Patents by Inventor Li-Wei Cheng

Li-Wei Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110034019
    Abstract: A method for fabricating a semiconductor structure is disclosed. A substrate with a first transistor having a first dummy gate and a second transistor having a second dummy gate is provided. The conductive types of the first transistor and the second transistor are different. The first and second dummy gates are simultaneously removed to form respective first and second openings. A high-k dielectric layer, a second type conductive layer and a first low resistance conductive layer are formed on the substrate and fill in the first and second openings, with the first low resistance conductive layer filling up the second opening. The first low resistance conductive layer and the second type conductive layer in the first opening are removed. A first type conductive layer and a second low resistance conductive layer are then formed in the first opening, with the second low resistance conductive layer filling up the first opening.
    Type: Application
    Filed: October 18, 2010
    Publication date: February 10, 2011
    Inventors: Chih-Hao Yu, Li-Wei Cheng, Che-Hua Hsu, Tian-Fu Chiang, Cheng-Hsien Chou, Chien-Ming Lai, Yi-Wen Chen, Chien-Ting Lin, Guang-Hwa Ma
  • Publication number: 20110031558
    Abstract: A gate structure of a semiconductor device includes a first low resistance conductive layer, a second low resistance conductive layer, and a first type conductive layer disposed between and directly contacting sidewalls of the first low resistance conductive layer and the second low resistance conductive layer.
    Type: Application
    Filed: October 19, 2010
    Publication date: February 10, 2011
    Inventors: Chih-Hao Yu, Li-Wei Cheng, Che-Hua Hsu, Tian-Fu Chiang, Cheng-Hsien Chou, Chien-Ming Lai, Yi-Wen Chen, Chien-Ting Lin, Guang-Hwa Ma
  • Publication number: 20110018072
    Abstract: A metal gate transistor is disclosed. The metal gate transistor preferably includes: a substrate, a metal gate disposed on the substrate, and a source/drain region disposed in the substrate with respect to two sides of the metal gate. The metal gate includes a U-shaped high-k dielectric layer, a U-shaped cap layer disposed over the surface of the U-shaped high-k dielectric layer, and a U-shaped metal layer disposed over the U-shaped cap layer.
    Type: Application
    Filed: September 29, 2010
    Publication date: January 27, 2011
    Inventors: Chien-Ting Lin, Li-Wei Cheng, Jung-Tsung Tseng, Che-Hua Hsu, Chih-Hao Yu, Tian-Fu Chiang, Yi-Wen Chen, Chien-Ming Lai, Cheng-Hsien Chou
  • Publication number: 20110012205
    Abstract: A metal gate structure is disclosed. The metal gate structure includes: a semiconductor substrate having an active region and an isolation region; an isolation structure disposed in the isolation region; a first gate structure disposed on the active region; and a second gate structure disposed on the isolation structure, wherein the height of the second gate structure is different from the height of the first gate structure.
    Type: Application
    Filed: September 24, 2010
    Publication date: January 20, 2011
    Inventors: Chien-Ting Lin, Che-Hua Hsu, Li-Wei Cheng
  • Publication number: 20110014773
    Abstract: A method of fabricating a metal gate structure is provided. The method includes providing a semiconductor substrate with a planarized polysilicon material; patterned the planarized polysilicon material to form at least a first gate and a second gate, wherein the first gate is located on the active region and the second gate at least partially overlaps with the isolation region; forming an inter-layer dielectric material covering the gates; planarizing the inter-layer dielectric material until exposing the gates and forming an inter layer-dielectric layer; performing an etching process to remove the gates to form a first recess and a second recess within the inter-layer dielectric layer; forming a gate dielectric material on a surface of each of the recesses; forming at least a metal material within the recesses; and performing a planarization process.
    Type: Application
    Filed: September 27, 2010
    Publication date: January 20, 2011
    Inventors: Chien-Ting Lin, Che-Hua Hsu, Li-Wei Cheng
  • Publication number: 20100317182
    Abstract: A method for forming a semiconductor element structure is provided. First, a substrate including a first MOS and a second MOS is provided. The gate electrode of the first MOS is connected to the gate electrode of the second MOS, wherein the first MOS includes a first high-K material and a first metal for use in a first gate, and a second MOS includes a second high-K material and a second metal for use in a second gate. Then the first gate and the second gate are partially removed to form a connecting recess. Afterwards, the connecting recess is filled with a conductive material to form a bridge channel for electrically connecting the first metal and the second metal.
