Abstract: A method for removing defects due to edge chips of a semiconductor wafer is disclosed. This method includes forming a molding layer over a semiconductor wafer. The molding layer is patterned to form a plurality of storage node holes, where the plurality of storage node holes include at least one first storage node hole formed on an effective chip area and at least one second storage node hole formed on an edge chip area. First storage nodes and second storage nodes are formed in the first and second storage node holes, respectively. A photoresist pattern is formed on the wafer having the storage nodes. The photoresist pattern is preferably formed to expose the effective chip areas and to cover the edge chip areas. The molding layer is etched, using the photoresist pattern as an etching mask, to expose portions of the first storage nodes.

Abstract: A tilting device is disclosed. The tilting device may include: a base; a guide, of which one side is hinge-coupled to the base; a jointed link, in which a joint is formed, and of which either end is hinge-coupled respectively to the base and to the other side of the guide, to thereby allow the guide to tilt; a leadscrew engaging the joint; and a driving unit configured to drive the leadscrew. With this configuration, the tilting device may be implemented in a compact structure using a smaller driving unit.

Abstract: A vibration type tilting device, according to an embodiment of the invention, which comprises a mirror holder, supporting a mirror on one side, which tilts together with the mirror such that the mirror periodically tilts light on a light path in a minute angle; a holder support part supporting the mirror holder; a driving part, which supplies driving power to the mirror holder; and a damping part comprising a gap adjustment member capable of changing the gap between a portion of the mirror holder and a portion of the holder support part, provides superior vibration characteristics, as the viscous fluid is not heated by the driving part.

Abstract: A tilting apparatus and rotation apparatus. The tilting apparatus may include a support member, a tilt member attachable to and detachable from a mass and hinge-coupled to the support member about a hinge shaft, and a first elastic member interposed between the support member and the tilt member that counters a gravitational moment of the mass by elastically supporting the tilt member. The mass can be moved and rotated without being obstructed by the wall, while the gravitational moment of the mass can be countered, allowing the mass to be tilted with a small force, to provide benefits in terms of space utility and cost. The force provided by an elastic member can be adjusted according to the dimensions of the mass, so that a mass of various dimensions can be tilted without having to replace the elastic member, allowing the tilting apparatus to be manufactured in a modularized form.

Abstract: A vibration type tilting device, according to an embodiment of the invention, which comprises a mirror holder, supporting a mirror on one side, which tilts together with the mirror such that the mirror periodically tilts light on a light path in a minute angle; a holder support part supporting the mirror holder; a driving part, which supplies driving power to the mirror holder; and a damping part positioned between the mirror holder and the holder support part to reduce overshoot of the mirror holder, can improve the vibration performance of the tilting device to provide a smoother and clearer picture quality.

Abstract: A power transmission apparatus is disclosed. A power transmission apparatus that includes: a bracket, in which a hinge cavity is formed; a hinge axis, which is rotatably joined to the hinge cavity; a friction bearing, which is positioned between the hinge axis and an inner wall of the hinge cavity, and which is configured to provide a predetermined friction; and a gear module, which is joined to the hinge axis, and which is configured to provide a rotational force to the hinge axis, can provide sufficiently high deceleration and high torque, even when a low-capacity motor having a low cogging torque is used. Also, the power transmission apparatus can be made safer and less noisy for not only automatic operation by the motor but also manual operation by a user, while the gear module, motor, etc., can be protected from excessive loads.

Abstract: A display support apparatus, which includes: a stand including a support bar and a base; an arm, of which one end is coupled to the support bar with a lift drive part interposed, such that the arm is movable in a longitudinal direction of the support bar; a connection member, which is coupled to the other end of the arm with a first hinge part interposed, such that the connector member is rotatable in a direction intersecting a direction of gravity; and a movement member, which is coupled to the connection member with a second hinge part interposed, such that the movement member is rotatable in a direction of gravity, where a rotation drive part is coupled to each of the first hinge part and the second hinge part, can rotate the display to provide a viewing angle in correspondence with the position of the viewer.

Abstract: A display rotation apparatus includes: a support member; an arm, of which one end is coupled to the support member by way of a first hinge part interposed in-between, such that the arm is rotatable in a direction intersecting a direction of gravity; a connection member, which is coupled to the other end of the arm by way of a second hinge part interposed in-between, such that the connector member is rotatable in a direction intersecting the direction of gravity; and a movement member, which is coupled to the connection member by way of a third hinge part interposed in-between, such that the movement member is rotatable in the direction of gravity, where a drive part is coupled to each of the first hinge part, the second hinge part, and the third hinge part. The apparatus can be used to automatically rotate a display.

Abstract: A display tilting apparatus and a display rotation apparatus. The display tilting apparatus, which tiltably supports a display to control an angle of the display, may include: a support member; a tilt member, which is attachable to and detachable from the display, and which is hinge-joined to the support member about a hinge axis; an elastic member, which is joined to the hinge axis, and which applies an elastic force in a direction opposing a gravitational moment of the display; and a driving unit, which is configured to provide a driving force such that the tilt member is tilted. Thus, a display can be moved and rotated without being obstructed by the wall to maintain an optimal viewing angle, while the gravitational moment of the display can be mitigated so that the display can be tilted with a small force, allowing benefits in terms of both space and cost.

