Patents by Inventor Lianzhong Yu

Lianzhong Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temporary bridge for micro machined structures
    Patent number: 6458513
    Abstract: A micro machined structure includes one or more temporary bridges for temporarily coupling the micro machined structure to a support structure.
    Type: Grant
    Filed: September 27, 1999
    Date of Patent: October 1, 2002
    Assignee: Input/Output, Inc.
    Inventors: Lianzhong Yu, Howard D. Goldberg, Duli Yu
  • Dual axis micro machined mirror device
    Patent number: 6454421
    Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges. At least two electrostatic force application pads are disposed to rotate the mirror about a primary axis and about a secondary axis.
    Type: Grant
    Filed: June 1, 2001
    Date of Patent: September 24, 2002
    Assignee: Input/Output, Inc.
    Inventors: Duli Yu, Lianzhong Yu, Howard Goldberg, Martin Schmidt
  • Accelerometer with re-entrant grooves
    Publication number: 20020104379
    Abstract: An accelerometer for measuring seismic data. The accelerometer includes a measurement mass assembly having top and bottom electrodes, a top capacitor electrode, and bottom capacitor electrode. One or more of the electrodes include re-entrant openings formed in the surface of the electrodes.
    Type: Application
    Filed: May 29, 2001
    Publication date: August 8, 2002
    Applicant: Input/Output, Inc.
    Inventors: Robert Ried, Arjun Selvakumar, Howard Goldberg, Martin Schmidt, Lianzhong Yu
  • Dual axis micro-machined mirror device
    Publication number: 20020012180
    Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges. At least two electrostatic force application pads are disposed to rotate the mirror about a primary axis and about a secondary axis.
    Type: Application
    Filed: June 1, 2001
    Publication date: January 31, 2002
    Inventors: Duli Yu, Lianzhong Yu, Howard Goldberg, Martin Schmidt
  • Micro machined mirror
    Patent number: 6315423
    Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
    Type: Grant
    Filed: July 13, 1999
    Date of Patent: November 13, 2001
    Assignee: Input/Output, Inc.
    Inventors: Duli Yu, Lianzhong Yu, Howard D. Goldberg, Martin A. Schmidt, Robert P. Ried