Patents by Inventor Lorenzo Baldo

Lorenzo Baldo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12164101
    Abstract: A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.
    Type: Grant
    Filed: July 25, 2023
    Date of Patent: December 10, 2024
    Assignee: poLight ASA
    Inventors: Enri Duqi, Dario Paci, Lorenzo Baldo, Domenico Giusti
  • Patent number: 12134556
    Abstract: A semiconductor device includes: a substrate; a transduction microstructure integrated in the substrate; a cap joined to the substrate and having a first face adjacent to the substrate and a second, outer, face; and a channel extending through the cap from the second face to the first face and communicating with the transduction microstructure. A protective membrane made of porous polycrystalline silicon permeable to aeriform substances is set across the channel.
    Type: Grant
    Filed: November 23, 2021
    Date of Patent: November 5, 2024
    Assignees: STMICROELECTRONICS S.R.L., STMicroelectronics International N.V.
    Inventors: Enri Duqi, Lorenzo Baldo, Paolo Ferrari, Benedetto Vigna, Flavio Francesco Villa, Laura Maria Castoldi, Ilaria Gelmi
  • Publication number: 20240295454
    Abstract: A pressure-sensor includes a substrate with a cavity therein and a membrane suspended over the cavity. The cavity is connected to external air pressure so a change in external air pressure causes out-of-plane movement of the membrane. A frame suspended over the membrane includes a segment connected to the membrane but disconnected from other frame portions. A projection extends from the frame. A first spring is connected to the projection, a second spring is connected to the segment, and an end portion connects the springs so out-of-plane movement of the membrane applies out-of-plane force to the second spring, which is transferred to the first spring by the end portion and translated to an in-plane force by the first spring and applied to the projection. This causes lateral sliding movement of the frame with respect to the substrate. A capacitive-sensor detects sliding movement of the frame with respect to the substrate.
    Type: Application
    Filed: March 3, 2023
    Publication date: September 5, 2024
    Applicant: STMicroelectronics International N.V.
    Inventors: Lorenzo BALDO, Filippo DANIELE, Enri DUQI
  • Patent number: 12024422
    Abstract: An integrated device includes: a first die; a second die coupled in a stacked way on the first die along a vertical axis; a coupling region arranged between facing surfaces of the first die and of the second die, which face one another along the vertical axis and lie in a horizontal plane orthogonal to the vertical axis, for mechanical coupling of the first and second dies; electrical-contact elements carried by the facing surfaces of the first and second dies, aligned in pairs along the vertical axis; and conductive regions arranged between the pairs of electrical-contact elements carried by the facing surfaces of the first and second dies, for their electrical coupling. Supporting elements are arranged at the facing surface of at least one of the first and second dies and elastically support respective electrical-contact elements.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: July 2, 2024
    Assignee: STMicroelectronics S.r.l.
    Inventors: Enri Duqi, Lorenzo Baldo, Domenico Giusti
  • Publication number: 20240061236
    Abstract: A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.
    Type: Application
    Filed: July 25, 2023
    Publication date: February 22, 2024
    Applicant: poLight ASA
    Inventors: Enri DUQI, Dario PACI, Lorenzo BALDO, Domenico GIUSTI
  • Patent number: 11873215
    Abstract: A MEMS device formed by a substrate, having a surface; a MEMS structure arranged on the surface; a first coating region having a first Young's modulus, surrounding the MEMS structure at the top and at the sides and in contact with the surface of the substrate; and a second coating region having a second Young's modulus, surrounding the first coating region at the top and at the sides and in contact with the surface of the substrate. The first Young's modulus is higher than the second Young's modulus.
    Type: Grant
    Filed: March 1, 2022
    Date of Patent: January 16, 2024
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Enri Duqi, Marco Del Sarto, Lorenzo Baldo
  • Publication number: 20230356999
    Abstract: A microelectromechanical device includes a support structure, a microelectromechanical system die, incorporating a microstructure and a connection structure between the microelectromechanical system die and the support structure. The connection structure includes a spacer structure, joined to the support structure, and a film applied to one face of the spacer structure opposite to the support structure. The spacer structure laterally delimits at least in part a cavity and the film extends on the cavity, at a distance from the support structure. The microelectromechanical system die is joined to the film on the cavity.
    Type: Application
    Filed: April 27, 2023
    Publication date: November 9, 2023
    Applicant: STMICROELECTRONICS S.r.l.
    Inventors: Filippo DANIELE, Lorenzo BALDO, Davide MAERNA, Enri DUQI
  • Publication number: 20230280227
    Abstract: A pressure sensor device is provided with: a pressure detection structure made in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. The pressure sensor device is also provided with a heating structure, accommodated in the housing cavity and for allowing heating of the pressure detection structure from the inside of the package.
