Abstract: The method for fabricating a semiconductor device is provided. A doped semiconductor layer is formed over the substrate. The doped semiconductor layer is patterned to form a plurality of doped semiconductor patterns. An implantation process is performed to implant a dopant into the doped semiconductor patterns. A process temperature of the implantation process is no more than about ?50° C. The dopants of the implantation process and the doped semiconductor patterns have the same conductivity type.

Abstract: An image inspection method of die to database is provided, and the positions in the to-be-inspected chips within one wafer may be selected. In the method, a plurality of inspection areas in a plurality of positions in the to-be-inspected chips within a wafer are selected, a plurality of raw images of the inspection areas are obtained, and a plurality of locations of the raw images are then decoded. After that, an image extraction is performed on the raw images to obtain a plurality of image contours. Thereafter, the image contours are compared with a design database of the chip in order to obtain a result of a defect inspection, and execute the same thing in whole wafer.

Abstract: A method of detecting bitmap failure associated with physical coordinates is provided. In the method, data of wafer mapping inspection are obtained first, and the data include images of defects in each of layers within a wafer and a plurality of physical coordinates of the defects. Thereafter, a bitmap failure detection is performed to obtain digital coordinates of failure bits within the wafer. The digital coordinates are converted into a plurality of physical locations, and the physical locations are overlapped with the physical coordinates so as to rapidly obtain correlations between the failure bits and the defects.

Abstract: A blocking semiconductor layer minimizes penetration of implant species into a semiconductor layer beneath the blocking semiconductor layer. The blocking semiconductor layer may have grains with relatively fine or small grain sizes and/or may have a dopant in a relatively low concentration to minimize penetration of implant species into the semiconductor layer beneath the blocking semiconductor layer.

Abstract: A semiconductor device includes a substrate, a semiconductor layer, and a material layer. The semiconductor layer is formed over the substrate. The material layer is formed over the semiconductor layer. The semiconductor layer and the material layer have a tapered profile in a vertical direction extending from the substrate.

Abstract: An improved gate structure is provided whereby the gate structure is defined by a trench, the trench having a first oxide layer and a second oxide layer. The invention also provides methods for fabricating the gate structure of the invention defined by a trench having a first oxide layer and a second oxide layer.

Abstract: A method of predicting product yield may include determining defect characteristics for a product based at least in part on inspection data associated with critical layers of the product, determining yield loss for each of the critical layers, and estimating product yield based on the determined yield loss of the critical layers. A corresponding apparatus is also provided.

Abstract: A method for making a nonvolatile memory device includes the following steps. A conductive structure is formed, wherein the conductive structure has a first top portion. The first top portion is converted into a second top portion having a domed surface.

Abstract: A method of forming a semiconductor device is provided. The method includes providing a semiconductor substrate, and forming a first conductive layer over the substrate. In one example, an insulating layer may be formed over the semiconductor substrate, with the first conductive layer being formed over the insulating layer. The method also includes forming an interpoly dielectric layer over the first conductive layer. In this regard, forming the interpoly dielectric layer includes forming a silicon oxide layer, and subjecting the silicon oxide layer to oxide densification to form an oxide-densified silicon oxide layer. And the method includes forming a second conductive layer over the interpoly dielectric layer.

Abstract: A method for making a nonvolatile memory device includes the following steps. A conductive structure is formed, wherein the conductive structure has a first top portion. The first top portion is converted into a second top portion having a domed surface.

Abstract: A band gap engineered, charge trapping memory cell includes a charge storage structure including a trapping layer. a blocking layer, and a dielectric tunneling structure including a thin tunneling layer, a thin bandgap offset layer and a thin isolation layer comprising silicon oxynitride. The memory cell is manufactured using low thermal budget processes.

Abstract: A method of predicting product yield may include determining defect characteristics for a product based at least in part on inspection data associated with critical layers of the product, determining yield loss for each of the critical layers, and estimating product yield based on the determined yield loss of the critical layers. A corresponding apparatus is also provided.

Abstract: An etching method for semiconductor element is provided. The etching method includes the following procedure. First, a to-be-etched substrate is provided. Then, a silicon-rich silicon oxide (SRO) layer is formed on the to-be-etched substrate. Afterwards, an anti-reflective layer is formed on the SRO layer. Then, a patterned photo resist layer is formed on the anti-reflective layer. Afterwards, the anti-reflective layer, the SRO layer and the to-be-etched substrate is etched so as to form an opening.

Abstract: A fabrication method of an electronic device is provided. First, a substrate is provided. Then, a patterned amorphous carbon (?-C) layer is formed on the substrate and exposes part of the substrate. Next, a first ?-C layer covering the patterned ?-C layer and part of the substrate is formed. Then, part of the substrate and part of the first ?-C layer covering part of the substrate are removed, so as to form a patterned substrate and a second ?-C layer.

Abstract: A band gap engineered, charge trapping memory cell includes a charge storage structure including a trapping layer. a blocking layer, and a dielectric tunneling structure including a thin tunneling layer, a thin bandgap offset layer and a thin isolation layer comprising silicon oxynitride. The memory cell is manufactured using low thermal budget processes.

Abstract: The present invention relates generally to semiconductors, and more specifically to semiconductor memory device structures and an improved fabrication process for making the same. The improved fabrication process allows the self-aligned contacts and local interconnects to the processed simultaneously. The process allows the minimal distance requirement between the self-aligned contacts and the local interconnects to be widened, which makes the patterning of self-aligned contacts and local interconnects easier. The widened minimal distance requirement also allows further memory cell shrinkage. The improved structures of self-aligned contacts and local interconnects also have excellent isolation characteristic.

Abstract: A novel cleaning method for preventing defects and particles resulting from post tungsten etch back or tungsten chemical mechanical polish is provided. The cleaning method comprises providing a stack structure of a semiconductor device including a tungsten plug in a dielectric layer. The tungsten plug has a top excess portion. A surface of the stack structure is then contacted with a cleaning solution comprising hydrogen peroxide. Next, the surface of the stack structure is contacted with dilute hydrofluoric acid. The cleaning solution and hydrofluoric acid are capable of removing the top excess portion and particles on the surface of the stack structure.

Abstract: A method for symmetric deposition of metal layer over a metal layer registration key comprises using MOCVD to form the metal layer. Once the symmetric metal layer is formed, a metal layer registration key can be accurately detected and the metal layer registration key overlay shift can be improved.

Abstract: A non-volatile memory structure comprises a trapping layer that includes a plurality of silicon-rich, silicon nitride layers. Each of the plurality of silicon-rich, silicon nitride layers can trap charge and thereby increase the density of memory structures formed using the methods described herein. In one aspect, the plurality of silicon-rich, silicon nitride layers are fabricated by converting an amorphous silicon layer by remote plasma nitrogen (RPN).

Abstract: The present invention relates generally to semiconductors, and more specifically to semiconductor memory device structures and an improved fabrication process for making the same. The improved fabrication process allows the self-aligned contacts and local interconnects to the processed simultaneously. The process allows the minimal distance requirement between the self-aligned contacts and the local interconnects to be widened, which makes the patterning of self-aligned contacts and local interconnects easier. The widened minimal distance requirement also allows further memory cell shrinkage. The improved structures of self-aligned contacts and local interconnects also have excellent isolation characteristic.