Abstract: A method and an apparatus for generating a polarized light beam to be projected onto an object plane are provided. A converging or diverging light beam (18) is generated. The converging or diverging light beam is projected through a member (22, 52) comprising an uniaxial birefringent material, the uniaxial birefringent material having a symmetry axis essentially parallel to the optical axis (12) of the light beam, and the member being placed at a distance from the object plane. Thereby, it is possible to create, for example a radially polarized beam that can be used for various optical purposes, e.g. for optical data reading/writing or for microscopy.

Abstract: A lithographic apparatus includes a radiation source configured to emit radiation to form a radiation beam, the radiation being of a type which can create plasma in a low pressure environment in the apparatus, and an optical component configured to condition the radiation beam, impart the conditioned radiation beam with a pattern in its cross-section to form a patterned radiation beam, project the patterned radiation beam onto a target portion of a substrate, and/or to detect radiation. The optical component is provided with a plasma quenching structure, the plasma quenching structure being configured to provide electron-ion recombination in, on and/or near the optical component.

Abstract: A multi-layer mirror includes a multi-layer stack. The multi-layer stack includes a plurality of alternating layers with a multi-layer stack top layer and a spectral filter top layer arranged on the multi-layer stack. The spectral filter top layer includes a first spectral purity enhancement layer that includes a first material m1 and has a first layer thickness d1, an intermediate layer that includes a second material m2 and has a second layer thickness d2. The intermediate layer is arranged on the multi-layer stack top layer. The first material is selected from SiN, Si3N4, SiO2, ZnS, Te, diamond, CsI, Se, SiC, amorphous carbon, MgF2, CaF2, TiO2, Ge, PbF2, ZrO2, BaTiO3, LiF or NaF. The second material includes a material different from the first material, and d1+d2 has a thickness between 1.5 and 40 nm.

Abstract: The invention relates to a device and method for the measurement of the concentration of at least one substance in a turbid medium. The device comprises at least one radiation source (12) adapted to illuminate the turbid medium (17) on at least one irradiation area. The device further comprises at least one detector adapted to detect backscattered light from the turbid medium from at least one detection area and to generate detection signals representative of the backscattered light. The device is arranged to generate detection signals with respect to at least two different irradiation-detection distances. The irradiation-detection distances are defined as the respective distances between the irradiation areas and the detection areas.

Abstract: An optical component for use in a lithographic apparatus. The optical component includes an optical element having an optical surface for reflecting electromagnetic radiation, and a protective zone covering the optical surface. The protective zone is provided with a material that substantially protects the optical surface against sputtering when the optical component is in use. The material has a refractive index that approximately equals unity for at least a predetermined wavelength of electromagnetic radiation to which the optical surface is exposed.

Abstract: A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first portion within the beam of radiation and a second portion outside of the beam of radiation, capturing at least some of the particles in the beam of radiation with the first portion, and moving the filter in a direction that is transverse to the beam of radiation so that the first portion is moved outside of the beam of radiation and the second portion is moved into the beam of radiation.

Abstract: The invention relates to an adaptation medium (100) for use in a device (45) for imaging an interior of a turbid medium (90), the device (45) for imaging an interior of a turbid medium (90) comprising: a. a receiving volume (60) for accommodating the turbid medium (90); b. an irradiation light source (50) for irradiating the turbid medium (90); c. a photodetector unit (55) for detecting light emanating from the receiving volume (60) as a result of irradiating the turbid medium (90). The invention also relates to a device (45) for imaging an interior of a turbid medium (90) and to a medical image acquisition device, the device (45) for imaging an interior of a turbid medium (90) and the medical image acquisition device comprising: a. a receiving volume (60) for accommodating a turbid medium (90); b. an irradiation light source (50) for irradiating the turbid medium (90); c. a photodetector unit (55) for detecting light emanating from the receiving volume (60) as a result of irradiating the turbid medium (90).

Abstract: The present invention provides an optical analysis system for determining an amplitude of a principal component of an optical signal. The principal component is indicative of the concentration of a particular compound or various compounds of a substance that is subject to spectroscopic analysis. The optical signal is subject to wavelength selective weighting and wavelength selective spatial separation specified by a weighting function. The optical signal is preferably separated into two parts that corresponding to a positive and negative spectral band of the weighting function, respectively. The separation provides separate detection of the separated parts of the optical signal without significant loss of intensity, thereby providing an improved signal to noise ratio of the determined principal component. Separation and weighting of the optical signal is realized by two multivariate optical elements.

Abstract: The invention relates to a system, a medical image acquisition system, and a method for imaging an interior of a turbid medium (25). The invention also relates to a marker (60) for use in the method for imaging an interior of a turbid medium (25). The system, the medical image acquisition system, and the method may be used for obtaining an image of an interior of a turbid medium (25) by: accommodation of a turbid medium (25) inside a receiving volume (20); irradiation of the receiving volume (20) with light from a light source; detection of light emanating from the receiving volume (20) as a result of irradiating the receiving volume (20) with light from the light source through the use of a photodetector unit. The detected light is then used to reconstruct an image of an interior of the turbid medium (25).

