Patents by Inventor Leonard Sharpless
Leonard Sharpless has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9689533Abstract: A gas delivery system for a plasma process system such as a plasma etching system wherein inner surfaces of gas passages are coated with a corrosion-resistant material coating formed by curing a layer of fluidic precursor deposited on the inner surfaces. The coating can be formed by (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.Type: GrantFiled: August 29, 2014Date of Patent: June 27, 2017Assignee: LAM RESEARCH CORPORATIONInventors: Ian Kenworthy, Duane Outka, Fangli Hao, Leonard Sharpless, Yijun Du
-
Patent number: 9687908Abstract: A method for casting an internal feature within an object is provided. An internal mold is formed from a mold powder, comprising a base powder and an acid powder mixed into the base powder. A molten material is cast around the internal mold. The molten material is solidified. The internal mold is reacted with water, wherein the reacting causes the acid powder to neutralize the base powder.Type: GrantFiled: September 3, 2015Date of Patent: June 27, 2017Assignee: Law Research CorporationInventor: Leonard Sharpless
-
Publication number: 20170066045Abstract: A method for casting an internal feature within an object is provided. An internal mold is formed from a mold powder, comprising a base powder and an acid powder mixed into the base powder. A molten material is cast around the internal mold. The molten material is solidified. The internal mold is reacted with water, wherein the reacting causes the acid powder to neutralize the base powder.Type: ApplicationFiled: September 3, 2015Publication date: March 9, 2017Inventor: Leonard Sharpless
-
Patent number: 9490135Abstract: A movable symmetric chamber liner in a plasma reaction chamber, for protecting the plasma reaction chamber, enhancing the plasma density and uniformity, and reducing process gas consumption, comprising a cylindrical wall, a bottom wall with a plurality of openings, a raised inner rim with an embedded heater, heater contacts, and RF ground return contacts. The chamber liner is moved by actuators between an upper position at which substrates can be transferred into and out of the chamber, and a lower position at which substrate are processed in the chamber. The actuators also provide electrical connection to the heater and RF ground return contacts.Type: GrantFiled: October 23, 2013Date of Patent: November 8, 2016Assignee: LAM RESEARCH CORPORATIONInventors: Danny Brown, Leonard Sharpless
-
Publication number: 20140366968Abstract: A gas delivery system for a plasma process system such as a plasma etching system wherein inner surfaces of gas passages are coated with a corrosion-resistant material coating formed by curing a layer of fluidic precursor deposited on the inner surfaces. The coating can be formed by (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.Type: ApplicationFiled: August 29, 2014Publication date: December 18, 2014Inventors: Ian Kenworthy, Duane Outka, Fangli Hao, Leonard Sharpless, Yijun Du
-
Patent number: 8852685Abstract: A method of coating the inner surfaces of gas passages of a gas delivery system for a plasma process system such as a plasma etching system includes (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.Type: GrantFiled: April 23, 2010Date of Patent: October 7, 2014Assignee: Lam Research CorporationInventors: Ian Kenworthy, Duane Outka, Fangli Hao, Leonard Sharpless, Yijun Du
-
Publication number: 20140051254Abstract: A movable symmetric chamber liner in a plasma reaction chamber, for protecting the plasma reaction chamber, enhancing the plasma density and uniformity, and reducing process gas consumption, comprising a cylindrical wall, a bottom wall with a plurality of openings, a raised inner rim with an embedded heater, heater contacts, and RF ground return contacts. The chamber liner is moved by actuators between an upper position at which substrates can be transferred into and out of the chamber, and a lower position at which substrate are processed in the chamber. The actuators also provide electrical connection to the heater and RF ground return contacts.Type: ApplicationFiled: October 23, 2013Publication date: February 20, 2014Applicant: Lam Research CorporationInventors: Danny Brown, Leonard Sharpless
-
Patent number: 8597428Abstract: A linear actuator comprised of an actuator body having a first portion and a second portion, each arranged along a longitudinal axis of the actuator body. A vacuum bellows is concentrically located in the first portion and is configured to seal a vacuum environment from the second portion. A linear motion shaft is concentrically located substantially within the actuator body and is configured to move in a linear direction along the longitudinal axis. An electrically conductive portion of the shaft is concentrically located substantially within the vacuum bellows and electrically insulated therefrom and is configured to receive and conduct a signal. A lift force generating portion of the shaft is concentrically located substantially within the second portion. An electrical contact pad is electrically coupled to the conductive portion of the shaft and is configured to couple the signal to another surface upon activation of the shaft.Type: GrantFiled: December 12, 2008Date of Patent: December 3, 2013Assignee: Lam Research CorporationInventors: Danny Brown, Allan Ronne, Arthur Sato, John Daugherty, Leonard Sharpless