Abstract: A power transmission apparatus and a rotation apparatus are disclosed. A power transmission apparatus that includes: a power generating part, which includes a drive axis; a worm, which is joined to the drive axis; a worm gear, which meshes with the worm, and which includes an output axis configured to transmit power; and a friction hinge, which is joined to the output axis, and which is configured to engage and disengage a rotational force of the output axis, can provide sufficiently high deceleration and high torque, even when a low-capacity motor having a low cogging torque is used. Also, the power transmission apparatus can be made safer and less noisy for not only automatic operation by the motor but also manual operation by a user, while the gear module, motor, etch, can be protected from excessive loads.

Abstract: The aligning of a wafer with a reticle in photolithographic equipment is carried out using a feed forward method. In the method, a wafer is loaded onto an exposure apparatus, the wafer is aligned with a reticle, the state of alignment is measured, alignment data representative of the state of alignment is produced, and a database is searched for an alignment data type under which the alignment data falls. The database may also be searched for overlay data related to the alignment data. A correction value matched to the alignment data type is obtained. The correction value maybe calculated from the overlay data. The alignment of the wafer is corrected by applying the correction value to the alignment data. Finally, the aligned wafer is exposed.

Abstract: A display rotation apparatus and a method of joining the display rotation apparatus with a display. The display rotation apparatus, which includes a fixed body, an arm part having one end joined to the fixed body, a hinge member joined to the other end of the arm part, and a guide member rotatably joined to the hinge member, can adjust the joining point according to the center of mass of the display.

Abstract: A display rotation apparatus are disclosed. A display rotation apparatus that includes a fixed body, a first arm whose one end is coupled to the fixed body by interposing a first hinge member, a second arm whose one end is coupled to the other end of the first arm by interposing a second hinge member, a movable body coupled to the second arm, a first motor part coupled to the first hinge, and a second motor part coupled to the second hinge. This display rotation apparatus is movable (rotating and extending) automatically. And the durability of the display rotation apparatus increases by using the clutch part while manual moving.

Abstract: A display rotation apparatus and rotating method thereof are disclosed. A display rotation apparatus, interposed between a fixed body and a moving body and rotating the moving body about the fixed body, comprising plural joint parts coupled to the moving body; plural arm parts, one end coupled to the joint part and the other end coupled to the fixed body, comprising a link member and a hinge member configured to joint act; and a driving part, coupled to the hinge member, rotating the arm part can rotate the display in variable directions.

Abstract: The present invention relates to a display extension unit. The display extension unit includes a fixed body, a link portion having one end coupled to the fixed body; a movable body coupled to the other end of the link portion, and a driving part coupled to the joining point of the link portion, where the driving part includes a motor unit and a rotary part coupled to the driving shaft of the motor unit, with the rotary part including a clutch coupled to the driving shaft and a driven shaft positioned in contact with the clutch, and where the driving force of the motor unit is smaller than the frictional force between the driven shaft and the clutch.

Abstract: A display rotation and extension apparatus and a control method thereof are disclosed.

Abstract: The present invention relates to a display rotation apparatus. The present invention provides a display rotation apparatus, including a support, a universal joint coupled to the support, a movable body coupled to the universal joint, a driving part coupled to the movable body for rotating the movable body about the universal joint.

Abstract: A display rotating apparatus capable of preventing a slip phenomenon which occurs by rotary inertia. The display rotating apparatus comprises: a motor providing a driving force for rotating a display; and a motor driving device driving to rotate and stop gradually by increasing a rising time and a falling time of a rotation command signal. the display rotating apparatus can remove the slip phenomenon generated mechanically by increasing or decreasing slowly an applying voltage and/or current applied to the motor and reduce the sway by vibration at the time of stopping the display.

Abstract: The present invention is to provide a rotation apparatus of a display preventing the damage of the deceleration gear and the rotor of the motor. In one aspect, the invention features a rotation apparatus of a display, which comprises a stand, a guide joined to the stand rotatably and configured to support the display, a motor fixed to the stand and configured to have a shaft, a rotation transfer member joined to the shaft and configured to have transfer the rotational force of the motor selectively, wherein the rotation transfer member makes the rotational force of the motor is transferred to the guide at the time of automatic rotation.

Abstract: The present invention is to provide a motor having a swivel hinge preventing the damage of the deceleration gear and the rotor of the motor, and the rotation apparatus of a display having the same. In one aspect, the invention features a rotation apparatus of a display, which comprises a stand, a swivel hinge having one end fixed to the stand and configured to rotate relatively when a predetermined amount of torque is applied, a motor joined to the other end of the swivel hinge by a shaft and having a deceleration gear, and a guide configured to rotates as a single body with the motor and joined to a display, wherein the restrictive torque of the swivel hinge is smaller than the constraint force of the deceleration gear and greater than the weigh of the display.