Abstract: Various approaches in which an image-recording parameter is varied between a plurality of images of an object and a stereo image pair is displayed on the basis of the images recorded thus are described. Here, in particular, the image-recording parameter can be a focal plane or an illumination direction.

Abstract: The invention relates to a reflection correction method for correcting digital microscopic images. Here, the reflection correction method comprises: illuminating an object, the illuminating of the object having at least two illumination patterns. Creating an illumination pattern image of the object for each illumination pattern. Calculating at least one partial reflection image, in each case by means of a combination of corresponding two illumination pattern images. Calculating a reflection-corrected image of the object by means of a suitable combination of at least one illumination pattern image and at least one partial reflection image. And, in this case, each illumination pattern as at least one active illumination source, and each illumination pattern is different from all others. Furthermore, the invention relates to an associated reflection-correcting device.

Abstract: An optical device includes a sample holder configured to fix an object in the beam path of the optical device, and an illumination module which has a plurality of light sources and configured to illuminate the object from a plurality of illumination directions by operating the light sources, wherein each illumination direction has an assigned luminous field. The optical device also has a filter arranged between the illumination module and the sample holder and configured to expand the assigned luminous field for each illumination direction. As a result, it is possible to reduce artefacts on account of contaminants during the angularly-selective illumination. Techniques of digital artefact reduction are also described. By way of example, the optical device can be a microscope.

Abstract: Methods and apparatuses in which a plurality of images are recorded at different illumination angles are provided. The plurality of images are combined in order to produce a results image with an increased depth of field.

Abstract: An object transfer function (201) for a sample object is determined on the basis of a reference measurement. Subsequently, an optimization (250) is carried out in order to find an optimized illumination geometry on the basis of the object transfer function and an optical transfer function (202) for an optical unit.

Abstract: Images are captured with a sample object in various arrangements relative to lighting and a detector. The images are then combined image point by image point on the basis of a comparison of image point values of image points of said images. This achieves a reduction in interference, i.e. reflections and/or shadows can be reduced.

Abstract: A detection optical unit (112) of an optical apparatus is configured to produce an imaged representation (151, 152) of a sample object (150) on a detector (114). An adjustable filter element (119) is arranged in a beam path of the detection optical unit (112) that defines the imaged representation (151, 152). A controller is configured to drive the adjustable filter element (119) to filter the spectrum of the beam path with a first filter pattern (301-308) and with a second filter pattern (301-308) and to drive the detector (114) to capture a first image, associated with the first filter pattern (301-308), and to capture a second image, which is associated with the second filter pattern (301-308). The controller is furthermore configured to determine a focus position (181) of the sample object (150) based on the first image and the second image. The first filter element (301-308) here defines a first line and the second filter element (301-308) defines a second line.

Abstract: To determine a position of an object (100) parallel to the optical axis (120) of an optical device (1), the object (100) is illumined from a first illumination direction (210-1) and from a second illumination direction (210-2) and an image (230-1, 230-2) is acquired in each case. The position of the object (100) is determined based on a distance (250) between imaging locations of the object (220-1, 220-2) in the images (230-1, 230-2).

Abstract: An optical system includes an illumination module configured to illuminate a sample object with at least one angle-variable illumination geometry. The optical system includes an imaging optical unit configured to produce an imaged representation of the sample object that is illuminated with the at least one angle-variable illumination geometry on a detector. The optical system includes the detector, which is configured to capture at least one image of the sample object based on the imaged representation. The optical system includes a controller configured to determine a result image based on a transfer function and the at least one image. A method includes illuminating a sample object with at least one angle-variable illumination geometry, imaging the sample object on a detector, based on the imaged representation, capturing at least one image of the sample object, and, based on a transfer function and the at least one image, determining a result image.

Abstract: The invention relates to a reflection-reduced contrast imaging method and to a device for generating a reflection-reduced contrast image, preferably from microscopic images, in particular in order to read height progression information of a condition of an object.

