Abstract: Provided are a substrate manufacturing method and a substrate manufacturing apparatus used therefor. The substrate manufacturing method includes providing a substrate having a mask film into a chamber. A plasma reaction is induced in the chamber. A first gas and a second gas are alternately provided into the chamber to etch the substrate. Each of the first and second gases is provided into the chamber at a stabilized feed pressure including a pressure fluctuation profile comprising a square wave shape.

Abstract: Provided are a substrate manufacturing method and a substrate manufacturing apparatus used therefor. The substrate manufacturing method includes providing a substrate having a mask film into a chamber. A plasma reaction is induced in the chamber. A first gas and a second gas are alternately provided into the chamber to etch the substrate. Each of the first and second gases is provided into the chamber at a stabilized feed pressure including a pressure fluctuation profile comprising a square wave shape.

Abstract: An apparatus for an etching process includes a chamber, a plasma generator disposed in the chamber, a stacked structure disposed in the chamber to support a substrate thereon and including an electrode plate and an insulation coating layer on the electrode plate, electrode rods inserted into through holes of the stacked structure to penetrate through the stacked structure, directly contacting the substrate and spaced apart from sidewalls of the through holes of the stacked structure, at least one DC pulse generator generating a DC pulse to the electrode plate and the electrode rods, first connection lines connecting the DC pulse generator to the electrode rods, and at least one second connection line connecting the DC pulse generator to a lower portion of the electrode plate.

Abstract: An apparatus for an etching process includes a chamber, a plasma generator disposed in the chamber, a stacked structure disposed in the chamber to support a substrate thereon and including an electrode plate and an insulation coating layer on the electrode plate, electrode rods inserted into through holes of the stacked structure to penetrate through the stacked structure, directly contacting the substrate and spaced apart from sidewalls of the through holes of the stacked structure, at least one DC pulse generator generating a DC pulse to the electrode plate and the electrode rods, first connection lines connecting the DC pulse generator to the electrode rods, and at least one second connection line connecting the DC pulse generator to a lower portion of the electrode plate.

Abstract: A fog sensing apparatus for vehicle windows is provided. The fog sensing apparatus includes: a temperature/humidity sensor module including a glass surface temperature sensor for measuring a temperature of a glass surface of the vehicle window, and a humidity sensor for measuring relative humidity around the glass surface of the vehicle window; a flexible printed circuit board on which the temperature/humidity sensor module is mounted, which a temperature measurement part of the glass surface temperature sensor contacts, and on which a conductive pattern is formed to be connected to electrode terminals of the glass surface temperature sensor and electrode terminals of the humidity sensor; a substrate assembly having a through hole for the temperature/humidity sensor module to pass through, and connection terminals connected to the conductive pattern; and a case covering the substrate assembly, the substrate assembly interposed between the case and the flexible printed circuit board.

Abstract: A fog sensing apparatus for vehicle windows is provided. The fog sensing apparatus includes: a temperature/humidity sensor module including a glass surface temperature sensor for measuring a temperature of a glass surface of the vehicle window, and a humidity sensor for measuring relative humidity around the glass surface of the vehicle window; a flexible printed circuit board on which the temperature/humidity sensor module is mounted, which a temperature measurement part of the glass surface temperature sensor contacts, and on which a conductive pattern is formed to be connected to electrode terminals of the glass surface temperature sensor and electrode terminals of the humidity sensor; a substrate assembly having a through hole for the temperature/humidity sensor module to pass through, and connection terminals connected to the conductive pattern; and a case covering the substrate assembly, the substrate assembly interposed between the case and the flexible printed circuit board.

Abstract: Disclosed is a method of providing a mobile phone broadcasting service using a cell broadcasting system (CBS) including (1) processing information in forms of voice, multimedia, text and image by an information providing system and transmitting the processed information to a mobile phone broadcasting system through an Internet network, (2) simultaneously transmitting the text and image information out of the information received from the mobile phone broadcasting system, a linked phone number connectable to an automatic response system (ARS) or a linked URI, connectable to a wireless Internet broadcasting server to a plurality of mobile phone terminals through a wireless network, and (3) when the linked phone number is selected in order to receive voice information out of the information individually received from the mobile phone terminals, the ARS providing the voice information to a mobile phone terminal for the selected phone number, or when the linked URI, is selected in order to receive multimedia infor

Abstract: An ESC (Electrostatic Chuck) to chuck an object by electrostatic force, having an ESC main body supporting the object; a guide ring supported by the ESC main body and encircling the object; a dielectric material layer interposed between the guide ring and the ESC main body; a media gas supplier to supply a media gas to the guide ring; and a power supplier to supply power to the ESC main body. With this configuration, the ESC provides an apparatus to chuck a guide ring to an ESC main body, while maintaining the guide ring and an object, such as a wafer, at the same or similar temperature, thereby enhancing uniformity of the object during a semiconductor manufacturing process such as etching, deposition, or the like.

Abstract: An ESC (Electrostatic Chuck) to chuck an object by electrostatic force, having an ESC main body supporting the object; a guide ring supported by the ESC main body and encircling the object; a dielectric material layer interposed between the guide ring and the ESC main body; a media gas supplier to supply a media gas to the guide ring; and a power supplier to supply power to the ESC main body. With this configuration, the ESC provides an apparatus to chuck a guide ring to an ESC main body, while maintaining the guide ring and an object, such as a wafer, at the same or similar temperature, thereby enhancing uniformity of the object during a semiconductor manufacturing process such as etching, deposition, or the like.

Abstract: Disclosed is a method of providing a mobile phone broadcasting service using a cell broadcasting system (CBS) including (1) processing information in forms of voice, multimedia, text and image by an information providing system and transmitting the processed information to a mobile phone broadcasting system through an Internet network, (2) simultaneously transmitting the text and image information out of the information received from the mobile phone broadcasting system, a linked phone number connectable to an automatic response system (ARS) or a linked URI, connectable to a wireless Internet broadcasting server to a plurality of mobile phone terminals through a wireless network, and (3) when the linked phone number is selected in order to receive voice information out of the information individually received from the mobile phone terminals, the ARS providing the voice information to a mobile phone terminal for the selected phone number, or when the linked URI, is selected in order to receive multimedia infor

Abstract: Activated clay is mixed with fine sawdust and/or powder of the heart of kaoliang stalk, a small amount of a coloring agent and bittern containing calcium sulfate, calcium silicate, magnesium or magnesium chloride and the like, or a composition of components identical to the bittern in a paste phase. Then, the paste phase mixture is supplied together with glass fiber layers provided on the upper and the lower sides of the mixture separately on any one of molding plates selected from glass, acryl, polycarbonate, polyvinyl chloride or polypropylene. The materials of the molding plates, in situ, are passed through mixture-separative sandwich rollers to give a certain thickness of a mixture sheet by pressing. The surface of the mixture sheet is coated with an epoxy resin layer to provide a flat and slick surface. On the epoxy resin layer an adhesive layer, transfer film layer, ultraviolet curable adhesives and a protection film layer are coated by adherence in turn to provide an incombustible board.

Abstract: An incombustible artificial marble which is used to produce multiple color patterns which contains, as a multiple layer composite, a layer of activated clay mixed with stone powder and/or cement powder, fine sawdust and/or the heart of kaoliang stalk, a coloring agent, calcium and magnesium salts, an epoxy resin layer; an adhesive layer; a transfer film layer containing multiple color patterns, an ultra-violet curable adhesive layer and a protective film layer.