Patents by Inventor Kyu S. Min
Kyu S. Min has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11257838Abstract: Methods and devices are disclosed, such as those involving memory cell devices with improved charge retention characteristics. In one or more embodiments, a memory cell is provided having an active area defined by sidewalls of neighboring trenches. A layer of dielectric material is blanket deposited over the memory cell, and etched to form spacers on sidewalls of the active area. Dielectric material is formed over the active area, a charge trapping structure is formed over the dielectric material over the active area, and a control gate is formed over the charge trapping structure. In some embodiments, the charge trapping structure includes nanodots. In some embodiments, the width of the spacers is between about 130% and about 170% of the thickness of the dielectric material separating the charge trapping material and an upper surface of the active area.Type: GrantFiled: February 27, 2020Date of Patent: February 22, 2022Assignee: Micron Technology, Inc.Inventors: Ronald A. Weimer, Kyu S. Min, Thomas M. Graettinger, Durai Vishak Nirmal Ramaswamy
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Publication number: 20200203360Abstract: Methods and devices are disclosed, such as those involving memory cell devices with improved charge retention characteristics. In one or more embodiments, a memory cell is provided having an active area defined by sidewalls of neighboring trenches. A layer of dielectric material is blanket deposited over the memory cell, and etched to form spacers on sidewalls of the active area. Dielectric material is formed over the active area, a charge trapping structure is formed over the dielectric material over the active area, and a control gate is formed over the charge trapping structure. In some embodiments, the charge trapping structure includes nanodots. In some embodiments, the width of the spacers is between about 130% and about 170% of the thickness of the dielectric material separating the charge trapping material and an upper surface of the active area.Type: ApplicationFiled: February 27, 2020Publication date: June 25, 2020Applicant: Micron Technology, Inc.Inventors: Ronald A. Weimer, Kyu S. Min, Thomas M. Graettinger, Durai Vishak Nirmal Ramaswamy
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Patent number: 10608005Abstract: Methods and devices are disclosed, such as those involving memory cell devices with improved charge retention characteristics. In one or more embodiments, a memory cell is provided having an active area defined by sidewalls of neighboring trenches. A layer of dielectric material is blanket deposited over the memory cell, and etched to form spacers on sidewalls of the active area. Dielectric material is formed over the active area, a charge trapping structure is formed over the dielectric material over the active area, and a control gate is formed over the charge trapping structure. In some embodiments, the charge trapping structure includes nanodots. In some embodiments, the width of the spacers is between about 130% and about 170% of the thickness of the dielectric material separating the charge trapping material and an upper surface of the active area.Type: GrantFiled: February 3, 2014Date of Patent: March 31, 2020Assignee: Micron Technology, Inc.Inventors: Ronald A. Weimer, Kyu S. Min, Thomas M. Graettinger, Durai Vishak Nirmal Ramaswamy
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Patent number: 9059301Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.Type: GrantFiled: May 1, 2014Date of Patent: June 16, 2015Assignee: Intel CorporationInventor: Kyu S. Min
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Patent number: 8900946Abstract: Nanocrystal structures formed using atomic layer deposition (ALD) processes are useful in the formation of integrated circuits such as memory devices. Rather than continuing the ALD process until a continuous layer is formed, the ALD process is halted prematurely to leave a discontinuous formation of nanocrystals which are then capped by a different material, thus forming a layer with a discontinuous portion and a bulk portion. Such nanocrystals can serve as charge-storage sites within the bulk portion, and the resulting structure can serve as a floating gate of a floating-gate memory cell. A floating gate may contain one or more layers of such nanocrystal structures.Type: GrantFiled: February 3, 2014Date of Patent: December 2, 2014Assignee: Micron Technology, Inc.Inventors: Prashant Majhi, Kyu S. Min, Wilman Tsai
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Publication number: 20140239369Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.Type: ApplicationFiled: May 1, 2014Publication date: August 28, 2014Inventor: Kyu S. Min
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Patent number: 8748264Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.Type: GrantFiled: March 30, 2007Date of Patent: June 10, 2014Assignee: Intel CorporationInventor: Kyu S. Min