-
Patent number: 8597462Abstract: A movable symmetric chamber liner in a plasma reaction chamber, for protecting the plasma reaction chamber, enhancing the plasma density and uniformity, and reducing process gas consumption, comprising a cylindrical wall, a bottom wall with a plurality of openings, a raised inner rim with an embedded heater, heater contacts, and RF ground return contacts. The chamber liner is moved by actuators between an upper position at which substrates can be transferred into and out of the chamber, and a lower position at which substrate are processed in the chamber. The actuators also provide electrical connection to the heater and RF ground return contacts.Type: GrantFiled: May 21, 2010Date of Patent: December 3, 2013Assignee: Lam Research CorporationInventors: Danny Brown, Leonard Sharpless
-
Patent number: 8524099Abstract: Methods for processing events occurring in a process chamber are provided. In one method, an operation includes carrying gas and receiving an optical signal from the process chamber to an analysis tool that operates in response to the optical signal having a signal-to-noise ratio (SNR) for process analysis. And, dividing the carried gas and optical signal into a plurality of separate gas and optical signals between the process chamber and the analysis tool. The dividing is configured through separate apertures so that the apertures collectively maintain the SNR of the optical signal received at the tool. Methods provide a septum in a second bore dividing the second bore into apertures configured to reduce etching of and deposition on the optical access window and to maintain the desired SNR at the diagnostic end point.Type: GrantFiled: January 7, 2011Date of Patent: September 3, 2013Assignee: Lam Research CorporationInventors: Jeff A. Bogart, Leonard Sharpless, Harmeet Singh
-
Publication number: 20110287632Abstract: A movable symmetric chamber liner in a plasma reaction chamber, for protecting the plasma reaction chamber, enhancing the plasma density and uniformity, and reducing process gas consumption, comprising a cylindrical wall, a bottom wall with a plurality of openings, a raised inner rim with an embedded heater, heater contacts, and RF ground return contacts. The chamber liner is moved by actuators between an upper position at which substrates can be transferred into and out of the chamber, and a lower position at which substrate are processed in the chamber. The actuators also provide electrical connection to the heater and RF ground return contacts.Type: ApplicationFiled: May 21, 2010Publication date: November 24, 2011Applicant: Lam Research CorporationInventors: Danny Brown, Leonard Sharpless
-
Publication number: 20110259519Abstract: A method of coating the inner surfaces of gas passages of a gas delivery system for a plasma process system such as a plasma etching system includes (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.Type: ApplicationFiled: April 23, 2010Publication date: October 27, 2011Applicant: Lam Research CorporationInventors: Ian Kenworthy, Duane Outka, Fangli Hao, Leonard Sharpless, Yijun Du
-
Publication number: 20110103805Abstract: Methods for processing events occurring in a process chamber are provided. In one method, an operation includes carrying gas and receiving an optical signal from the process chamber to an analysis tool that operates in response to the optical signal having a signal-to-noise ratio (SNR) for process analysis. And, dividing the carried gas and optical signal into a plurality of separate gas and optical signals between the process chamber and the analysis tool. The dividing is configured through separate apertures so that the apertures collectively maintain the SNR of the optical signal received at the tool. Methods provide a septum in a second bore dividing the second bore into apertures configured to reduce etching of and deposition on the optical access window and to maintain the desired SNR at the diagnostic end point.Type: ApplicationFiled: January 7, 2011Publication date: May 5, 2011Inventors: Jeff A. Bogart, Leonard Sharpless, Harmeet Singh
-
Patent number: 7928366Abstract: An injector provides optical access into a process chamber along an axial path from a diagnostic end point outside the process chamber through an optical access window. A hollow housing body receives first and second process gases, and surrounds the axial path. A sleeve in the body is urged against the body to minimize particle generation, and defines a first gas bore injecting the first process gas into the process chamber. A second gas bore of the sleeve surrounds the axial path for injecting the second process gas into the process chamber, allowing an optical signal to have a desired signal-to-noise ratio (SNR) at the end point. Methods provide a septum in the second bore dividing the second bore into apertures configured to reduce etching of and deposition on the optical access window and to maintain the desired SNR at the diagnostic end point.Type: GrantFiled: October 6, 2006Date of Patent: April 19, 2011Assignee: Lam Research CorporationInventors: Jeff A. Bogart, Leonard Sharpless, Harmeet Singh