Abstract: A system for imaging of prostate cancer in a prostate in vivo is provided. The system utilizes Diffuse Optical Tomography (DOT) for creating a 3D image for the detection of suspicious prostate tissue. The DOT image may be used to guide the biopsy, thereby reducing the number of false negatives. A method, computer-readable medium and use are also provided.

Abstract: The invention relates to a method of acquiring image data from a turbid medium (102) using a diffuse optical tomography device, comprising: —irradiating the turbid medium (102) at a plurality of first spatial positions (106), —collecting light emanating from the turbid medium (102) at a plurality of 5 second spatial positions (136), —splitting the light collected from each second spatial position (136) into at least two optical channels (140), —measuring the intensity of the split light in each optical channel of the at least two optical channels (140) using photo detectors (142),10 —reconstructing (152) an image of the turbid medium (102) from the measured intensities.

Abstract: The present invention relates to a system for copy protection of an information carrier, said system comprising a diffractive layer for delivering a speckle pattern when illuminated by a light source, a spatial filter, which is aligned with respect to the diffractive layer, for delivering a filtered optical signal from the speckle pattern and a detector array for delivering, when illuminated by said filtered optical signal, an electrical signal. Said system further comprises means for computing a cryptographic key from the electrical signal, and means for decrypting encrypted data contained in the information carrier from the cryptographic key. It finds its application in copy protection of content carriers such as optical discs or in smart cards.

Abstract: The invention relates to a device for generating a periodical array of light spots from an input light beam, said device comprising—a periodical array of apertures (202) forming a plurality of interlaced sub-arrays of apertures,—phase shifter elements (PS;) placed in front of said apertures for imposing a phase shift to said input light beam so that each light spot is constructed as the superposition of a plurality of light spots generated by said plurality of interlaced sub-arrays of apertures. Use: Light spot generation.

Abstract: The invention relates to a device (1) for imaging an interior of a turbid medium (45) comprising: a) a measurement volume (15) for receiving the turbid medium (45); b) a light source (5) for irradiating the turbid medium (45); c) a photodetector unit (10) for detecting light emanating from exit positions (60) located on a boundary of the measurement volume (15) as a result of >irradiating the turbid medium (45). The device (1) is adapted to collect light from spatially distinct beams of light emanating from a single exit position (60). The single exit position (60) may, for instance, come in the form of an optical channel (25b) or it may simply be an area of skin tissue from which light emanates. In one embodiment of the device (1) according to the invention multiple optical light guides (55) are optically coupled to the single exit position (60).

Abstract: A device manufacturing method is disclosed. The method includes patterning a beam of radiation, projecting the patterned beam of radiation onto a plurality of outer target portions of a substrate in a sequence in which each subsequent outer target portion is spaced-apart from a preceding outer target portion, and subsequent to projecting the patterned beam of radiation on the plurality of outer target portions, projecting the patterned beam of radiation onto an inner target portion of the substrate.

Abstract: The present invention relates to a setup for storing data in a holographic storage medium, said setup comprising a spatial light modulator (SLM) (18) and a phase plate (50), the spatial light modulator having a first pixel structure, the phase plate having a second pixel structure, and the first and the second pixel structures being aligned with each other, wherein a pitch of the second pixel structure is an integer multiple of a pitch of the first pixel structure, the integer multiple being strictly greater than 1.

Abstract: A top layer of a predetermined metal is provided on a mirror for use in a lithographic apparatus having source to provide radiation of a desired wavelength. The source generates a stream of undesired metal particles that are deposited to form smaller and larger nuclei on the mirror. The top layer may interdiffuse in a predetermined temperature range with nuclei of the metal deposition. An additional layer of an alloy of the metal particles and the metal of the top layer is formed that has a higher reflectivity than a layer only comprising the metal particles would have.

Abstract: The invention relates to a device (1) for imaging an interior of a turbid medium (55) comprising a receptacle (20) with the receptacle (20) comprising a measurement volume (15) for receiving the turbid medium (55). The device (1) is adapted such that the inner surface of the receptacle (20), including at least part of the optical channels (70) is covered with a layer (80).

Abstract: A method for removing contaminant particles (14), such as atoms, molecules, clusters, ions, and the like, produced by means of a radiation source (10) during generation of short-wave radiation (12) having a wavelength of up to approximately 20 nm, by means of a first gas (22) guided at high mass throughput between the radiation source (10) and a particle trap (20) arranged in a wall (16) of a mirror chamber (18) is described that can be used for a lithography device or a microscope. In order to protect an optical device and/or articles to he irradiated against contamination, the method is designed such that a second gas (24) is introduced into the mirror chamber (18) and its pressure is adjusted such that it is at least as high as the pressure of the first gas (22).

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam, a projection system configured to project the radiation beam onto a substrate, and a filter system for filtering debris particles out of the radiation beam. The filter system includes a plurality of foils for trapping the debris particles, a support for holding the plurality of foils, and a cooling system having a surface that is arranged to be cooled. The cooling system and the support are positioned with respect to each other such that a gap is formed between the surface of the cooling system and the support. The cooling system is further arranged to inject gas into the gap.