    Type: Application
    Filed: August 25, 2010
    Publication date: December 16, 2010
    Inventors: Tian-Fu Chiang, Li-Wei Cheng, Che-Hua Hsu, Chih-Hao Yu, Cheng-Hsien Chou, Chien-Ming Lai, Yi-Wen Chen, Chien-Ting Lin, Guang-Hwa Ma
  • Patent number: 7838366
    Abstract: A method of fabricating a metal gate structure is provided. The method includes providing a semiconductor substrate with a planarized polysilicon material; patterned the planarized polysilicon material to form at least a first gate and a second gate, wherein the first gate is located on the active region and the second gate at least partially overlaps with the isolation region; forming an inter-layer dielectric material covering the gates; planarizing the inter-layer dielectric material until exposing the gates and forming an inter layer-dielectric layer; performing an etching process to remove the gates to form a first recess and a second recess within the inter-layer dielectric layer; forming a gate dielectric material on a surface of each of the recesses; forming at least a metal material within the recesses; and performing a planarization process.
    Type: Grant
    Filed: April 11, 2008
    Date of Patent: November 23, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chien-Ting Lin, Che-Hua Hsu, Li-Wei Cheng
  • Patent number: 7838946
    Abstract: A method for fabricating a semiconductor structure is disclosed. A substrate with a first transistor having a first dummy gate and a second transistor having a second dummy gate is provided. The conductive types of the first transistor and the second transistor are different. The first and second dummy gates are simultaneously removed to form respective first and second openings. A high-k dielectric layer, a second type conductive layer and a first low resistance conductive layer are formed on the substrate and fill in the first and second openings, with the first low resistance conductive layer filling up the second opening. The first low resistance conductive layer and the second type conductive layer in the first opening are removed. A first type conductive layer and a second low resistance conductive layer are then formed in the first opening, with the second low resistance conductive layer filling up the first opening.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: November 23, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chih-Hao Yu, Li-Wei Cheng, Che-Hua Hsu, Tian-Fu Chiang, Cheng-Hsien Chou, Chien-Ming Lai, Yi-Wen Chen, Chien-Ting Lin, Guang-Hwa Ma
  • Patent number: 7804141
    Abstract: A semiconductor element structure includes a first MOS having a first high-K material and a first metal for use in a first gate, a second MOS having a second high-K material and a second metal for use in a second gate and a bridge channel disposed in a recess connecting the first gate and the second gate for electrically connecting the first gate and the second gate, wherein the bridge channel is embedded in at least one of the first gate and the second gate.
    Type: Grant
    Filed: February 19, 2008
    Date of Patent: September 28, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Tian-Fu Chiang, Li-Wei Cheng, Che-Hua Hsu, Chih-Hao Yu, Cheng-Hsien Chou, Chien-Ming Lai, Yi-Wen Chen, Chien-Ting Lin, Guang-Hwa Ma
  • Patent number: 7799630
    Abstract: A method for manufacturing a CMOS device having dual metal gate includes providing a substrate having at least two transistors of different conductive types and a dielectric layer covering the two transistors, planarizing the dielectric layer to expose gate conductive layers of the two transistors, forming a patterned blocking layer exposing one of the conductive type transistor, performing a first etching process to remove a portion of a gate of the conductive type transistor, reforming a metal gate, removing the patterned blocking layer, performing a second etching process to remove a portion of a gate of the other conductive type transistor, and reforming a metal gate.