-
Publication number: 20090152958Abstract: A linear actuator comprised of an actuator body having a first portion and a second portion, each arranged along a longitudinal axis of the actuator body. A vacuum bellows is concentrically located in the first portion and is configured to seal a vacuum environment from the second portion. A linear motion shaft is concentrically located substantially within the actuator body and is configured to move in a linear direction along the longitudinal axis. An electrically conductive portion of the shaft is concentrically located substantially within the vacuum bellows and electrically insulated therefrom and is configured to receive and conduct a signal. A lift force generating portion of the shaft is concentrically located substantially within the second portion. An electrical contact pad is electrically coupled to the conductive portion of the shaft and is configured to couple the signal to another surface upon activation of the shaft.Type: ApplicationFiled: December 12, 2008Publication date: June 18, 2009Applicant: LAM Research CorporationInventors: Danny Brown, Allan Ronne, Arthur Sato, John Daugherty, Leonard Sharpless
-
Publication number: 20080083883Abstract: An injector provides optical access into a process chamber along an axial path from a diagnostic end point outside the process chamber through an optical access window. A hollow housing body receives first and second process gases, and surrounds the axial path. A sleeve in the body is urged against the body to minimize particle generation, and defines a first gas bore injecting the first process gas into the process chamber. A second gas bore of the sleeve surrounds the axial path for injecting the second process gas into the process chamber, allowing an optical signal to have a desired signal-to-noise ratio (SNR) at the end point. Methods provide a septum in the second bore dividing the second bore into apertures configured to reduce etching of and deposition on the optical access window and to maintain the desired SNR at the diagnostic end point.Type: ApplicationFiled: October 6, 2006Publication date: April 10, 2008Applicant: LAM RESEARCH CORPORATIONInventors: Jeff A. Bogart, Leonard Sharpless, Harmeet Singh
-
Publication number: 20070169704Abstract: A port in a window member provides first access to a process chamber interior for gas injection and second optical access for process analysis and measurement. Plasma-induced etching and deposition in a bore of a gas injector integral with the window member is reduced by a grounded shield surrounding an access region, and coatings reduce particle flaking from walls of a first clear optical aperture of the injector and from a second clear optical aperture of a gas and optical access fitting,. The shield surrounds the region, and is configured with couplers to hold the gas and optical access fitting to the window member for access to the injector. The couplers compress seals so that a gas bore in the fitting is sealed to a plenum of the injector, while allowing optical access into the chamber through the first clear optical aperture and the second clear optical aperture.Type: ApplicationFiled: June 20, 2006Publication date: July 26, 2007Applicant: LAM RESEARCH CORPORATIONInventors: Fangli Hao, Leonard Sharpless, Harmeet Singh
-
Publication number: 20060000413Abstract: A plasma processing system for processing a substrate is described. The plasma processing system includes a bottom piece including a chuck configured for holding the substrate. The plasma processing system also includes an induction coil configured to generate an electromagnetic field in order to create a plasma for processing the substrate; and an optimized top piece coupled to the bottom piece, the top piece further configured for a heating and cooling system. Wherein, the heating and cooling system is substantially shielded from the electromagnetic field by the optimized top piece, and the optimized top piece can substantially be handled by a single person.Type: ApplicationFiled: June 30, 2004Publication date: January 5, 2006Inventors: Leonard Sharpless, Keith Comendant
-
Publication number: 20060000551Abstract: A temperature control device for controlling temperature of an upper chamber of a plasma processing apparatus is described. The temperature control device includes a thermally conductive body having an inner surface and an outer surface removably connected with and in thermal communication with the upper chamber of the plasma processing apparatus. The temperature control device also includes a plurality of thermal interface layers in thermal communication with the thermally conductive body wherein at least one layer is a heating element; and a cooling element connected with the banded thermally conductive body and thermally coupled with the upper chamber of the plasma processing apparatus wherein the cooling element is configured to conduct a fluidic medium.Type: ApplicationFiled: June 30, 2004Publication date: January 5, 2006Inventors: Miguel Saldana, Leonard Sharpless, John Daugherty