Patents by Inventor Kyu S. Min

Kyu S. Min has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11257838
    Abstract: Methods and devices are disclosed, such as those involving memory cell devices with improved charge retention characteristics. In one or more embodiments, a memory cell is provided having an active area defined by sidewalls of neighboring trenches. A layer of dielectric material is blanket deposited over the memory cell, and etched to form spacers on sidewalls of the active area. Dielectric material is formed over the active area, a charge trapping structure is formed over the dielectric material over the active area, and a control gate is formed over the charge trapping structure. In some embodiments, the charge trapping structure includes nanodots. In some embodiments, the width of the spacers is between about 130% and about 170% of the thickness of the dielectric material separating the charge trapping material and an upper surface of the active area.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: February 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Ronald A. Weimer, Kyu S. Min, Thomas M. Graettinger, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20200203360
    Abstract: Methods and devices are disclosed, such as those involving memory cell devices with improved charge retention characteristics. In one or more embodiments, a memory cell is provided having an active area defined by sidewalls of neighboring trenches. A layer of dielectric material is blanket deposited over the memory cell, and etched to form spacers on sidewalls of the active area. Dielectric material is formed over the active area, a charge trapping structure is formed over the dielectric material over the active area, and a control gate is formed over the charge trapping structure. In some embodiments, the charge trapping structure includes nanodots. In some embodiments, the width of the spacers is between about 130% and about 170% of the thickness of the dielectric material separating the charge trapping material and an upper surface of the active area.
    Type: Application
    Filed: February 27, 2020
    Publication date: June 25, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Ronald A. Weimer, Kyu S. Min, Thomas M. Graettinger, Durai Vishak Nirmal Ramaswamy
  • Patent number: 10608005
    Abstract: Methods and devices are disclosed, such as those involving memory cell devices with improved charge retention characteristics. In one or more embodiments, a memory cell is provided having an active area defined by sidewalls of neighboring trenches. A layer of dielectric material is blanket deposited over the memory cell, and etched to form spacers on sidewalls of the active area. Dielectric material is formed over the active area, a charge trapping structure is formed over the dielectric material over the active area, and a control gate is formed over the charge trapping structure. In some embodiments, the charge trapping structure includes nanodots. In some embodiments, the width of the spacers is between about 130% and about 170% of the thickness of the dielectric material separating the charge trapping material and an upper surface of the active area.
    Type: Grant
    Filed: February 3, 2014
    Date of Patent: March 31, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Ronald A. Weimer, Kyu S. Min, Thomas M. Graettinger, Durai Vishak Nirmal Ramaswamy
  • Patent number: 9059301
    Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.
    Type: Grant
    Filed: May 1, 2014
    Date of Patent: June 16, 2015
    Assignee: Intel Corporation
    Inventor: Kyu S. Min
  • Patent number: 8900946
    Abstract: Nanocrystal structures formed using atomic layer deposition (ALD) processes are useful in the formation of integrated circuits such as memory devices. Rather than continuing the ALD process until a continuous layer is formed, the ALD process is halted prematurely to leave a discontinuous formation of nanocrystals which are then capped by a different material, thus forming a layer with a discontinuous portion and a bulk portion. Such nanocrystals can serve as charge-storage sites within the bulk portion, and the resulting structure can serve as a floating gate of a floating-gate memory cell. A floating gate may contain one or more layers of such nanocrystal structures.
    Type: Grant
    Filed: February 3, 2014
    Date of Patent: December 2, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Prashant Majhi, Kyu S. Min, Wilman Tsai
  • Publication number: 20140239369
    Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.
    Type: Application
    Filed: May 1, 2014
    Publication date: August 28, 2014
    Inventor: Kyu S. Min
  • Patent number: 8748264
    Abstract: A discrete storage element film is disposed above a tunneling dielectric film against a shallow trench isolation structure and under conditions to resist formation of the discrete storage element film upon vertical exposures of the shallow trench isolation structure. A discrete storage element film is also disposed above a tunneling dielectric film against a recessed isolation structure. A microelectronic device incorporates the discrete storage element film. A computing system incorporates the microelectronic device.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: June 10, 2014
    Assignee: Intel Corporation
    Inventor: Kyu S. Min
  • Publication number: 20140148002
    Abstract: Nanocrystal structures formed using atomic layer deposition (ALD) processes are useful in the formation of integrated circuits such as memory devices. Rather than continuing the ALD process until a continuous layer is formed, the ALD process is halted prematurely to leave a discontinuous formation of nanocrystals which are then capped by a different material, thus forming a layer with a discontinuous portion and a bulk portion. Such nanocrystals can serve as charge-storage sites within the bulk portion, and the resulting structure can serve as a floating gate of a floating-gate memory cell. A floating gate may contain one or more layers of such nanocrystal structures.
