Patents by Inventor Laertis Economikos

Laertis Economikos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser removal of metal interconnects
    Patent number: 5235154
    Abstract: Disbonded two-level (bimetal) metal interconnections are removed by first vaporizing metal in the lower level that is exposed by the narrower metal on the upper level using a pulsed laser beam having an energy density above a vaporization threshold in a first beam width and then vaporizing the remaining portion of the metal in both levels using the laser beam with a narrower beam width that covers only the narrower width of the upper level metal.
    Type: Grant
    Filed: April 28, 1992
    Date of Patent: August 10, 1993
    Assignee: International Business Machines Corporation
    Inventor: Laertis Economikos