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Publication number: 20140148002Abstract: Nanocrystal structures formed using atomic layer deposition (ALD) processes are useful in the formation of integrated circuits such as memory devices. Rather than continuing the ALD process until a continuous layer is formed, the ALD process is halted prematurely to leave a discontinuous formation of nanocrystals which are then capped by a different material, thus forming a layer with a discontinuous portion and a bulk portion. Such nanocrystals can serve as charge-storage sites within the bulk portion, and the resulting structure can serve as a floating gate of a floating-gate memory cell. A floating gate may contain one or more layers of such nanocrystal structures.Type: ApplicationFiled: February 3, 2014Publication date: May 29, 2014Applicant: Micron Technology, Inc.Inventors: Prashant MAJHI, Kyu S. MIN, Wilman TSAI
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Patent number: 8729704Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.Type: GrantFiled: September 27, 2013Date of Patent: May 20, 2014Assignee: Intel CorporationInventor: Kyu S. Min
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Publication number: 20140091429Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.Type: ApplicationFiled: September 27, 2013Publication date: April 3, 2014Inventor: Kyu S. Min
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Patent number: 8643079Abstract: Nanocrystal structures formed using atomic layer deposition (ALD) processes are useful in the formation of integrated circuits such as memory devices. Rather than continuing the ALD process until a continuous layer is formed, the ALD process is halted prematurely to leave a discontinuous formation of nanocrystals which are then capped by a different material, thus forming a layer with a discontinuous portion and a bulk portion. Such nanocrystals can serve as charge-storage sites within the bulk portion, and the resulting structure can serve as a floating gate of a floating-gate memory cell. A floating gate may contain one or more layers of such nanocrystal structures.Type: GrantFiled: May 5, 2008Date of Patent: February 4, 2014Assignee: Micron Technology, Inc.Inventors: Prashant Majhi, Kyu S. Min, Wilman Tsai
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Patent number: 8546944Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.Type: GrantFiled: December 22, 2010Date of Patent: October 1, 2013Assignee: Intel CorporationInventor: Kyu S. Min
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Patent number: 8228743Abstract: Some embodiments include memory cells having vertically-stacked charge-trapping zones spaced from one another by dielectric material. The dielectric material may comprise high-k material. One or more of the charge-trapping zones may comprise metallic material. Such metallic material may be present as a plurality of discrete isolated islands, such as nanodots. Some embodiments include methods of forming memory cells in which two charge-trapping zones are formed over tunnel dielectric, with the zones being vertically displaced relative to one another, and with the zone closest to the tunnel dielectric having deeper traps than the other zone. Some embodiments include electronic systems comprising memory cells. Some embodiments include methods of programming memory cells having vertically-stacked charge-trapping zones.Type: GrantFiled: February 10, 2011Date of Patent: July 24, 2012Assignee: Micron Technology, Inc.Inventors: Kyu S. Min, Rhett T. Brewer, Tejas Krishnamohan, Thomas M. Graettinger, D. V. Nirmal Ramaswamy, Ronald A Weimer, Arup Bhattacharyya
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Publication number: 20120161318Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.Type: ApplicationFiled: December 22, 2010Publication date: June 28, 2012Inventor: Kyu S. Min
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Patent number: 8183110Abstract: Some embodiments include memory cells. The memory cells may include a tunnel dielectric material, a charge-retaining region over the tunnel dielectric material, crystalline ultra-high k dielectric material over the charge-retaining region, and a control gate material over the crystalline ultra-high k dielectric material. Additionally, the memory cells may include an amorphous region between the charge-retaining region and the crystalline ultra-high k dielectric material, and/or may include an amorphous region between the crystalline ultra-high k dielectric material and the control gate material. Some embodiments include methods of forming memory cells which contain an amorphous region between a charge-retaining region and a crystalline ultra-high k dielectric material, and/or which contain an amorphous region between a crystalline ultra-high k dielectric material and a control gate material.Type: GrantFiled: May 26, 2011Date of Patent: May 22, 2012Assignee: Micron Technology, Inc.Inventors: D. V. Nirmal Ramaswamy, Noel Rocklein, Kyu S. Min