    Type: Application
    Filed: February 3, 2014
    Publication date: May 29, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Prashant MAJHI, Kyu S. MIN, Wilman TSAI
  • Patent number: 8729704
    Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: May 20, 2014
    Assignee: Intel Corporation
    Inventor: Kyu S. Min
  • Publication number: 20140091429
    Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.
    Type: Application
    Filed: September 27, 2013
    Publication date: April 3, 2014
    Inventor: Kyu S. Min
  • Patent number: 8643079
    Abstract: Nanocrystal structures formed using atomic layer deposition (ALD) processes are useful in the formation of integrated circuits such as memory devices. Rather than continuing the ALD process until a continuous layer is formed, the ALD process is halted prematurely to leave a discontinuous formation of nanocrystals which are then capped by a different material, thus forming a layer with a discontinuous portion and a bulk portion. Such nanocrystals can serve as charge-storage sites within the bulk portion, and the resulting structure can serve as a floating gate of a floating-gate memory cell. A floating gate may contain one or more layers of such nanocrystal structures.
    Type: Grant
    Filed: May 5, 2008
    Date of Patent: February 4, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Prashant Majhi, Kyu S. Min, Wilman Tsai
  • Patent number: 8546944
    Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: October 1, 2013
    Assignee: Intel Corporation
    Inventor: Kyu S. Min
  • Patent number: 8228743
    Abstract: Some embodiments include memory cells having vertically-stacked charge-trapping zones spaced from one another by dielectric material. The dielectric material may comprise high-k material. One or more of the charge-trapping zones may comprise metallic material. Such metallic material may be present as a plurality of discrete isolated islands, such as nanodots. Some embodiments include methods of forming memory cells in which two charge-trapping zones are formed over tunnel dielectric, with the zones being vertically displaced relative to one another, and with the zone closest to the tunnel dielectric having deeper traps than the other zone. Some embodiments include electronic systems comprising memory cells. Some embodiments include methods of programming memory cells having vertically-stacked charge-trapping zones.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: July 24, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Kyu S. Min, Rhett T. Brewer, Tejas Krishnamohan, Thomas M. Graettinger, D. V. Nirmal Ramaswamy, Ronald A Weimer, Arup Bhattacharyya
  • Publication number: 20120161318
    Abstract: A memory device has multiple dielectric barrier regions. A memory device has multiple barrier regions that provide higher or lower current-voltage slope compared to a memory device having a single barrier region. The device also has electrode regions that provide further control over the current-voltage relationship.
    Type: Application
    Filed: December 22, 2010
    Publication date: June 28, 2012
    Inventor: Kyu S. Min
  • Patent number: 8183110
    Abstract: Some embodiments include memory cells. The memory cells may include a tunnel dielectric material, a charge-retaining region over the tunnel dielectric material, crystalline ultra-high k dielectric material over the charge-retaining region, and a control gate material over the crystalline ultra-high k dielectric material. Additionally, the memory cells may include an amorphous region between the charge-retaining region and the crystalline ultra-high k dielectric material, and/or may include an amorphous region between the crystalline ultra-high k dielectric material and the control gate material. Some embodiments include methods of forming memory cells which contain an amorphous region between a charge-retaining region and a crystalline ultra-high k dielectric material, and/or which contain an amorphous region between a crystalline ultra-high k dielectric material and a control gate material.
    Type: Grant
    Filed: May 26, 2011
    Date of Patent: May 22, 2012
    Assignee: Micron Technology, Inc.