    Type: Application
    Filed: February 17, 2023
    Publication date: September 7, 2023
    Applicant: STMICROELECTRONICS S.r.l.
    Inventors: Enri DUQI, Filippo DANIELE, Lorenzo BALDO, Giulio CAPELLI, Salvatore ALONGI
  • Patent number: 11747608
    Abstract: A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: September 5, 2023
    Inventors: Enri Duqi, Dario Paci, Lorenzo Baldo, Domenico Giusti
  • Patent number: 11673799
    Abstract: To manufacture an oscillating structure, a wafer is processed by: forming torsional elastic elements; forming a mobile element connected to the torsional elastic elements; processing the first side of the wafer to form a mechanical reinforcement structure; and processing the second side of said wafer by steps of chemical etching, deposition of metal material, and/or deposition of piezoelectric material. Processing of the first side of the wafer is carried out prior to processing of the second side of the wafer so as not to damage possible sensitive structures formed on the first side of the wafer.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: June 13, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Enri Duqi, Nicolo′ Boni, Lorenzo Baldo, Massimiliano Merli, Roberto Carminati
  • Patent number: 11603311
    Abstract: A MEMS switch is actuatable by a fluid, and includes a piezoelectric pressure sensor that detects the movement of a fluid generating a negative pressure. The piezoelectric pressure sensor is formed by a chip of semiconductor material having a through cavity and a sensitive membrane, which extends over the through cavity and has a first and a second surface. The piezoelectric pressure sensor is mounted on a face of a board having a through hole so that the through cavity overlies and is in fluid connection with the through hole. The board has a fixing structure, which enables securing in an opening of a partition wall separating a first and a second space from each other. The board is arranged so that the first surface of the sensitive membrane faces the first space, and the second surface of the sensitive membrane faces the second space.
    Type: Grant
    Filed: October 16, 2020
    Date of Patent: March 14, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Enri Duqi, Fabrizio Cerini, Lorenzo Baldo
  • Patent number: 11560886
    Abstract: A micropump device is formed in a monolithic semiconductor body integrating a plurality of actuator elements arranged side-by-side. Each actuator element has a first chamber extending at a distance from a first face of the monolithic body; a membrane arranged between the first face and the first chamber; a piezoelectric element extending on the first face over the membrane; a second chamber, arranged between the first chamber and a second face of the monolithic body; a fluidic inlet path fluidically connecting the second chamber with the outside of the monolithic body; and a fluid outlet opening extending in a transverse direction in the monolithic body from the second face as far as the second chamber, through the first chamber. The monolithic formation of the actuator elements and the possibility of driving the actuator elements at different voltages enable precise adjustment of flows, from very low values to high values.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: January 24, 2023
    Assignee: STMICROELECTRONICS S.r.l.
    Inventors: Domenico Giusti, Lorenzo Baldo, Enri Duqi
  • Patent number: 11555554
    Abstract: A microfluidic valve formed in a body having a first and a second surface; an inlet channel extending in the body from the second surface; a first transverse channel extending in the body in a transverse direction with respect to the inlet channel; and an outlet channel extending in the body from the first surface. The inlet channel, the first transverse channel and the outlet channel form a fluidic path. The microfluidic valve further has an occluding portion, formed by the body and extending over the transverse channel; and a piezoelectric actuator coupled to the occluding portion and configured to move the occluding portion from an opening position of the valve, where the occluding portion does not interfere with the fluidic path, and a closing position of the valve, where the occluding portion interferes with and interrupts the fluidic path.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: January 17, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Enri Duqi, Lorenzo Baldo
  • Patent number: 11418888
    Abstract: An actuation structure of a MEMS electroacoustic transducer is formed in a die of semiconductor material having a monolithic body with a front surface and a rear surface extending in a horizontal plane x-y plane and defined in which are: a frame; an actuator element arranged in a central opening defined by the frame; cantilever elements, coupled at the front surface between the actuator element and the frame; and piezoelectric regions arranged on the cantilever elements and configured to be biased to cause a deformation of the cantilever elements by the piezoelectric effect. A first stopper arrangement is integrated in the die and configured to interact with the cantilever elements to limit a movement thereof in a first direction of a vertical axis orthogonal to the horizontal plane, x-y plane towards the underlying central opening.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: August 16, 2022
    Assignee: STMICROELECTRONICS S.r.l.