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Publication number: 20110220989Abstract: Some embodiments include memory cells. The memory cells may include a tunnel dielectric material, a charge-retaining region over the tunnel dielectric material, crystalline ultra-high k dielectric material over the charge-retaining region, and a control gate material over the crystalline ultra-high k dielectric material. Additionally, the memory cells may include an amorphous region between the charge-retaining region and the crystalline ultra-high k dielectric material, and/or may include an amorphous region between the crystalline ultra-high k dielectric material and the control gate material. Some embodiments include methods of forming memory cells which contain an amorphous region between a charge-retaining region and a crystalline ultra-high k dielectric material, and/or which contain an amorphous region between a crystalline ultra-high k dielectric material and a control gate material.Type: ApplicationFiled: May 26, 2011Publication date: September 15, 2011Applicant: MICRON TECHNOLOGY, INC.Inventors: D. V. Nirmal Ramaswamy, Noel Rocklein, Kyu S. Min
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Patent number: 7968406Abstract: Some embodiments include memory cells. The memory cells may include a tunnel dielectric material, a charge-retaining region over the tunnel dielectric material, crystalline ultra-high k dielectric material over the charge-retaining region, and a control gate material over the crystalline ultra-high k dielectric material. Additionally, the memory cells may include an amorphous region between the charge-retaining region and the crystalline ultra-high k dielectric material, and/or may include an amorphous region between the crystalline ultra-high k dielectric material and the control gate material. Some embodiments include methods of forming memory cells which contain an amorphous region between a charge-retaining region and a crystalline ultra-high k dielectric material, and/or which contain an amorphous region between a crystalline ultra-high k dielectric material and a control gate material.Type: GrantFiled: January 9, 2009Date of Patent: June 28, 2011Assignee: Micron Technology, Inc.Inventors: D. V. Nirmal Ramaswamy, Noel Rocklein, Kyu S. Min
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Publication number: 20110147827Abstract: The present disclosure relates generally to the fabrication of non-volatile memory. In at least one embodiment, the present disclosure relates to forming a layered blocking dielectric which has a portion thereof removed in the wordline direction.Type: ApplicationFiled: December 23, 2009Publication date: June 23, 2011Inventors: Fatma Arzum Simsek-Ege, Sanh Tang, Nirmal Ramaswamy, Thomas M. Graettinger, Kyu S. Min, Tejas Krishnamohan, Srivardhan Gowda
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Publication number: 20110133268Abstract: Some embodiments include memory cells having vertically-stacked charge-trapping zones spaced from one another by dielectric material. The dielectric material may comprise high-k material. One or more of the charge-trapping zones may comprise metallic material. Such metallic material may be present as a plurality of discrete isolated islands, such as nanodots. Some embodiments include methods of forming memory cells in which two charge-trapping zones are formed over tunnel dielectric, with the zones being vertically displaced relative to one another, and with the zone closest to the tunnel dielectric having deeper traps than the other zone. Some embodiments include electronic systems comprising memory cells. Some embodiments include methods of programming memory cells having vertically-stacked charge-trapping zones.Type: ApplicationFiled: February 10, 2011Publication date: June 9, 2011Applicant: MICRON TECHNOLOGY, INC.Inventors: Kyu S. Min, Rhett T. Brewer, Tejas Krishnamohan, Thomas M. Graettinger, D.V. Nirmal Ramaswamy, Ronald A. Weimer, Arup Bhattacharyya
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Patent number: 7898850Abstract: Some embodiments include memory cells having vertically-stacked charge-trapping zones spaced from one another by dielectric material. The dielectric material may comprise high-k material. One or more of the charge-trapping zones may comprise metallic material. Such metallic material may be present as a plurality of discrete isolated islands, such as nanodots. Some embodiments include methods of forming memory cells in which two charge-trapping zones are formed over tunnel dielectric, with the zones being vertically displaced relative to one another, and with the zone closest to the tunnel dielectric having deeper traps than the other zone. Some embodiments include electronic systems comprising memory cells. Some embodiments include methods of programming memory cells having vertically-stacked charge-trapping zones.Type: GrantFiled: October 12, 2007Date of Patent: March 1, 2011Assignee: Micron Technology, Inc.Inventors: Kyu S. Min, Rhett T. Brewer, Tejas Krishnamohan, Thomas M. Graettinger, D. V. Nirmal Ramaswamy, Ronald A. Weimer, Arup Bhattacharyya