Patents by Inventor Madan Kumar Shimoga Mylarappa

Madan Kumar Shimoga Mylarappa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Physical Vapor Deposition (PVD) Chamber Titanium-Tungsten (TiW) Target For Particle Improvement
    Publication number: 20240068086
    Abstract: Target assemblies for PVD chambers are provided herein. In some embodiments, a target assembly for a PVD chamber includes: a backing plate; and a target coupled to the backing plate and having a substrate facing surface opposite the backing plate, wherein a peripheral portion of the target includes an angled surface extending radially outward and toward the backing plate, wherein an annular portion of the angled surface has a surface roughness greater than a surface roughness of a remainder of the substrate facing surface of the target.
    Type: Application
    Filed: December 2, 2022
    Publication date: February 29, 2024
    Inventors: Sundarapandian Ramalinga Vijayalakshmi REDDY, Kirankumar Neelasandra SAVANDAIAH, Junqi WEI, Bridger Earl HOERNER, Kelvin Tai Ming BOH, Madan Kumar SHIMOGA MYLARAPPA
  • Target profile for a physical vapor deposition chamber target
    Patent number: D940765
    Type: Grant
    Filed: December 2, 2020
    Date of Patent: January 11, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: David Gunther, Jiao Song, Kirankumar Neelasandra Savandaiah, Madan Kumar Shimoga Mylarappa
  • Target profile for a physical vapor deposition chamber target
    Patent number: D966357
    Type: Grant
    Filed: December 31, 2021
    Date of Patent: October 11, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: David Gunther, Jiao Song, Kirankumar Neelasandra Savandaiah, Madan Kumar Shimoga Mylarappa
  • Target profile for a physical vapor deposition chamber target
    Patent number: D1007449
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: December 12, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: David Gunther, Kirankumar Neelasandra Savandaiah, Jiao Song, Madan Kumar Shimoga Mylarappa, Yue Cui, Nuno Yen-Chu Chen, Mengxue Wu