    Type: Grant
    Filed: January 23, 2008
    Date of Patent: September 21, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chih-Hao Yu, Li-Wei Cheng, Tian-Fu Chiang, Cheng-Hsien Chou, Chien-Ting Lin, Che-Hua Hsu, Guang-Hwa Ma
  • Publication number: 20100214757
    Abstract: An electronic device is provided. The electronic device includes a housing, a rotating mechanism and a first rotating member. The rotating mechanism, rotatably disposed in the housing, rotatable along a first direction and a second direction different from the first direction. The first rotating member, disposed on the housing, rotatable between a first position and a second position. When the first rotating member is in the first position, the first rotating member engages with the rotating mechanism. When the rotating mechanism rotates along the first direction, the rotating mechanism is separated from the first rotating member, whereinafter, the first rotating member is able to rotate from the first position to the second position.
    Type: Application
    Filed: May 7, 2009
    Publication date: August 26, 2010
    Applicant: QUANTA COMPUTER INC.
    Inventors: Lu-Lung Tsao, Cheng-Yuan Yang, Li-Wei Cheng
  • Patent number: 7759202
    Abstract: A semiconductor device includes a first gate structure including a gate dielectric layer directly contacting the substrate, a bottom electrode on the gate dielectric layer and a top electrode on the bottom electrode, and a second gate structure including a gate dielectric layer directly contacting the substrate and a gate electrode on the gate dielectric layer.
    Type: Grant
    Filed: August 25, 2008
    Date of Patent: July 20, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chien-Ting Lin, Li-Wei Cheng, Che-Hua Hsu, Yao-Tsung Huang, Guang-Hwa Ma
  • Patent number: 7745889
    Abstract: A metal oxide semiconductor (MOS) transistor with a Y structure metal gate is provided. The MOS transistor includes a substrate, a Y structure metal gate positioned on the substrate, two doping regions disposed in the substrate on two sides of the Y structure metal structure, a spacer, an insulating layer positioned outside the spacer, a dielectric layer positioned outside the insulating layer and a bevel edge covering the spacer. The spacer has a vertical sidewall, and the vertical sidewall surrounds a recess. A part of the Y structure metal gate is disposed in the recess, and a part of the Y structure metal gate is positioned on the bevel edge.
    Type: Grant
    Filed: March 2, 2009
    Date of Patent: June 29, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chin-Hsiang Lin, Chia-Jung Hsu, Li-Wei Cheng
  • Publication number: 20100112699
    Abstract: The invention discloses a porous composite biomaterial comprising of poly(?-glutamic acid)-g-chondroitin sulfate (?-PGA-g-CS) copolymer and poly(?-caprolactone). The composite biomaterial provides a three-dimensional microenvironment for using as a scaffold for tissue engineering and for supporting the attachment and proliferation of cells. The invention also discloses a method of producing a porous composite biomaterial.
    Type: Application
    Filed: December 29, 2008
    Publication date: May 6, 2010
    Inventors: Yu-Der LEE, Kuo-Yung Chang, Li-Wei Cheng
  • Publication number: 20100059833
    Abstract: A method for fabricating metal gate transistor is disclosed. First, a substrate having a first transistor region and a second transistor region is provided. Next, a stacked film is formed on the substrate, in which the stacked film includes at least one high-k dielectric layer and a first metal layer. The stacked film is patterned to form a plurality of gates in the first transistor region and the second transistor region, a dielectric layer is formed on the gates, and a portion of the dielectric layer is planarized until reaching the top of each gates. The first metal layer is removed from the gate of the second transistor region, and a second metal layer is formed over the surface of the dielectric layer and each gate for forming a plurality of metal gates in the first transistor region and the second transistor region.
    Type: Application
    Filed: September 11, 2008
    Publication date: March 11, 2010
    Inventors: Chih-Hao Yu, Li-Wei Cheng, Che-Hua Hsu, Cheng-Hsien Chou, Tian-Fu Chiang, Chien-Ming Lai, Yi-Wen Chen, Jung-Tsung Tseng, Chien-Ting Lin, Guang-Hwa Ma
  • Publication number: 20100052074
    Abstract: A method for fabricating a transistor having metal gate is disclosed. First, a substrate is provided, in which the substrate includes a first transistor region and a second transistor region. A plurality of dummy gates is formed on the substrate, and a dielectric layer is deposited on the dummy gate. The dummy gates are removed to form a plurality of openings in the dielectric layer. A high-k dielectric layer is formed to cover the surface of the dielectric layer and the opening, and a cap layer is formed on the high-k dielectric layer thereafter. The cap layer disposed in the second transistor region is removed, and a metal layer is deposited on the cap layer of the first transistor region and the high-k dielectric layer of the second transistor region. A conductive layer is formed to fill the openings of the first transistor region and the second transistor region.