Abstract: A method and an apparatus for beam analysis in an optical system are disclosed, wherein a plurality of beam parameters of a beam propagating along an optical axis are ascertained. The method includes: splitting the beam into a plurality of partial beams which have a focus offset in the longitudinal direction in relation to the optical axis; recording a measurement image produced by these partial beams; carrying out a forward simulation of the beam in the optical system on the basis of estimated initial values for the beam parameters in order to obtain a simulated image; and calculating a set of values for the beam parameters on the basis of the comparison between the simulated image and the measurement image.

Abstract: A method and an apparatus for beam analysis in an optical system are disclosed, wherein a plurality of beam parameters of a beam propagating along an optical axis are ascertained. The method includes: splitting the beam into a plurality of partial beams which have a focus offset in the longitudinal direction in relation to the optical axis; recording a measurement image produced by these partial beams; carrying out a forward simulation of the beam in the optical system on the basis of estimated initial values for the beam parameters in order to obtain a simulated image; and calculating a set of values for the beam parameters on the basis of the comparison between the simulated image and the measurement image.

Abstract: For three-dimensional imaging, an object is illuminated at a plurality of illumination angles. A detector detects a plurality of images of the object for the plurality of illumination angles. An electronic processing device processes the plurality of images in order to reconstruct three-dimensional information of the object.

Abstract: In detecting the structure of a lithography mask, a portion of the lithography mask is firstly illuminated with illumination light of an at least partially coherent light source in the at least one preferred illumination direction. A diffraction image of the illuminated portion is then recorded by spatially resolved detection of a diffraction intensity of the illumination light diffracted from the illuminated portion in a detection plane. The steps of “illuminating” and “recording the diffraction image” are then carried out for further portions of the lithography mask. Between at least two portions of the lithography mask that are thereby detected, there is in each case an overlap region whose surface extent measures at least 5% or more of the smaller of the two portions of the lithography mask. The repetition takes place until the detected portions of the lithography mask completely cover a region of the lithography mask to be detected.

Abstract: An illumination module (101) for an optical apparatus comprises a light source unit (102), which is configured to selectively emit light along a multiplicity of beam paths (112) in each case. The illumination module (101) also comprises a multiplicity of optical elements (201-203) arranged with lateral offset from one another, wherein each optical element (201-203) of the multiplicity of optical elements (201-203) is configured to transform at least one corresponding beam path (112) of the multiplicity of beam paths.

Abstract: An object is illuminated sequentially using at least two illumination geometries. An intensity image of the object is captured for each one of the at least two illumination geometries. The intensity images are combined for producing a results image. Combining is carried out in such a way that the results image satisfies a predetermined optimization criterion. By way of example, the optimization criterion may relate to an image contrast, an edge steepness or an image sharpness. Optimization may be carried out with a spatial resolution.

Abstract: Various aspects of the invention relate to techniques to facilitate autofocus techniques for a test object by means of an angle-variable illumination. Here, image datasets are captured at a multiplicity of angle-variable illumination geometries. The captured image datsets are evaluated in order to determine the Z-position.

Abstract: A method for determining an arrangement of a sample object in an optical device comprises illuminating the sample object from at least one first illumination direction and illuminating the sample object from at least one second illumination direction. The method also comprises carrying out a correlation between data which are indicative of at least one section of an image of the sample object under illumination from the at least one first illumination direction and data which are indicative of at least one section of an image of the sample object under illumination from the at least one second illumination direction. The method also comprises determining the arrangement of the sample object in relation to a focal plane of the optical device based on the correlation.

Abstract: An object is illuminated from at least one illuminating direction. For each illuminating direction, an intensity image of the object is captured during the illumination. On the basis of the at least one intensity image, a phase contrast image of the object is generated.

Abstract: At least two images (201-1-201-3) of an object (100) are obtained, wherein each image has an illumination field (110-1-110-3) associated therewith, which is associated with predetermined beam shape properties (111-1-111-3). For each one of the at least two images (201-1-201-3) an effect of the beam shape properties is added to a predetermined approximation of the object, the approximation is adjusted by means of Fourier ptychography techniques on the basis of the respective image and then the effect of the beam shape properties is removed from the adapted approximation of the object.