Abstract: Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame, first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, and the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.

Abstract: An exposure light beam phase measurement method for laser interference photolithography comprises: separating a measurement light from an exposure light beam and inputting light into a laser phase measurement interferometer to carry out phase measurement on the exposure light beam; inputting a reference light beam homologous with the exposure light beam into the laser phase measurement interferometer; processing the reference light beam to form an interference measurement optical signal; calculating to obtain the phase of the exposure light beam. A laser interference photolithography system using the method comprises a laser phase measurement interferometer, a controller and phase modulators, the laser phase measurement interferometer measures whether the phase of an exposure light beam drifts, the controller controls phase modulators to carry out phase modulation, to achieve locking of exposure stripe phase drift and manufacturing of a high-precision variable-period optical grating.

Abstract: A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.

Abstract: The present application provides a soft magnetic alloy sheet, a preparation method therefor and a use thereof. The preparation method comprises the following steps: (1) mixing thermosetting resin, thermoplastic resin, a solvent, a curing agent, and soft magnetic alloy powder having insulating coating to obtain casting slurry; and (2) carrying out degassing and casting-drying treatment on the casting slurry in step (1) in sequence to obtain the soft magnetic alloy sheet.

Abstract: Disclosed is a heterodyne grating interferometry system based on secondary diffraction, including a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, and a measurement grating, an output optical fiber, a photoelectric conversion unit and an electronic signal processing unit, wherein the single-frequency laser emits a single-frequency laser, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric conversion unit through the output optical fiber and wherein the photoelectric conversion unit converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signal

Abstract: Provided is a thin-film power inductor. The thin-film power inductor includes a magnet, a first port electrode, and a second port electrode. The magnet includes at least one first sub-structure. A first sub-structure includes a first upper functional layer, a first upper coil, a first upper adhesive layer, a first insulating layer, a first lower adhesive layer, a first lower coil, and a first lower functional layer that are stacked in sequence. A first end of the first upper coil and a first end of the first lower coil are exposed to a same surface of the magnet and are both electrically connected to the first port electrode. A second end of the first upper coil and a second end of the first lower coil are exposed to a same surface of the magnet and are both electrically connected to the second port electrode.

Abstract: Disclosed is an acoustic method for precisely controlling and metering manual injection. The method includes: rotating a main housing to allow ratchet grooves to collide with ratchets on a ratchet wheel; obtaining collision voice and vibration signals by a switch sensor and a perception sensor; performing a Mel-frequency cepstral coefficient (MFCC) algorithm and classification with deep neural networks (DNN) on signals detected by a voice sensor, to output processed and recognized voice features; performing an empirical mode decomposition (EMD) algorithm and classification with cyclic delay diversity (CDD) on signals detected by a vibration sensor, to output processed and recognized vibration signals; and inputting the output voice features, the vibration signals, and reception time differences between the voice signals and the vibration signals into a support vector machine (SVM) classifier jointly for final recognition and classification, to recognize whether manual injection is correctly performed.

Abstract: A device and a method for regulating and controlling an incident angle of a light beam in a laser interference lithography process are disclosed. The device comprises: a beam splitter prism between a first lens and a second lens, a first position detector, a first decoupling lens between the first position detector and the beam splitter prism, a feedback control system connected to the first position detector and a first universal reflecting mirror. The beam splitter prism reflects first incident light passing through the first universal reflecting mirror, the first decoupling lens enables a first reflected light enter into the first position detector, the first position detector measures the light beam position, the feedback control system outputs a control command according to the measurement result to regulate a mirror base of the first universal reflecting mirror, thereby regulating and controlling an incident angle of an exposure light beam.

Abstract: A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The system is not over-sensitive to the environment, is small and light, and is easy to arrange.

Abstract: A manufacturing method of a thin-film power inductor includes: Alloy powder is mixed with plasticizer, adhesive, curing agent, dispersing agent and organic solvent to form slurry; the slurry is applied on a PET film, and drying to form a magnetic band; and the magnetic band is cut to form a plurality of magnetic sheets. A hole is opened on a magnetic sheet to form a hole-shaped magnetic sheet. Electrodes are processed on an insulating substrate to form a coil layer. Magnetic sheets, hole-shaped magnetic sheets, and the coil layer are stacked to form a block. The block is pressed, and the block is cut to form an individual product. The individual product is baked to form a main body. Silver paste is applied on the main body to form outer electrodes. A nickel layer and a tin layer are electroplated on outer electrodes to form a thin-film power inductor.

Abstract: A method and device for detecting inflammation activity of a tissue. The method includes: determining whether there is a possibility for tissue inflammation; and when there is a possibility for tissue inflammation, determining the inflammation activity of a tissue according to tissue stiffness or a parameter reflecting tissue stiffness. The tissue stiffness or the parameter reflecting tissue stiffness can be detected by means of a non-invasive quantitative detection technique of tissue elastic modulus, avoiding defects caused by tissue biopsy, and can detect inflammation activity of a tissue non-invasively, continuously and accurately.

Abstract: A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multimode optical fibers respectively receiving signals at different positions on the same plane.

Abstract: Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame , first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.

Abstract: A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal.

Abstract: A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multi-mode optical fibers respectively receiving signals at different positions on the same plane.

Abstract: A wide-beam planar backfire and bidirectional circularly-polarized antenna. An entire planar sectorial magnetic dipole is of a semi-closed structure, the planar sectorial magnetic dipole comprises two identical sectorial patches and a vertical short-circuit wall, and the vertical short-circuit wall is connected with straight sides of the two sectorial patches along a radial direction of the planar sectorial magnetic dipole; two sets of concentric annular electric dipoles are respectively used as a top concentric annular radiating element and a bottom concentric annular radiating element, as well as a top concentric annular reflector and a bottom anti-concentric annular reflector; and the top concentric annular radiating element is connected with an upper surface of the planar sectorial magnetic dipole through a top connecting branch, and the bottom concentric annular radiating element is connected with a lower surface of the planar sectorial magnetic dipole through a bottom connecting branch.

Abstract: A wide-beam planar backfire and bidirectional circularly-polarized antenna. An entire planar sectorial magnetic dipole is of a semi-closed structure, the planar sectorial magnetic dipole comprises two identical sectorial patches and a vertical short-circuit wall, and the vertical short-circuit wall is connected with straight sides of the two sectorial patches along a radial direction of the planar sectorial magnetic dipole; two sets of concentric annular electric dipoles are respectively used as a top concentric annular radiating element and a bottom concentric annular radiating element, as well as a top concentric annular reflector and a bottom anti-concentric annular reflector; and the top concentric annular radiating element is connected with an upper surface of the planar sectorial magnetic dipole through a top connecting branch, and the bottom concentric annular radiating element is connected with a lower surface of the planar sectorial magnetic dipole through a bottom connecting branch.

Abstract: A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles, respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The measurement system is not over-sensitive to the environment, is small and light, and is easy to arrange.

Abstract: A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal.

Abstract: A method and device for detecting inflammation activity of a tissue. The method includes: determining whether there is a possibility for tissue inflammation; and when there is a possibility for tissue inflammation, determining the inflammation activity of a tissue according to tissue stiffness or a parameter reflecting tissue stiffness. The tissue stiffness or the parameter reflecting tissue stiffness can be detected by means of a non-invasive quantitative detection technique of tissue elastic modulus, avoiding defects caused by tissue biopsy, and can detect inflammation activity of a tissue non-invasively, continuously and accurately.