    Type: Application
    Filed: August 26, 2008
    Publication date: March 4, 2010
    Inventors: Chien-Ting Lin, Li-Wei Cheng, Jung-Tsung Tseng, Che-Hua Hsu, Chih-Hao Yu, Tian-Fu Chiang, Yi-Wen Chen, Chien-Ming Lai, Cheng-Hsien Chou
  • Patent number: 7659189
    Abstract: A semiconductor MOS device includes a semiconductor substrate; a gate oxide layer disposed on the semiconductor substrate; a fully silicided gate electrode disposed on the gate oxide layer; a composite thin film interposed between the fully silicided gate electrode and the gate oxide layer; a spacer on sidewall of the fully silicided gate electrode; and a source/drain region implanted into the semiconductor substrate next to the spacer. A method for forming the semiconductor MOS device is disclosed.
    Type: Grant
    Filed: March 16, 2007
    Date of Patent: February 9, 2010
    Assignee: United Microelectronics Corp.
    Inventors: Chien-Ting Lin, Li-Wei Cheng, Che-Hua Hsu, Yao-Tsung Huang, Guang-Hwa Ma
  • Publication number: 20090258482
    Abstract: A method of fabricating a metal gate structure is provided. The method includes providing a semiconductor substrate with a planarized polysilicon material; patterned the planarized polysilicon material to form at least a first gate and a second gate, wherein the first gate is located on the active region and the second gate at least partially overlaps with the isolation region; forming an inter-layer dielectric material covering the gates; planarizing the inter-layer dielectric material until exposing the gates and forming an inter layer-dielectric layer; performing an etching process to remove the gates to form a first recess and a second recess within the inter-layer dielectric layer; forming a gate dielectric material on a surface of each of the recesses; forming at least a metal material within the recesses; and performing a planarization process.
    Type: Application
    Filed: April 11, 2008
    Publication date: October 15, 2009
    Inventors: Chien-Ting Lin, Che-Hua Hsu, Li-Wei Cheng
  • Publication number: 20090242997
    Abstract: A method for fabricating a semiconductor structure is disclosed. A substrate with a first transistor having a first dummy gate and a second transistor having a second dummy gate is provided. The conductive types of the first transistor and the second transistor are different. The first and second dummy gates are simultaneously removed to form respective first and second openings. A high-k dielectric layer, a second type conductive layer and a first low resistance conductive layer are formed on the substrate and fill in the first and second openings, with the first low resistance conductive layer filling up the second opening. The first low resistance conductive layer and the second type conductive layer in the first opening are removed. A first type conductive layer and a second low resistance conductive layer are then formed in the first opening, with the second low resistance conductive layer filling up the first opening.
    Type: Application
    Filed: March 28, 2008
    Publication date: October 1, 2009
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Hao Yu, Li-Wei Cheng, Che-Hua Hsu, Tian-Fu Chiang, Cheng-Hsien Chou, Chien-Ming Lai, Yi-Wen Chen, Chien-Ting Lin, Guang-Hwa Ma
  • Publication number: 20090236669
    Abstract: A method for fabricating metal gate transistors and a polysilicon resistor is disclosed. First, a substrate having a transistor region and a resistor region is provided. A polysilicon layer is then formed on the substrate to cover the transistor region and the resistor region of the substrate. Next, a portion of the polysilicon layer disposed in the resistor is removed, and the remaining polysilicon layer is patterned to create a step height between the surface of the polysilicon layer disposed in the transistor region and the surface of the polysilicon layer disposed in the resistor region.
    Type: Application
    Filed: March 20, 2008
    Publication date: September 24, 2009
    Inventors: Yi-Wen Chen, Li-Wei Cheng, Che-Hua Hsu, Chih-Hao Yu, Cheng-Hsien Chou, Chien-Ming Lai, Tian-Fu Chiang, Chien-Ting Lin, Guang-Hwa Ma