduce an indoor air in an indoor air mode, and control an opening degree of the outdoor air inlet or the indoor air inlet, and a blower configured to suck the indoor air or the outdoor air through the indoor air inlet or the outdoor air inlet and blow the indoor air or the outdoor air into a vehicle interior; and a control part configured to control a rotational speed of the blower according to an air flow rate level of the air conditioning system.

Abstract: A delay locked loop circuit includes a delay line, a phase detector, a selection controller, and a charge pump. The delay line delays, based on a delay control voltage, a reference clock signal to generate an internal clock signal and a feedback clock signal. The phase detector compares phases of the internal clock signal and the feedback clock signal to generate a first detection signal and a second detection signal. The selection controller provides the reference clock signal as an up-signal and a down-signal. The charge pump generates the delay control voltage based on the up-signal and the down-signal.

Abstract: An apparatus for image transformation for transforming a first medical image into a second medical image based on an artificial neural network technology includes a preprocessing module that receives the first medical image and second medical image obtained by photographing the same part of a body using different photographing techniques and performs preprocessing on the first and second medical images, and an artificial neural network module that receives the preprocessed first medical image and second medical image, respectively, and transforms the first medical image into a second medical image.

Abstract: The present disclosure relates to a display device and a method of driving the same, and more specifically, to a display device for preventing a user from recognizing a change in luminance when a frame frequency is changed, and a method of driving the same. A display device of the present disclosure includes a display panel including a plurality of pixel regions, a gate driver configured to sequentially supply light emission control signals to horizontal lines of the display panel, a data driver configured to supply a data signal corrected by a source voltage to the display panel, and a dimming controller configured to control whether to gradually change a frame frequency and gamma correction data according to a duty ratio of the light emission control signal.

Abstract: The inventive concept provides a substrate treating method. The substrate treating method includes supplying a dissolving solution onto a rotating substrate; and supplying, after the supplying a dissolution solution, a treating liquid including a polymer onto the rotating substrate to form a liquid film.

Abstract: A separator for a fuel cell includes a reaction region, a pair of manifold regions on opposite sides of the reaction region and through which a plurality of manifolds pass, configured to introduce or discharge reaction gas or coolant, and a pair of diffusion regions between the reaction region and the manifold regions, configured to diffuse a flow of the reaction gas or coolant. Diffusion ribs in the diffusion regions are spaced apart from each other along the manifolds. The diffusion ribs may be spaced apart such that diffusion flow fields formed between the diffusion ribs have different cross-sectional areas for respective regions at ends adjacent to the manifold regions.

Abstract: A current supply circuit according to the present disclosure may include a voltage/current converter configured to convert, into a data current, a data voltage received from a data driving circuit and a first current mirror circuit configured to mirror the data current so that a light-emitting diode (LED) current flows into an LED array. The data current may be adjusted based on a greyscale value of the LED array.

Abstract: A separator assembly for a fuel cell and a fuel cell stack including the same, is uniformly capable of forming a surface pressure of a region where a reaction gas flows when a stack is stacked by adjusting a height and shape of a gasket line for each region in which the reaction gas flows.

Abstract: A duty cycle correction circuit includes a duty correction circuit, an information generation circuit and a duty control circuit. The duty correction circuit corrects a duty rate of an input clock signal based on a duty control code to generate an output clock signal. The information generation circuit compares a difference between operation power voltages based on an operation mode to generate voltage information. The duty control circuit receives the voltage information from the information generation circuit and generates the duty control code that includes the voltage information based on a duty rate of the output clock signal.

Abstract: A tray includes a main body portion including a bottom surface portion and a sidewall portion; and a plurality of first guide portions disposed on the bottom surface portion and arranged to be spaced apart from each other in a first direction. Each of the first guide portions includes a first main protruding portion, a first sub-protruding portion which protrudes from the first main protruding portion in the first direction, and a second sub-protruding portion which protrudes from the first main protruding portion in a direction opposite to the first direction, and the first sub-protruding portion and the second sub-protruding portion are alternately arranged in a direction the first main protruding portion extends.

Abstract: The present invention relates to a beam shaping device for a boron neutron capture therapy apparatus and the boron neutron capture therapy apparatus comprising same allowing a user to select the number of filter modules in advance before neutron generation and arrange same. According to the present invention, it is possible to improve a therapeutic effect and minimize side effects during boron neutron capture therapy.