Abstract: An electronic memory device organized into sections which are in turn divided into blocks formed of cells and their associated decoding and addressing circuits, the cells being connected in a predetermined circuit configuration and each block being included between two opposite contact regions which are interconnected by parallel continuous conduction lines referred to as the bit lines. In the present invention, at least one interruption is provided in each bit line near a contact region by inserting a controlled switch which functions as a block selector. Advantageously, the proposed solution allows each block to be isolated individually by enabling or disabling as appropriate the switches of the cascade connected blocks.

Abstract: The process proposed allows provision of a matrix topography for electronic memory devices using self-alignment etchings capable of removing those spurious electrical contacts between adjacent memory cells. The self-aligned etching process proposed for providing a plurality of mutually parallel word lines in a first conducting layer deposited over a planarized architecture obtained starting from a semiconductor substrate. Provided on the semiconductor substrate is a plurality of active elements extending along separate parallel lines, e.g., memory cell bit lines, and comprising gate regions formed by a first conducting layer, a dielectric interpoly layer and a second conducting layer with said regions being insulated from each other by dielectric insulation films to form said architecture with said word lines being defined photolithographically by protective strips.

Abstract: A method of depositing a dielectric ply structure to optimize the planarity of electronic devices that include a plurality of active elements having gate regions laid across the substrate as discrete parallel lines, such as the bit lines of memory cells. In accordance with the principles of the present invention, the plurality of bit lines may be isolated from one another by the dielectric ply structure to provide a planar architecture onto which an optional conductive layer may be deposited. The resulting planarization avoids the typical shortcomings of the prior art, such as the lack of electrical continuity in the word lines or their excessively high electrical resistance from slenderized portions in the conductive sections due to poor planarity of the surfaces upon which the conductive layer is deposited.

Abstract: Self-aligned etching process for providing a plurality of mutually parallel word lines in a first conducting layer deposited over a planarized architecture obtained starting from a semiconductor substrate on which is provided a plurality of active elements extending along separate parallel lines e.g., memory cell bit lines and comprising gate regions made up of a first conducting layer, an intermediate dielectric layer and a second conducting layer with said regions being insulated from each other by insulation regions to form said architecture with said word lines being defined photolithographically by protective strips implemented by means of: a vertical profile etching for complete removal from the unprotected areas of the first conducting layer of the second conducting layer and of the intermediate dielectric layer respectively, and a following isotropic etching of the first conducting layer.

Abstract: An electronic memory device organized into sections which are in turn divided into blocks formed of cells and their associated decoding and addressing circuits, the cells being connected in a predetermined circuit configuration and each block being included between two opposite contact regions which are interconnected by parallel continuous conduction lines referred to as the bit lines. In the present invention, at least one interruption is provided in each bit line near a contact region by inserting a controlled switch which functions as a block selector. Advantageously, the proposed solution allows each block to be isolated individually by enabling or disabling as appropriate the switches of the cascade connected blocks.

Abstract: A method of depositing a layered dielectric structure to improve the planarity of electronic devices which include a plurality of active elements having gate regions laid across the substrate as discrete parallel lines, such as the bit lines of memory cells. The bit lines are isolated from one another by a layered dielectric structure to provide a planar architecture onto which an optional conductive layer may be deposited. The dielectric structure is formed from a highly planarizing dielectric layer of the SOG type spun over a first insulating dielectric layer and solidified by means of a thermal polymerization process. After solidifying the dielectric layer, it is subjected to a rapid thermal annealing treatment.

Abstract: An electronic memory device organized into sections which are in turn divided into blocks formed of cells and their associated decoding and addressing circuits, the cells being connected in a predetermined circuit configuration and each block being included between two opposite contact regions which are interconnected by parallel continuous conduction lines referred to as the bit lines. In the present invention, at least one interruption is provided in each bit line near a contact region by inserting a controlled switch which functions as a block selector. Advantageously, the proposed solution allows each block to be isolated individually by enabling or disabling as appropriate the switches of the cascade connected blocks.