    Inventors: Fabrizio Cerini, Enri Duqi, Silvia Adorno, Lorenzo Baldo
  • Publication number: 20220185661
    Abstract: A MEMS device formed by a substrate, having a surface; a MEMS structure arranged on the surface; a first coating region having a first Young's modulus, surrounding the MEMS structure at the top and at the sides and in contact with the surface of the substrate; and a second coating region having a second Young's modulus, surrounding the first coating region at the top and at the sides and in contact with the surface of the substrate. The first Young's modulus is higher than the second Young's modulus.
    Type: Application
    Filed: March 1, 2022
    Publication date: June 16, 2022
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Enri DUQI, Marco DEL SARTO, Lorenzo BALDO
  • Patent number: 11358862
    Abstract: A micro-electro-mechanical device, comprising a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region facing the first buried cavity; a second cavity facing the first buried cavity; a decoupling trench extending from the monolithic body and separating the sensitive region from a peripheral portion of the monolithic body; a cap die, forming an ASIC, bonded to and facing the first face of the monolithic body; and a first gap between the cap die and the monolithic body. The device also comprises at least one spacer element between the monolithic body and the cap die; at least one stopper element between the monolithic body and the cap die; and a second gap between the stopper element and one between the monolithic body and the cap die. The second gap is smaller than the first gap.
    Type: Grant
    Filed: May 7, 2020
    Date of Patent: June 14, 2022
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Enri Duqi, Lorenzo Baldo, Marco Del Sarto, Mikel Azpeitia Urquia
  • Publication number: 20220169498
    Abstract: A semiconductor device includes: a substrate; a transduction microstructure integrated in the substrate; a cap joined to the substrate and having a first face adjacent to the substrate and a second, outer, face; and a channel extending through the cap from the second face to the first face and communicating with the transduction microstructure. A protective membrane made of porous polycrystalline silicon permeable to aeriform substances is set across the channel.
    Type: Application
    Filed: November 23, 2021
    Publication date: June 2, 2022
    Applicants: STMICROELECTRONICS S.R.L., STMicroelectronics International N.V.
    Inventors: Enri DUQI, Lorenzo BALDO, Paolo FERRARI, Benedetto Vigna, Flavio Francesco VILLA, Laura Maria CASTOLDI, Ilaria GELMI
  • Patent number: 11294168
    Abstract: A MEMS micromirror device includes a monolithic body of semiconductor material having a first main surface and a second main surface, with the monolithic body having an opening extending from the second main surface and including a suspended membrane of monocrystalline semiconductor material extending between the opening and the first main surface of the monolithic body. The suspended membrane includes a supporting frame and a mobile mass carried by the supporting frame and rotatable about an axis parallel to the first main surface, with the mobile mass having a width less than a width of the opening. A reflecting region extends over the mobile mass.
    Type: Grant
    Filed: August 5, 2020
    Date of Patent: April 5, 2022
    Assignee: STMicroelectronics S.r.l.
    Inventors: Enri Duqi, Lorenzo Baldo, Roberto Carminati, Flavio Francesco Villa
  • Publication number: 20210381665
    Abstract: Lighting device (22) for a false ceiling (10) comprising a plurality of T-profiles (14) having respective longitudinal axes (A) and arranged in a square mesh grid (12), in which each T-profile (14) has a lower wall with a width (W) and in which the grid (12) has a center distance (D) between the longitudinal axes (A) of T-profiles (14) parallel and adjacent to one another, in which the lighting device (22) has an elongated parallelepiped shape with a width (W?) comparable to the width (W) of said T-profiles (14), a height (h) of less than 15 mm and a length (D?) comparable to said center distance (D) between the longitudinal axes (A) of T-profiles (14) parallel and adjacent to one another, and in which said lighting device (22) is capable of being fitted directly in contact with the lower wall of a respective T-profile (14).
    Type: Application
    Filed: November 7, 2018
    Publication date: December 9, 2021
    Inventors: Dennis Michaud, Simon Bobbo, Matteo Caldon, Roberta Frare, Lorenzo Baldo, Eleonora Pappalardo, Alessandro Scordino, Francesca Peruzzo, Werner De Groodt, Kim Dupont-Madinier, Timothy Briggs
  • Patent number: 11079298
    Abstract: A MEMS pressure sensor includes a monolithic body of semiconductor material having a first face and a second face and housing a first buried cavity and a second buried cavity, arranged under the first buried cavity and projecting laterally therefrom. A first sensitive region is formed between the first buried cavity and the first face at a first depth, and a second sensitive region is formed between the second buried cavity and the first face at a second depth greater than the first depth. The monolithic body also houses a first piezoresistive sensing element and a second piezoresistive sensing element, integrated in the first and second sensitive regions, respectively.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: August 3, 2021
    Assignee: STMicroelectronics S.r.l.
    Inventors: Enri Duqi, Lorenzo Baldo