    Inventors: D. V. Nirmal Ramaswamy, Noel Rocklein, Kyu S. Min
  • Publication number: 20110220989
    Abstract: Some embodiments include memory cells. The memory cells may include a tunnel dielectric material, a charge-retaining region over the tunnel dielectric material, crystalline ultra-high k dielectric material over the charge-retaining region, and a control gate material over the crystalline ultra-high k dielectric material. Additionally, the memory cells may include an amorphous region between the charge-retaining region and the crystalline ultra-high k dielectric material, and/or may include an amorphous region between the crystalline ultra-high k dielectric material and the control gate material. Some embodiments include methods of forming memory cells which contain an amorphous region between a charge-retaining region and a crystalline ultra-high k dielectric material, and/or which contain an amorphous region between a crystalline ultra-high k dielectric material and a control gate material.
    Type: Application
    Filed: May 26, 2011
    Publication date: September 15, 2011
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: D. V. Nirmal Ramaswamy, Noel Rocklein, Kyu S. Min
  • Patent number: 7968406
    Abstract: Some embodiments include memory cells. The memory cells may include a tunnel dielectric material, a charge-retaining region over the tunnel dielectric material, crystalline ultra-high k dielectric material over the charge-retaining region, and a control gate material over the crystalline ultra-high k dielectric material. Additionally, the memory cells may include an amorphous region between the charge-retaining region and the crystalline ultra-high k dielectric material, and/or may include an amorphous region between the crystalline ultra-high k dielectric material and the control gate material. Some embodiments include methods of forming memory cells which contain an amorphous region between a charge-retaining region and a crystalline ultra-high k dielectric material, and/or which contain an amorphous region between a crystalline ultra-high k dielectric material and a control gate material.
    Type: Grant
    Filed: January 9, 2009
    Date of Patent: June 28, 2011
    Assignee: Micron Technology, Inc.
    Inventors: D. V. Nirmal Ramaswamy, Noel Rocklein, Kyu S. Min
  • Publication number: 20110147827
    Abstract: The present disclosure relates generally to the fabrication of non-volatile memory. In at least one embodiment, the present disclosure relates to forming a layered blocking dielectric which has a portion thereof removed in the wordline direction.
    Type: Application
    Filed: December 23, 2009
    Publication date: June 23, 2011
    Inventors: Fatma Arzum Simsek-Ege, Sanh Tang, Nirmal Ramaswamy, Thomas M. Graettinger, Kyu S. Min, Tejas Krishnamohan, Srivardhan Gowda
  • Publication number: 20110133268
    Abstract: Some embodiments include memory cells having vertically-stacked charge-trapping zones spaced from one another by dielectric material. The dielectric material may comprise high-k material. One or more of the charge-trapping zones may comprise metallic material. Such metallic material may be present as a plurality of discrete isolated islands, such as nanodots. Some embodiments include methods of forming memory cells in which two charge-trapping zones are formed over tunnel dielectric, with the zones being vertically displaced relative to one another, and with the zone closest to the tunnel dielectric having deeper traps than the other zone. Some embodiments include electronic systems comprising memory cells. Some embodiments include methods of programming memory cells having vertically-stacked charge-trapping zones.
    Type: Application
    Filed: February 10, 2011
    Publication date: June 9, 2011
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Kyu S. Min, Rhett T. Brewer, Tejas Krishnamohan, Thomas M. Graettinger, D.V. Nirmal Ramaswamy, Ronald A. Weimer, Arup Bhattacharyya
  • Patent number: 7898850
    Abstract: Some embodiments include memory cells having vertically-stacked charge-trapping zones spaced from one another by dielectric material. The dielectric material may comprise high-k material. One or more of the charge-trapping zones may comprise metallic material. Such metallic material may be present as a plurality of discrete isolated islands, such as nanodots. Some embodiments include methods of forming memory cells in which two charge-trapping zones are formed over tunnel dielectric, with the zones being vertically displaced relative to one another, and with the zone closest to the tunnel dielectric having deeper traps than the other zone. Some embodiments include electronic systems comprising memory cells. Some embodiments include methods of programming memory cells having vertically-stacked charge-trapping zones.
    Type: Grant
    Filed: October 12, 2007
    Date of Patent: March 1, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Kyu S. Min, Rhett T. Brewer, Tejas Krishnamohan, Thomas M. Graettinger, D. V. Nirmal Ramaswamy, Ronald A. Weimer, Arup Bhattacharyya